臺灣博碩士論文加值系統

本實驗是利用摻雜不同含量的玻璃粉末 ( 1wt%、3wt%、5wt%、10wt% ) 之ZnO靶材，並在熱壓真空下製備ZnO靶材，以氮氣做為燒結氣氛，在150kN的壓力下，進行不同的溫度燒結( 1000°C、1100°C、1200°C )，探討其燒結溫度以及玻璃粉末的摻雜量對ZnO靶材緻密性、顯微結構及電性性質之影響。
結果顯示，玻璃粉末摻雜量的增加會影響其結晶結構;從FE-SEM表面結構觀察中顯示，燒結溫度與玻璃粉末的摻雜量影響緻密度和晶粒大小;當燒結溫度為1000°C與玻璃粉末的摻雜量在3wt% 以上時，氧化鋅靶材的緻密度達99.8% 以上，其電性亦有顯著地提昇。

This research is studied the effect of glass doping on the densification behavior and electrical properties of ZnO ceramics. The adding glass powder is ranged from 1 to 10 wt%. The glass doped ZnO ceramics is hot-pressed at sintering temperature of 1000°C to 1200°C under 150 kN pressure in a N2 atmosphere.
The resultant data showed that addition of glass increased the densification rate and grain size of ZnO ceramics. The liquid phase of glass dopant assisted the densification of ZnO ceramics at lower sintering temperature. In addition, hot-pressing also promoted the densification of ZnO ceramics. As a result, the ZnO ceramics can reach to a 99.8% of theoretical density at 1000°C.

中文摘要 I
英文摘要 II
致謝 III
總目錄 IV
表目錄 VI
圖目錄 VII
第一章　緒論 1
1-1前言 1
1-2 研究動機與目的 2
第二章 理論基礎 3
2-1 ZnO 晶體結構及特性 3
2-2 燒結理論 6
2-1-1 燒結原理 6
2-1-2緻密化現象 8
2-1-3粉末的燒結機制 10
2-3 文獻回顧 14
第三章 實驗步驟 42
3-1塊材的製備 44
3-2燒結系統 47
3-3 塊材燒結製成及參數設定 50
3-3 塊材性質分析 51
3-3-1 X光繞射分析儀 51
3-3-2 FE-SEM表面形貌分析 56
3-3-3 LCR電性量測 58
第四章 結果與討論 61
4-1 緻密度 61
4-2 XRD結晶結構分析 64
4-3 FE-SEM表面結構分析 68
4-3-1 破斷面形貌分析 68
4-3-2 腐蝕後表面形貌 74
4-4 晶粒大小 80
4-5 LCR電性分析 83
4-5-1 電阻量測 83
4-5-2 電容量測 86
第五章 結論 89
參考文獻 90

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