臺灣博碩士論文加值系統

本論文透過金屬奈米粒子產生表面電漿效應(Surface Plasmon Resonance, SPR)應用於表面金字塔結構矽太陽能電池(Texturing Silicon Solar Cells)之特 性研究。首先利用酸蝕刻矽晶片表面以形成金字塔抗反射結構來改善太陽能 電池的光捕捉效果。接著,在正面蒸鍍二氧化鈦(TiO2)空間層(Space Layer)。 然後分別製作不同奈米尺寸之銀奈米粒子(Silver Nanoparticles, Ag NPs)及 銦奈米粒子(Indium Nanoparticles, In NPs)於二氧化鈦上,探討其表面電漿 效應。最後,再覆蓋一層氧化鋁(Al2O3)薄膜於銀奈米粒子及銦奈米粒子表面, 使其形成具有電漿效應之抗反射層薄膜(Plasmonic Anti-reflection Coating, PARC),入射光照射於 PARC 抗反射層,內部之金屬粒子激發產生 SPR 使電 場侷域性增函,而氧化鋁薄膜也有防止奈米金屬粒子氧化之凾能,並提升太
陽能電池對光的吸收,進而提升太陽能電池之整體光電流(Photocurrent, Iph)及光電轉換效率(Conversion efficiency, η)。所有製作完成的太陽能電池進行反 射率(Reflectance)、掃描式電子顯微鏡 (Scanning Electron Microscope, SEM)、 外部量子效率(External Quantum Efficiency, EQE)、暗電流 I-V 及照光 I-V 等 特性量測,以分析具表面電漿效應的太陽能電池光電特性。
經由量測出的數據分析後,我們發現銦奈米粒子比銀奈米粒子在電池上 有更好的光捕捉效果。同時我們利用最佳條件之 PARC 結構太陽能電池與未 覆蓋奈米粒子之雙層反射層(DL-ARC)結構太陽能電池做比較。其中 DL-ARC (二氧化鈦 / 氧化鋁) 結構太陽能電池,在二氧化鈦厚度為 20 nm 與氧化鋁薄膜 65 nm,其光電流密度提升率為 13.31%( 31.16 mA/cm2→ 15.14mA/cm2)及轉換效率提升率為 15.14% (12.80% → 14.78%),而 PARC (二氧化鈦 (20 nm) / 銦奈米粒子(3.8 nm) / 氧化鋁 (65 nm) ) 結構太陽能電 池,其中因內部之金屬粒子產生之電漿效應,降低反射光頻譜,使其光電流 密度提升率為 19.15% (29.97 mA/cm2 → 35.71 mA/cm2)及轉換效率提升率為 22.01%( 12.31% → 15.02%)。

In this paper, the properties of silicon solar cells using the surface plasmon resonance effects generated through the embedded metal nanoparticles are investigated. First, the nanoscale metallic siliver (Ag) and indium (In) nanoparticles (NPs) were deposited on the titanium dioxide (TiO2) space layer with various thickness. Then, a layer of aluminum oxide (Al2O3) was coated on the cells with NPs, it exhibited a cell with plasmon antireflective coating (PARC) layer. The PARC layer provides both double anti-reflection and SPR effects to
improve the incident photons absorbed in semiconductor as well as to enhance the photocurrent (Iph) and conversion efficiency (η), the reflectivity, external quantum efficiency (EQE), dark I-V and photovoltaic I-V characteristics of the PARC solar cell are measured and compared.
The photovoltaic performance of PARC structure silicon solar cell and double layer anti-reflective coating (DL-ARC) which having a 20-nm TiO2 and a 65-nm Al2O3, were measured and compared. The short-current density enhancement (ΔJsc) of 10.16% (from 31.14 mA/cm2 to 35.05 mA/cm2) and the conversion efficiency enhancement of (Δƞ) 16.80% (from 12.50 % to 14.60%) were obtained for the cell with DL-ARC. However, theΔJsc of 12.68% (from 31.60 mA/cm2 to 34.81 mA/cm2) and Δƞ of 20.40% (from 9.48% to 15.85%) were achieved for the cell with PARC structure. In summary, an additional enhancement of light trapping was obtained for the cell with a PARC layer, compared to the cell with DL-ARC.

摘　要 i
ABSTRACT iii
誌 謝 v
目 錄 vi
圖目錄 ix
表目錄 xiii
第一章 緒論 1
1.1 前言 1
1.2表面結構矽太陽能電池特性 3
1.3金屬奈米粒電漿子在太陽能電池之應用與發展 6
1.4 研究動機 8
第二章 太陽能電池與表面電漿工作原理 9
2.1太陽能光譜 9
2.2太陽能電池之工作原理 11
2.2.1 光伏效應 11
2.2.2 P-N接面 14
2.2.3 影響效率之因素 19
2.3 表面金字塔抗反射結構 21
2.3.1金字塔抗反射機制 21
2.3.2金字塔結構在太陽能電池上之應用 21
2.4 表面電漿 23
2.4.1 表面電漿激發方式 23
2.4.2 金屬奈米粒子的光散射機制 26
2.4.3 金屬平面上的表面電漿子共振(SPR) 29
2.4.4 金屬粒子上的表面電漿子共振(LSPR) 33
2.4.5 金屬奈米粒子對表面電漿共振之影響 36
2.5量子效率與光電流密度 39
第三章 實驗介紹與流程製作 42
3.1 埋覆式奈米粒子之表面金字塔太陽能電池結構 42
3.2 製程設備介紹 43
3.2.1 電子束蒸鍍機 (Electron Beam Evaporator, EVM-8) 43
3.2.2快速熱退火系統 (Rapid Thermal Annealing System, RTA) 44
3.2.3光罩對準儀 (Mask Aligner, MJB-4) 45
3.3 埋覆式奈米粒子之表面金字塔結構太陽能電池製程 46
3.3.1實驗設計 46
3.3.2表面結構太陽能電池製作 47
3.3.2.1單晶矽晶片清洗 48
3.3.2.2表面金字塔結構製作 49
3.3.2.3磷擴散製程 50
3.3.2.4正面濕式蝕刻隔離 51
3.3.2.5背面電極製作 52
3.3.2.6正面指狀電極製作 53
3.3.2.7正面二氧化鈦空間層製作 54
3.3.2.8正面奈米銦粒子製作 55
3.3.2.9正面奈米銀粒子製作 56
3.3.2.10正面三氧化二鋁薄膜製作 57
3.4 量測方法 59
3.4.1半導體分析儀(Semiconductor Parameter, HP4145B) 59
3.4.2太陽光模擬器 (Solar Simulator XES-151S and Keythley 2400) 59
3.4.3四點探針 (Four-Point Probe) 60
3.4.4積分球反射率量測 61
3.4.5積分球反射率量測外部量子效率 62
第四章 實驗結果與討論 64
4.1 不同厚鍍銀奈米粒子之埋覆式表面金字塔太陽能電池 64
4.1.1 不同厚度銀奈米粒子SEM與吸收光譜分析 65
4.1.1.1 不同厚度銀奈米粒子在表面的分布 65
4.1.1.2不同厚度銀奈米粒子吸收光譜分析 68
4.1.2 不同厚度銀奈米粒子暗電流特性分析 71
4.1.3 不同厚度銀奈米粒子反射率分析比較 75
4.1.4 不同厚度銀奈米粒子之外部量子效率分析 78
4.1.5 不同厚度銀奈米粒子之照光特性分析 82
4.2 銦奈米粒子於不同厚度之二氧化鈦空間層比較 86
4.2.1 不同厚度之二氧化鈦空間層之暗電流特性分析 86
4.2.2 不同厚度之二氧化鈦空間層之外部量子效率分析 89
4.2.3 不同厚度之二氧化鈦空間層之照光特性分析 92
4.3 雙層抗反射層結構之表面金字塔太陽能電池 96
4.3.1 暗電流特性分析 96
4.3.2 反射率光譜分析 97
4.3.3 外部量子效率分析 98
4.3.4 照光特性分析 99
4.4 包覆銀或銀奈米粒子表面電漿與雙層抗反射層結構之表面金字塔太陽能電池特性比較 101
4.4.1 銀奈米粒子與銦奈米粒子SEM比較 101
4.4.2 反射率比較 102
4.4.3 外部量子效率比較 105
4.4.4 照光特性比較 108
第五章 結論與未來展望 109
參考文獻 111

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