臺灣博碩士論文加值系統

本論文以有機金屬氣相磊晶法來改善三族氮化物元件之光電特性。首先我們置入周期性排列的SiO2 pillar 和air gap結構於GaN中，我們利用側向磊晶技術來改善磊晶品質，再藉由周期性排列的結構來增加光在元件內部散射的機率。實驗中，我們得到較小的漏電流藉由側向磊晶技術來降低磊晶缺陷密度，並且也提升了光輸出功率。我們利用SiO2 pillar 和air gap結構，可以提升光輸出功率50%以上。除此之外，我們也結合air gap和圖形化基板，實驗中也提升內部量子效率9.6%以及光萃取效率43.8%。
另外，我們也改善光輸出功率以及太陽能轉換效率藉由厚的短周期InGaN/GaN MQW導入H2於GaN caped layer， 我們得到20mA電流注入下光輸出功率提升25.6%，也改善了LED的droop現象，由55%降為36.7%。另外，在太陽能元件上，我們成長厚的短周期InGaN/GaN MQW導入H2於GaN caped layer於圖形化基板上，得到功率轉換效率1.36%，藉由圖形化基板，提升了76.7%的功率轉換效率。

In this dissertation, growth and fabrication of III-nitride-based optoelectronic devices by Metal Organic Vapor Phase Epitaxial (MOVPE) have been studies. We achieved a small reverse leakage current because of the quality improvement of the lateral growth-induced crystal. Similar random scattering of light can be achieved by the embedded SiO2 pillars and air gap array structures. First, we improved the External Quantum Efficiency (IQE) by embedded SiO2 pillars and air gap array structures in u-GaN layers. In our study, the embedded 500 nm height SiO2 pillars and air gap array structures could enhance Light-Emitting Diode (LED) output power by more than 50% due to the enhanced guided-light scattering efficiency in our study. With the combination of air gap array and Patterned Sapphire Substrate (PSS), we achieved a small reverse leakage current. The study also reveals that the LED with combined air gap array and PSS exhibited the largest IQE and Light Extraction Efficiency (LEE) enhancements 9.6% and 43.8%, respectively.
In our study, we also demonstrate the light output power enhancement and conversion efficiency enhancement of thick well short-period InGaN/GaN MQW LEDs and Solar Cells (SCs) with thickness-fluctuated InGaN well with H2 in GaN barrier spacer layer. Consequently, the thick well short-period InGaN/GaN MQW LEDs with thickness-fluctuated InGaN well that were fabricated in this study had a 20-mA output power enhancement of 25.6% and a decreased efficiency droop from 55.0% to 36.7% compared with traditional long-period InGaN/GaN MQW LEDs. The power conversion efficiency (η%) of thick-well InGaN/GaN SPMQW SCs with H2 on PSS (1.36%) showed a 76.6% increase compared with thick-well InGaN/GaN SPMQW SCs with H2 on plane sapphire (0.77%).

摘要 I
Abstract II
致謝 IV
Contents V
Table Captions VIII
Figure Captions IX
CHAPTER 1 Introduction 1
1.1 Group III-Nitride Compound Semiconductors: Properties and Applications 1
1.2 Background of Group III-Nitride Semiconductors 2
References 10
CHAPTER 2 Metalorganic Vapor Phase Epitaxy System 16
2.1 Introduction 16
2.2 MOCVD Reactor 19
2.3 In-Situ Monitoring During III-Nitrides Growth 21
References 26
CHAPTER 3 Light Output Power Improvement in III-Nitride Based Light Emitting Diodes with embedded SiO2 Pillars and Air Gap Array Structures 27
3.1 Introduction 27
3.2 Growth and characterization of embedded SiO2 pillars and air gap array structures in GaN by re-growth MOVPE 29
3.3 Enhancement of LED output power with embedded SiO2 pillars and air gap array structures 33
3.4 Enhancement of LED output power with embedded air gap array structures 38
3.5 Summary of embedded SiO2 pillars and air gap array structures and embedded air gap array structures 41
3.6 Enhancement of LED output power with air gap array and patterned sapphire substrate 44
References 61
CHAPTER 4 Optoelectrical Characteristics Improvement in III-Nitride Based Light Emitting Diodes of InGaN/GaN thick well short-period quantum well light-emitting diodes with H2 in GaN barrier spacer layer 64
4.1 Introduction 64
4.2 Growth and characterization of InGaN/GaN thick well short-period quantum well light-emitting diodes with H2 in GaN barrier spacer layer 66
4.3 Optoelectrical characteristics of InGaN/GaN thick well short-period quantum well light-emitting diodes with H2 in GaN barrier spacer layer 70
References 78
CHAPTER 5 Solar Cell Physics 83
5.1 Principles of Solar Energy Conversion 83
5.2 Solar Spectral Irradiance 83
5.3 Typical Solar Cell Structures 85
5.3.1 p-n junction 85
5.3.2 p-i-n Junction 86
5.4 Photovoltaic Characteristics of Solar Cells 87
5.4.1 The Ideal Equivalent Circuit Model 88
5.4.2 Parasitic Resistances 90
5.4.3 Recombination in Solar Cells 91
References 97
CHAPTER 6 Efficiency improvement of short-period InGaN/GaN multiple-quantum solar cells with H2 in the GaN cap layer 98
6.1 Introduction 98
6.2 Growth and characterization of InGaN/GaN thick well short-period quantum solar cells with H2 in GaN barrier spacer layer 100
6.3 Optoelectrical characteristics of short-period InGaN/GaN multiple-quantum well solar cells with H2 in the GaN cap layer 102
References 113
CHAPTER 7 Conclusions and Future works 115
7.1 Conclusions 115
7.2 Future works 117
Publication List 118

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