臺灣博碩士論文加值系統

本篇論文主要以摻雜氧化鎂鈮酸鋰為材料，研製週期性極化反轉倍頻雷射晶片，目標為利用此晶片達成輸入1064nm紅外光準相位匹配倍頻產生532nm綠光。
製程部分以未摻雜共熔鈮酸鋰(CLN)高電壓致極化反轉經驗為基礎加以改良，在厚度為0.5um摻雜氧化鎂鈮酸鋰(MgO:LN)晶片成功研製出最小週期為6.91um第一階一維和多週期第一階一維週期性結構；在厚度為1um摻雜氧化鎂鈮酸鋰(MgO:LN)晶片也成功研製出13.8um第二階一維及6.94um第一階準一維的週期性結構。
光學實驗部分只對0.5um厚摻雜氧化鎂鈮酸鋰(MgO:LN)晶片做討論。單週期結構、長度5um，以170MW/cm2(180mW) 光腰半徑60um奈秒泵浦條件下，產生80mW的綠光輸出、轉換效率約在46%；並在區段啁啾結構設計下，於多週期結構、長度5um，以195MW/cm2(350mW)光腰半徑75um之奈秒泵浦條件下，產生63mW的綠光輸出，轉換效率約20%，且可接受溫度頻寬達50度。相較於同樣長度單週期設計，雖然轉換效率降低了2.3倍，但提升了10倍的可接受溫度頻寬。

This thesis reports the fabrication of periodically poled magne-sium-oxide-doped congruent lithium niobate (PPMgLN), to convert the 1064nm infrared laser into 532nm green light by using the technique of quasi-phase matching second harmonic generation(QPM-SHG).
We improved the fabrication technique on electric poling method of congruent lithium niobate. This method leads to the realization of periodically poled QPM structures on 0.5mm and 1mm thick MgO:LiNbO3 substrates. The smallest periods achieved in this work are (i) 6.91um for the 1st - order 、(ii) chirped-gratings for the 1st-order QPM device. For the 1mm thick substrate , the smallest periods we can make are (i) 6.96um for the 1st-order quasi-1D、(ii)13.8um for the 2nd–order QPM device.
For the characterization we measured SHG on PPMgLN with 5mm crystal length when pumped by a pulsed 1064nm laser of 159 MW/cm2 (180mW) with 5ns pulse width of 60um beam waist. The device exhibits 80mW green light output with conversion efficiency attain 46% . Second, the design of chirped grating structure with 5mm long are tested by a pulsed 1064 nm laser of 195 MW/cm2 (350mW) with beam radius 75um. The device exhibits 63mW green light output with the conversion efficiency 20%, and the acceptance temperature bandwidth is about 50 degree. In the same length, the acceptance temperature bandwidth for the segment-chirped design exceeds that of single period by a factor of 10, whereas the conversion efficiency is reduced only by a factor of 2.3 .

第一章 緒論 1
1.1 研究背景與動機 1
1.2 常用非線性晶體介紹 5
1.2.1 熱導率(thermal conductivity) 6
1.3 鈮酸鋰晶體 8
1.3.1 鈮酸鋰歷史簡介 8
1.3.2 鈮酸鋰的鐵電相 9
1.3.3 鈮酸鋰的光折變效應 12
1.3.4 鈮酸鋰的焦電性質(pyroelectric properties) 13
1.3.5 鋰空缺模型 13
1.3.6 鈮酸鋰之摻雜 14
1.4 非線性頻率轉換技術 16
1.4.1 和頻產生 16
1.4.1 差頻產生 17
1.4.1 倍頻產生 17
1.5 論文內容之概述 18
第二章 非線性頻率轉換理論 19
2.1 非線性頻率轉換與相位匹配 19
2.1.1 非線性頻率轉換 19
2.1.2 倍頻產生 21
2.1.3 平面波近似 22
2.1.4 高斯波近似 24
2.2 相位匹配 28
2.2.1 雙折射相位匹配 28
2.3 準相位匹配 30
2.3.1 一維空間 30
2.3.2 二維空間 36
2.4 可接受波長頻寬與溫度頻寬 40
2.5 增加可接受波長頻寬與溫度頻寬 43
2.5.1 級聯結構增加可接收頻寬 45
第三章 設計與製程 47
3.1 週期設計 47
3.1.1 區段啁啾光柵(segment chirped grating)設計 48
3.2 極化反轉模型 53
3.3 高電壓致極化反轉法 55
3.3.1 製作流程 55
3.3.2 高電壓系統 57
3.3.3 液態電極與基座設計 58
3.3.4 金屬電極之選擇 59
3.3.5 正向矯頑電場量測 60
3.3.6 高電壓波形 61
3.3.7 反轉時間計算 64
3.4 製程結果與討論 64
3.4.1 溫度效應 65
3.4.2 絕緣層沉積 66
3.4.3 邊緣效應與成核點密度 69
3.4.4 準一維結構 72
3.4.5 一維結構 73
3.4.6 區段啁啾結構0.5mm摻雜氧化鎂鈮酸鋰製作結果 74
3.4.7 1mm 摻雜氧化鎂鈮酸鋰 76
第四章 光學量測與分析 79
4.1 綠光倍頻實驗架設 79
4.2 綠光倍頻實驗結果與分析 80
4.2.1 單週期元件特性量測與討論 81
4.2.2 相位不匹配下的影響 87
4.3 區段啁啾光柵結構量測 88
4.3.1 九週期、相位溫度間距5℃、總長6mm設計 88
4.3.2 八週期、相位溫度間距10℃、總長5.5mm設計 90
4.3.3 十週期、相位溫度間距7.5℃、總長5mm設計 91
4.3.4 十週期、相位溫度間距7.5℃、總長4.6mm設計 92
第五章 結論與未來展望 94
5.1 結論 94
5.2 未來展望 95
參考文獻 96

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