臺灣博碩士論文加值系統

摘要
本篇論文中，我們使用靜電紡絲電紡製 (electro spinning)製作二氧化錫奈米線結構(Poly-SnO2 nanofiber)，並應用在氣體感測元件上，並選擇不同的待測氣體如: 一氧化氮(NO)、氨氣(NH3)、乙醇(Alcohol)、丙酮(Acetone)等氣體進行感測，藉由偵測通過待測氣體前後的電流值變化比較換算電流百分比，得知對該目標氣體的濃度變化反應，實驗結果發現， 二氧化錫奈米線結構元件對一氧化氮氣體在濃度250ppb就有非常良好的偵測反應，其靈敏度最低可到25ppb濃度的一氧化氮，而對氨氣(濃度10ppm)、乙醇(濃度78.4ppm)、丙酮(濃度10ppm)等氣體在高濃度下才有些微的反應。由此可知二氧化錫奈米線結構對一氧化氮氣體有很高的專一性。此外在本篇論文中也提到針對不同環境下對一氧化氮氣體的量測。我們擇了無水氣干擾的氮氣背景及乾燥空氣背景(RH<10%)進行量測，在氮氣背景下我們分別在室溫、60℃、100℃以及乾空氣背景在室溫、60℃、100℃、120℃，二氧化錫奈米線對一氧化氮都有良好的反應。一氧化氮為氧化性氣體，當通入氣體時與二氧化錫奈米線產生反應使電阻值上升、電流下降，因此我們認為二氧化錫奈米線結構元件的起始電流值與對一氧化氮氣體偵測靈敏度習習相關。本篇論文中也提及如何提高元件對一氧化氮氣體偵測反應、縮短電流回復時間、靈敏度如照光(465nm 光源)、氫電漿處理等方式來提高元件電流的方式來增加元件對一氧化氮氣體之感測能力。

Abstract
In this study, we use electrospinning process to fabricate Tin Oxide( SnO2) nanofiber servicing as gas sensor active region . We test several different target gas such as, NO、Alcohol、NH3、Acetone by recording the current different between the current of before injecting target gas and after injecting target . Astonishing, our device is utterly high sensitivity for NO gas at 250ppb concentration and it can detect to the limit of 25 ppb. When We change the background gas from N2 gas to dry air(RH<10%) it still gets good enough performance to NO gas sensing. Moreover, SnO2 fiber slightly responses to high concentration of Alcohol (78.4ppm)、NH3 (10ppm)、Acetone (10ppm) which means that SnO2 fiber is high selectivity to NO gas. In addition, We recognize the basic current of SnO2 fiber correlating with the response of NO gas due to NO gas is oxidizing gas which will increasing resistance and reducing current . Accordingly, We mention two methods to enhance sensitivity of Tin Oxide fiber by increasing current of Tin Oxide fiber. First of all illuminating 465nm light source is not only rising the base current of our device but also recovering current back to initial value after injecting NO gas . In this way SnO2 fiber is possibly for a long time operating . Second , we use H2 plasma to treat SnO2 fiber , the base current soaring to much higher . All of this will be thoroughly discussed and elaborated as follows.

目錄
摘要 I
Abstract II
感謝 III
圖目錄 VII
表目錄 XI
第一章緒論 1
1-1奈米元件發展 1
1-2一維奈氧化金屬米材料 1
1-3 歐姆接觸元件(ohmic contact) 2
1-4 蕭特基接觸元件 4
第二章研究動機 6
2-1 實驗研究動機 6
2-2 Poly-SnO2 / SnO2奈米線與先前成果回顧 6
第三章氣體量測實驗架設 8
3-1 Poly-SnO2 nanofiber靜電電紡製程和水平式元件製作 8
3-1.1 Poly-SnO2 nanofiber 靜電電紡製程 8
3-1.2 玻璃基板清洗 10
3-1.3 水平元件結構 11
3-2氣體量測系統架設 12
3-2.1氣體管路和量測系統架設 12
3-2.2 氮氣背景系統 13
3-2.3 低濕度模組Dryer 14
3-3水平元件氣體量測架設 15
3-3.1微流道鋁製載具 15
3-3.2探針架設測架設 16
3-3.3 電流變化計算(response) 17
3-4使用機台 17
第四章實驗結果與討論 18
4-1 氮氣背景針對不同氣體量測 18
4-1.1 Poly-SnO2 nanofiber 氣體感測機制 18
4-1.2氮氣背景 量測溫:100℃ 20
4-1.3氮氣背景 量測溫度:60℃ 22
4-1.4氮氣背景 量測溫度:室溫 25
4-2 空氣背景量測 27
4-2.1 乾燥空氣背景(RH<10%) 量測溫度: 溫度100℃ 27
4-2.2 乾燥空氣背景(RH<10%) 量測溫度: 溫度120℃ 29
4-2.3 乾燥空氣背景(RH<10%)、一氧化氮氣體通過氫氧化鈉瓶 32
4-3 空氣背景下照光提高電流值、電流回復速度 35
4-3.1照光電流回復機制 35
4-3.2 照465nm LED光提高電流值回復速度 36
4-3.3持續照光465nm LED 提高電流值 38
4-4氫電漿處理機制、提高多晶二氧化錫奈米線電流值 42
4-4.1氮氣背景氫電漿元件量測 43
4-4.2乾空氣背景量測比較 49
4-4.3氫電漿處理元件乾空氣背景照光465nm量測 53
第五章結論與未來展望 60
5-1結論 60
5-2未來展望 61
附件 62
參考文獻 72

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