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One of the most striking features in IC Manufacturing is the intensively use of information technology (IT). Starting from the first process operation, the following several hundred operations are virtually controlled by process equipment, which are under highly computerized control. These operational modes are a mixture of manual, semi-auto and fully-auto systems. This paper has a brief review of the current and future IC manufacturing environment, and an evolutionary approach and a future vision based manufacturing systems. The major part of this paper is an empirical, field-based study, in which the author reviewed the history and current status of manufacturing systems applied to three Fabs. The three wafer Fabs belong to a single company, which are located at Hsin-Chu science based industry park, Taiwan, the Republic of China. A questionnaire survey distributed to the Fabs' staffs, entitled as "The Relative Importance to Achieve IC Manufacturing Needs on Adopting Information Technology and its related Influencing Factors" provided valuable data and information. It reflects the influence of technology, organizational learning, business type, management vision, operation management ... etc.
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