臺灣博碩士論文加值系統

　　本論文研製一橋式壓電真空壓力感測器，由一層壓電材料層(PZT)與基板層(銅)組合而成，並呈兩端固定之懸臂樑形式，壓電材料層與基板層尺寸皆為20mm×5mm×200μm。有兩對電極分布在壓電材料層的上表面與下表面，分別置於懸臂樑的兩端，其中一對電極位於懸臂樑的固定邊界旁，作激盪懸臂樑產生共振之用，另外一對電極則位於另一邊固定邊界旁，作為一作汲取振動能量轉換回電訊號之用。
　　由實驗結果可以得知，本研究之壓力感測器量測範圍為6.5×10-6~760Torr，由於不同的真空壓力下氣體黏滯性所產生的阻力不同，而隨著懸臂樑擺動的電壓輸出便會不同。我們將實驗結果利用半功率法計算求出阻尼比，此量測的阻力包含了結構阻尼與氣體阻尼的影響。結構阻尼為材料產生應變時所消耗的能量，而氣體阻尼為外部氣體壓力改變造成之阻尼。由實驗結果得知，感測器輸出電壓與氣體阻尼成正比關係，可以直接由電壓輸出值直接求得真空壓力。另外也進行不同氣體的量測結果，本研究利用氮氣與氬氣做比對，得知氬氣對結構所造成的阻尼比較氮氣大，而壓電輸出、阻尼比皆與真空壓力有相同趨勢。

　　In this thesis, a clamped-clamped beam type piezoelectric vacuum pressure sensor was developed. The piezoelectric beam fixed at both ends consists of a PZT layer perfectly bonded to the copper substrate. The dimensions of the PZT layers and copper substrate are both 20mm × 5mm × 200μm. Two pairs of electrodes cover the surfaces of the PZT at the bottom and top layers near both ends. Input voltage was applied at one pair of electrodes to vibrate piezoelectric beam and output voltage was measured at the other pair of electrodes.
　　Experimental results showed that developed pressure sensor has a wide range from 6.5×10-6 to 760Torr. Output voltage generated by vibrations of beams which were varied by viscous gas damping forces acting on the beams in the vacuum. Damping forces can be calculated from damping ratio by half power method experimentally. Damping ratio of sensor includes the effect of strain rate damping and viscous gas damping. The strain rate damping is assumed to be proportional to the bonding stiffness of beam and gas damping is assumed to be changed by the pressure. Experimental results showed that output voltages of sensors were proportional to gas damping ratio. It indicated vacuum pressures can be estimated from output voltage. Vacuum pressures of nitrogen and argon are also compared. Experimental results showed that the gas damping ratio of argon is greater than the damping ratio of nitrogen. Piezoelectric outputs and damping ratios are in the same trend with the vacuum pressures.

致謝 I
摘要 II
ABSTRACT III
目錄 IV
圖目錄 VI
表目錄 VIII
第一章　緒論 1
1.1前言 1
1.2文獻回顧 4
1.2.1薄膜式真空計 4
1.2.2熱傳導真空計 5
1.2.3離子真空計 7
1.2.4黏滯性真空計 9
1.3研究動機 13
1.4研究目標 14
第二章　相關研究 15
2.1壓電材料相關理論 15
2.2真空概論 17
2.2.1真空的定義 17
2.2.2真空的區分 18
2.2.3真空量測 19
2.3真空相關氣體理論 20
2.3.1理想氣體定理 20
2.3.2波以耳定理 20
2.3.3氣體分子動力學 21
2.3.4氣體擴散定理 21
2.4阻尼量測相關理論 22
2.4.1自由振盪法 22
2.4.2半功率頻寬法 23
第三章　元件設計與實驗架設 25
3.1元件材料選擇 25
3.2元件尺寸設計 25
3.3元件電極設計 29
3.4夾置具設計與製作 29
3.5實驗架設 32
3.5.1實驗設備 32
3.5.2量測設備 34
3.5.3真空量測系統 36
第四章　結果與討論 37
4.1不同壓力下之頻率響應 37
4.2輸出與壓力之關係 39
4.3阻尼比與壓力之關係 40
4.4不同氣體之比較 41
4.5輸出與阻尼比之關係 43
第五章　結論與未來展望 44
5.1結論 44
5.2未來展望 45
參考文獻 46

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