臺灣博碩士論文加值系統

本研究主要探討如何沿著微管道內部設置微感測器之設計與製作，目的是以IC製程技術為基礎，利用低熱傳導係數之材料於低溫製程中發展微流管道系統，使其可使用氣體或液體為工作流體於不同雷諾數條件下量測管道內之壓力分佈與熱傳係數。於論文中主要之研究項目為：（1）結合體型與面型加工之優點設計出壓力感測器，（2）利用模擬軟體、理論計算與實驗數據進行壓力薄膜之設計，（3）結合標準IC製程與微機電技術製作微管道系統，（4）進行感測器之特性測試，（5）量測微管道內之壓力降與熱傳係數。

由目前文獻可知微觀流體現象無法精確地量測，因其往往僅止於量測微管道之進出口壓力以獲得壓力降以及利用表面設置熱電偶來獲得溫度分佈數據。在本研究中，成功地結合標準半導體製程與微機電技術，將微壓力、溫度感測器以及加熱器整合於微管道內部，並設計出新型之壓力感測器結構使之容易整合於管道之中，而壓力薄膜之厚度、壓力腔體以及微管道之高度皆可利用旋轉塗佈的方式將所需之厚度由數微米至數百微米不等進行控制，此製程方法之優勢在於可將壓力腔體之高度增加以增加壓力量測範圍。此外，所製作之新型壓力感測器亦進行多項測試，證明其具有良好之回復性、穩定度、可靠度及熱穩定性，並將其與微管道進行系統之整合，以做為內部流動現象之量測。

本研究中氣體與液體之實驗均建構在連續流體於層流區之條件，首先於空氣之壓力分佈實驗中發現，當氣體之馬赫數大於0.3之後，於管道內部之壓力分佈則呈現非線性，其主要原因來自於氣體之可壓縮性。而利用水以及電解液做為工作流體進行壓力分佈量測之實驗中則發現壓力降略高與理論值，推測此現象來自於電雙層之影響，而電雙層的發生，與管道材料、管道尺寸與工作流體特性息息相關。最後利用空氣進行熱傳實驗，其結果顯示紐塞爾數於完全發展流區域中不同於理論值之原因來自於空氣之可壓縮性與管道之深寬比所影響。

The objective of present work is to design and fabricate a complicated micro-channel system integrated with arrays of sensors for measurement of thermal and flow transport process. Fabrication techniques based on standard IC process are developed for the sensors system and the micro-channel is made by a low temperature fabrication process which adopts low thermal conductivity materials. This channel can allow either gas or liquid flow through for measurements of local pressure distribution and heat transfer coefficient inside the channel at different Reynolds number flow conditions. The issues studied are: (1) Design of pressure sensor arrays combined with advantages of both bulk and surface micromachining, (2) Design of pressure diaphragm by the numerical prediction from ANSYS software, the analytical solution and the experimental data, (3) Fabrication of channel system by combined standard IC process and MEMS technology, (4) characteristic measurements of sensors, (5) Measurements of the pressure drop and heat transfer process in the heated micro-channel.

From literature report, much of the information reported in the past could not provide understanding of flow and heat transfer in micro-channel, since most of the experimental data are obtained only by the pressure and temperature measurements at the inlet and outlet of the channel. In this research, the micro-channel system, integrated with arrays of pressure, temperature sensors and heater, has been successfully fabricated by combining the standard IC process and MEMS technology. A novel structure of pressure sensor arrays, integrated along the micro-channel, has been designed with the advantages of both bulk and surface micromachining. The thickness of the diaphragm and the height of the cavity can be readily varied from few to hundreds of microns by spin coating of SU-8 layer. This allows fabrication of pressure sensor with much wider range of measurement. The sensor performance has been evaluated, which shows a good recovery, high reliability, low thermal effect and well stability. The sensors can be widely applied in micro-fluidic system where pressure or temperature information is required.

Both gas and liquid flows were studied in the continuous and laminar flow region. The pressure distribution of air flow found in the micro-channel is not linear, due to the compressibility effect, except when the Mach number of the flow speed in the channel is lower than 0.3 and the flow can be assumed as incompressible. The pressure distributions using either DI water or electrolyte solutions as working fluid are also measured. The results indicate that the thickness of EDL effect on the flow behavior in either the DI water or the electrolyte solutions in micro-channel depends on channel material, sizes and liquid properties. Finally, heat transfer experiments with air flow have also been performed in the micro-channel. Some deviation of Nusselt numbers from the prediction based on large scale channel flow is found and is attributed to the gas compressibility effect and the finite aspect ratio of the micro-channel which is of 1:13.

ABSTRACT IN CHINESE…………………………………………………………… I
ABSTRACT……………………………………………………………………… XIV
CONTENTS……………………………………………………………………… XVI
LIST OF TABLES……………………………………………………………… XVIII
LIST OF FIGURES……………………………………………………………… XIX
NOMENCLATURE…………………………………………………………… XXIV
CHAPTER
I INTRODUCTION……………………………………………………………………1
1.1 Micro-Electro-Mechanical Systems……………………………………………… 1
1.2 Objectives…………………………………………………………………………2
1.3 Review the Researches of Micro-Channels……………………………………… 3
1.3.1 Introduction of Channel Flow………………………………………………… 3
1.3.2 Gas Flow in Micro-Channel…………………………………………………… 5
1.3.3 Liquid Flow in Micro-Channel………………………………………………… 8
1.4 Review of Pressure Sensor Technology………………………………………… 10

II DESIGN AND FABRICATION CONSIDERATIONS OF MICROCHANNEL……14
2.1 Pressure Sensor of Poly-Silicon Diaphragm…………………………………… 15
2.1.1 Problem in the Pressure Sensor of Poly-Silicon Diaphragm…………………… 19
2.2 Pressure Sensor of Polymer (SU-8) Diaphragm………………………………… 22
2.3 Design of Polymer (SU-8) Diaphragm………………………………………… 25
2.3.1 Theoretical Modeling for Polymer Diaphragm…………………………………26
2.3.2 ANSYS simulation for Polymer Diaphragm……………………………………29
2.3.3 Experiments of Diaphragm Deformation………………………………………29
2.4 Design of Micro-channel System……………………………………………… 32
III DISCUSSION ON FABRICATION TECHNIQUE……………………………… 34
3.1 Standard IC Process…………………………………………………………… 36
3.1.1 Wafer Clean and Thin Film Deposition……………………………………… 36
3.1.2 Photolithography and Etching……………………………………………… 38
3.1.3 Ion Implantation, Annealing and Metallization……………………………… 40
3.2 MEMS Fabrication Process……………………………………………………42
3.2.1 Wafer Polishing………………………………………………………………42
3.2.2 Photolithography of SU-8 Diaphragm and Cavity……………………………43
3.2.3 Wafer Bonding Process………………………………………………………47
3.2.3.1 Flexible PET Bonding Process………………………………………………49
3.2.3.2 Epoxy Resin Bonding Process………………………………………………52
3.2.4 Removal of Silicon Substrate…………………………………………………54
3.2.5 Wafer Cutting and SU-8 Micro-Channel Lithography…………………………57
3.3 Fabrication Process with Array of Sensors and Heater…………………………59
IV EXPERIMENTAL SET-UP AND PREPARATION……………………………… 61
4.1 Experimental Apparatus…………………………………………………………61
4.1.1 Gas Flow Supply System………………………………………………………61
4.1.2 Liquid Flow Supply System……………………………………………………62
4.2 Characteristics of Sensors and Heater……………………………………………62
4.2.1 Characteristics of Temperature Sensors and Heater……………………………63
4.2.2 Characteristics of Pressure Sensors…………………………………………… 64
4.3 Experimental Procedures……………………………………………………… 67
4.3.1 Procedures of Pressure Drop Experiment…………………………………… 67
4.3.2 Procedures of Heat Transfer Experiment………………………………………68
V PRESSURE DROP AND HEAT TRANSFER IN THE MICRO-CHANNEL………69
5.1 Analysis of Pressure Drop for Air Flow…………………………………………69
5.1.1 Experimental Results of Pressure Drop for Air Flow………………………… 71
5.2 Analysis of Pressure Drop for Liquid Flow………………………………………74
5.2.1 Experimental Results of Pressure Drop for Liquid Flow……………………… 76
5.3 Analysis of Heat Transfer for Air Flow………………………………………… 79
5.3.1 Experimental Results of Heat Transfer for Air Flow………………………… 80
5.4 Uncertainty of the Experiment………………………………………………… 85
VI CONCLUSIONS AND FUTURE RECOMMENDATION…………………………………………………………… 87
6.1 Conclusions…………………………………………………………………… 87
6.2 Recommendations for Future Work…………………………………………… 89
REFERENCES……………………………………………………………………… 91
TABLES……………………………………………………………………………103
FIGURES………………………………………………………………………… 110
VITA………………………………………………………………………………189
PUBLICATION LIST………………………………………………………………190

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