臺灣博碩士論文加值系統

本研究旨在開發創新雷射製程技術，用以製作電極，並將其應用於有機光電電子元件，期望能取代傳統的真空鍍膜製程，降低製程成本。本論文中，介紹了雷射植入金屬粒子於已封裝之元件做為連接線、雷射轉印金屬薄膜做為電極以及雷射轉印同時還原氧化石墨烯製作透明電極等三個創新雷射製程。
在雷射植入方面，我們植入銀於聚乙烯醇中且具有一定程度之導電性，植入的深度隨著雷射發數增加而亦隨之增加，最大植入深度可達6 um，並將此製程應用於封裝後的高分子發光二極體與有機薄膜電晶體中做為連接線，元件依舊可正常運作並未因雷射處理過程而造成損壞。
雷射轉印方面，我們發表了創新的雷射熱轉印製程，利用二氧化碳雷射的熱效應配合小分子犧牲層材料，成功轉印圖案化之鋁與銀薄膜至軟性基板上，最小線寬為40 um，轉印後之金屬導電性、黏著性與表面粗糙度均佳，並將轉印後之金屬薄膜應用於軟性薄膜電晶體中作為源極與汲極。
另外亦將雷射轉印製程應用於氧化石墨烯中，利用雷射熱效應可還原氧化石墨烯並同時移除多餘材料，製程時間短並可於大氣環境常溫下製作，製作之薄膜導電性與透光性均佳，薄膜厚度低於5nm。

Our research concerns novel laser processing technique for electrodes and its applications for electronic and optoelectronic devices. We expect that such novel fabricating processes, with lower fabricating costs, will eventually replace traditional vacuum thin film manufacturing processes. In the thesis, we report three novel laser processes: laser-induced implantation of metal into an encapsulated device as an interconnect, laser-induced transfer patterning metal thin film as electrodes, and laser transfer and reduced graphene oxide as transparent electrode.
In laser-induced implantation, we implanted silver into poly(vinyl alcohol) as a conducting wire. The penetration depth increases with the increase in the laser pulse number. The maximum penetration depth is about 6 um. We apply the process to encapsulated organic thin film transistor and polymer light emitting diode as interconnect. The device continues to function and is not damaged by the laser process.
In laser-induced transfer, we report on a novel laser thermal printing method (LTPM). By using the thermal effect from CO2 laser and small molecule sacrificial layer, we transferred patterning aluminum and silver thin film to a flexible substrate. The minimum line width is 40 um. The transferred metal thin film has good conductivity, adhesive and surface roughness. We applied the transferred metal thin film as the source/drain in a flexible organic thin film transistor.
We also applied the laser transfer process to graphene oxide. Laser transfer can reduce graphene oxide by the laser thermal effect and remove redundant graphene oxide. The process works in ambient environment and room temperature. The reduced graphene oxide film has good conductivity and optical transmittance. The thickness is less than 5 nm.

博士學位論文考試審定書 #
誌謝 i
中文摘要 ii
Abstract iii
Contents v
List of Figures viii
List of Tables xiii
Abbreviations xiv
Chapter 1 1
1.1 Importance of thin film electrodes and transparent electrodes 1
1.2 Advantages and disadvantages of laser-induced transfer 1
1.3 Organization 2
Chapter 2 Literature review 3
2.1 Laser transfer 3
2.1.1 Laser transfer metal 5
2.1.2 Laser transfer biomaterial 7
2.1.3 Laser transfer polymer 7
2.1.4 Laser transfer carbon nanotube 8
2.1.5 Mechanism of laser transfer 9
2.2 Laser implantation 13
2.3 Laser transfer with sacrificial layer 16
2.3.1 Metal sacrificial layer 17
2.3.2 Polymer sacrificial layer 19
2.3.3 Laser transfer nanoink 22
2.3.4 Laser-induced thermal spray printing 24
2.4 Graphene and graphene oxide 25
2.5 Summary 27
Chapter 3 Application of laser-induced implanted silver in organic device 29
3.1 Laser-induced implanted metal process 29
3.2 The results of implanted silver 30
3.3 The mechanism of laser-induced implantation 33
3.4 Laser-induced implantation on already encapsulated organic electronic devices 35
3.5 The effect of laser-induced implantation in each experiment property 39
3.6 Summary 41
Chapter 4 Laser transfer metal thin film to flexible substrate as electrode in OTFT 42
4.1 The experiment process of LTPM 42
4.2 The surface properties of laser transferred metal thin films 45
4.3 The images and surface profile of laser transferred metal thin film on flexible substrate 49
4.4 Adhesion test of transferred metal thin film 52
4.5 The application of LTMP on OTFT 53
4.6 Summary 56
Chapter 5 Laser-induced transfer and reduction of graphene oxide for transparent graphene electrode 57
5.1 The experiment process of laser-induced reduced graphene oxide 57
5.2 Effect of laser power, repetition rate and pulse duration 58
5.3 Effect of overlap and patterned rGO 60
5.4 Surface morphology of rGO 62
5.5 Mechanism of laser transfer and reduction 63
5.6 Raman spectrum of GO and rGO 64
5.7 Summary 66
Chapter 6 Conclusions 67
References 69
Publication 76

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