臺灣博碩士論文加值系統

　　本研究利用微機電系統製程技術，設計及製作一新式之整合型細胞晶片用以量測細胞性質。其目的在於藉由晶片培養細胞，再以微幫浦及微型過濾器(Micro-filter)將細胞分離集中，並於偵測區域內量測細胞性質及數目，將可大幅縮短細胞培養時間、亦只需利用極少量細胞，且避免不必要的人為疏失，進而達到快速檢測的效果，以改善傳統微生物檢測耗時及檢測限制的缺點。

　　本研究在整合型晶片製作方面，以玻璃與聚二甲基矽氧烷(Polydimethysiloxane, PDMS)作為基材，成功地藉由三道光罩將細胞培養、樣品傳輸之蠕動式微幫浦(Peristaltic micropump)、樣品分離之微型過濾器與偵測電極元件整合於單一晶片，進而發展出一套簡單快速、低成本並可大量製造的製程。以蠕動式微幫浦來推送微流體，接著利用等向性蝕刻底切特性所製作的過濾結構將細胞集中於偵測區進行量測。另一方面設計與製作量測電路，除了避免不必要的雜訊干擾，更將量測設備微型化，朝實驗室晶片邁進。最後，本研究以聚苯乙烯珠(Polystyrene beads)模擬細胞，針對各元件進行一系列的測試以評估其適用性。藉由此研究成果，相信對未來細胞性質量測之生物晶片研發上，將具有重大貢獻。

　　The present study reports a new microfluidic device fabricated by using MEMS (Micro-electro-mechanical-systems) technology for cell study. The device integrated with four modules, namely a cell culture module, a micro pump, a micro-filter, and an array of micro-electrodes to detect the characteristics and numbers of cells. After cell culturing, the cells are transported by the micro pump, collected by the micro-filter, and finally detected by the micro-electrodes incorporated with a detection circuit. Compared to traditional methods, the integrated microfluidic chip could reduce the time for cell culture and could be used for fast detection by using fewer amounts of samples and reagents.
　　The integrated cell chips are fabricated on soda-lime glass and PDMS (Polydimethysiloxane) substrates. We have successfully integrated these devices including a cell culture module, a peristaltic micro-pump, a micro-filter and micro-electrodes on one chip by a simple three-mask fabrication process. The experimental results demonstrate that polystyrene beads can be successfully concentrated and detected by using the proposed device. The development of the integrated cell chips could be promising for cell study.

中文摘要 I
英文摘要 II
誌謝 III
目錄 IV
表目錄 VIII
圖目錄 IX
符號說明 XIX

第一章 序論
1-1 前言 1
1-2 微機電系統簡介 2
1-3 微流體生物晶片簡介 3
1-4 研究動機與目的 5
1-5 文獻回顧 6
1-6 論文架構 18

第二章 晶片設計
2-1 微幫浦之設計原理 20
2-2 微型過濾器之設計原理 22
2-3 平行板偵測電極之設計原理 24
2-4 整合型晶片之設計考量因素探討 28
2-4-1 材料選擇 28
2-4-2 設計限制 30
2-4-3 製程選擇 32

第三章 晶片製作
3-1 光罩設計與製作 35
3-2 製程技術 36
3-2-1 晶片表面之清潔 36
3-2-2 微影( Photolithography ) 39
3-2-3 金屬蒸鍍 41
3-2-4 微電鍍技術 43
3-2-5 玻璃製程 45
3-2-6 微注模製程 48
3-3 整合型晶片之製作 49
3-3-1 微型過濾器之製作 49
3-3-2 平行板偵測電極之製作 52
3-3-3 微幫浦之製作 56

第四章 結果與討論
4-1 氣動式微幫浦測試 60
4-1-1 操作系統與實驗架設 60
4-1-2 微幫浦測試結果與討論 62
4-2 微型過濾器之測試 63
4-3 平行板偵測電極 68
4-3-1 偵測電路之設計與製作 68
4-3-2 結果與討論 74

第五章 結論與未來展望
5-1 結論 75
5-2 未來展望 76

參考文獻 78
自述 87

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