臺灣博碩士論文加值系統

本研究提出結構化電極的概念並在外層包覆一彈性材料PDMS，建構出具辨認動態正向力及感知接觸物件滑動的產生及其方向之軟性觸覺感測器。有別於一般傳統的壓電型觸覺感測器，我們利用微機電製程設計製作微電極於高分子壓電薄膜（PVDF）上，並以矽橡膠製作微結構黏接在微電極上，之後再以PDMS灌注封裝以完成感測器之製作。本實驗以激振器（Shaker）與力規（Force Sensor）作為動態週期性的微小力之觸發源與力量校正，此外架設一滑動測試平台以驗證滑動感知的能力，經實驗結果可知正向抓取力與物件懸吊之荷重呈現一線性關係，進而推算出物件與觸覺感測器接觸表面之摩擦係數。本研究之觸覺感測器不僅可量測動態正向力，也能偵測到物件滑動的發生，且由微陣列電極結構也利於判別物件接觸感測器所在之點位，實驗跟模擬分析之結果也相當的符合。未來可應用於機器人手部觸覺防滑及抓取物品之準確性。

A novel flexible tactile sensor for sensing the incident slippage and its direction were designed by introducing the concept of structural electrodes on a piezoelectric film (PVDF). The structural electrodes consisted of an elastomeric column on the top of PVDF film with the distributed microelectrodes underneath the elastomeric column. As an object was placed upon the elastomeric column and pushed by an external force, the occurrence of slippage can be detected by the output voltages from the distributed microelectrodes due to the corresponding bending stresses distributed on the PVDF film. In addition, two opposite output voltages read out from different microelectrodes can differentiate the direction of slippage while the elastomeric column was bent by the friction force between the object and column surface. As the experimental results, two peak voltages happened simultaneously in either compressive-stress area or tensile-stress area when the slippage occurred. Thus, the slippage between the object and elastomeric column can be detected. Besides, the peak value of slippage voltage depends on the height of column and the weight of object. This paper successfully demonstrated the concept of structural electrodes for sensing the incident slippage based on a piezoelectric tactile sensor.

摘要 I
Abstract II
致謝 III
目次 IV
表目錄 VI
圖目錄 VII
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 2
1.3 研究動機與目的 6
1.4 研究方法 7
1.5 本文架構 7
第二章 理論基礎與數值分析 8
2.1 壓電材料 8
2.1.1 壓電效應原理 8
2.1.1.1 正壓電效應 8
2.1.1.2 逆壓電效應 11
2.2 PVDF壓電特性 13
2.2.1 PVDF結構組成 13
2.2.2 PVDF壓電薄膜之優點 14
2.3 模型建立 16
2.2.1 具單顆矽橡膠微結構參數設定 16
2.2.2 具2×2陣列矽橡膠微結構參數設定 19
2.4 模擬結果與討論 20
2.4.1 具單顆矽橡膠微結構模擬結果 20
2.4.2 具2×2陣列矽橡膠微結構模擬結果 26
第三章 元件設計與製程 29
3.1 製程設備 29
3.2 元件設計 31
3.2.1 光罩製作 31
3.2.2 矽橡膠微結構及PDMS包覆層之設計與製作 31
3.3 製作流程 32
第四章 實驗架構與量測系統 34
4.1 實驗儀器 34
4.2 實驗架構 37
4.2.1 動態正向力之實驗架構 37
4.2.2 物體滑動測試之實驗架構 39
第五章 結果與討論 41
5.1 實驗結果 41
5.1.1 動態正向力實驗結果 41
5.1.2 物體滑動實驗結果 42
5.1.2.1 滑動感知 42
5.1.2.2 表面靜摩擦係數量測 45
5.1.3 實驗結果與討論 47
第六章 結論與未來展望 48
6.1 結論 48
6.2 未來展望 49
參考文獻 50
附錄
C PVDF參數表 53
作者簡介

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