臺灣博碩士論文加值系統

本研究利用微機電系統技術開發具奈米特性之半導體金屬氧化物氣體微感測器，應用於感測一氧化碳氣體。當待測氣體吸附於感測薄膜表面時，由於蕭特基接觸而使薄膜產生電阻變化，藉由量測此電阻變化，可以獲得感測靈敏度。以靜電紡絲技術製作氧化銦奈米纖維感測薄膜，並利用光微影和蝕刻製程製作微型加熱器與指叉感測電極，將感測薄膜沉積於感測元件上，提高待測氣體與感測薄膜接觸面積，增加表面化學反應，有效提升元件操作性及加快反應時間。實驗探討氧化銦感測薄膜於不同電壓、流速、距離等操作變量對奈米纖維的影響，以及一氧化碳氣體濃度的靈敏度變化。本感測器整合了加熱器、溫度感測器與一氧化碳氣體感測器，藉由特性量測結果，探討製作之氣體微感測器特性。本感測器之加熱器在附加偏壓60 V時，最高溫度可達162 ℃，溫度感測器響應為線性其靈敏度為2.09 Ω/℃，氣體感測器最佳操作溫度為160 ℃；使用靜電紡絲氧化銦奈米纖維感測器之感測薄膜，量測一氧化碳濃度100到500 ppm，電阻變化率為1.082至1.804。

The research presents the design of metal-oxide semiconductor gas microsensors based on MEMS technology and nano-properties for sensing CO gas. Sensitivity is defined by measuring the variation of resistance for sensing layers caused by Schottky contanct when gas specimens adsorb on the surface of sensing films. In2O3 nanofibers sensing film with heaters is fabricated by electrospinning, lithography and deep etching processes. The devices can increase effective sensing area for chemical reactions on which CO gas molecules can be adsorbed to improve operation process and response time. Fabrication parameters of indium oxide sensing films are discussed at different voltage, flow rate, collection distance, to perform optimal nanofibers. The sensitivity for sensing the concentration of CO gas is concluded. This sensor integrated the heater temperature sensor and carbon monoxide gas sensor, with characteristic measurements as a result, validation and production of micro gas sensor characteristics are discussed. The heater of the sensor when additional 60 V, the highest temperature can reach 162 ℃, temperature sensor response to linear its sensitivity is 2.09 Ω/℃, gas sensor optimal operating temperature is 160 ℃. Electrostatic spinning wire sensor, measurement of carbon monoxide concentration of 50 to 500 ppm, resistance rate of 1.082 to 1.804.

致謝 i
摘要 ii
Abstract iii
目錄 iv
圖目錄 vii
表目錄 x
第一章 緒論 1
1.1前言 1
1.2 研究動機與目的 2
1.3 文獻探討 4
1.4 研究流程與架構 13
第二章 靜電紡絲技術與氣體感測原理 14
2.1 靜電紡絲製程原理 14
2.1.1 臨界電位 14
2.1.2一維穩態模型 16
2.2氣體感測器 18
2.2.1 蕭特基接觸 18
2.2.2 金屬氧化物氣體感測機制 20
2.2.3 無機材料與氧化銦特性 22
第三章 靜電紡絲製程與感測器設計 24
3.1靜電紡絲系統架構設計 24
3.1.1材料選用 24
3.2 靜電紡絲感測元件製作 25
3.2.1靜電紡絲感測溶液調配 27
3.2.2奈米纖維薄膜製作 27
3.3微感測元件設計 30
3.3.1光罩與蔽陰遮罩設計 31
3.3.2 微結構圖形設計 32
3.4 微感測元件製程規劃 34
第四章 量測與分析 37
4.1 靜電紡絲氧化銦奈米纖維分析 37
4.1.1紡絲時間與環境濕度影響 38
4.1.2 電壓對奈米纖維形態分析 41
4.1.3 流速對奈米纖維形態分析 44
4.1.4距離對奈米纖維型態分析 48
4.2氣體微感測元件製程 52
4.2.1加熱器與溫度感測器微影製程 53
4.2.2指叉感測電極製程 55
4.2.3靜電紡絲氧化銦感測薄膜製程 56
4.3氣體感測器靈敏度量測與分析 57
4.3.1 量測架構 57
4.3.2 加熱器與溫度感測器特性分析 58
4.3.3 感測薄膜性質量測 60
第五章 結論與未來工作 63
5.1 結論 63
5.2 未來發展 64
參考文獻 66

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