臺灣博碩士論文加值系統

晶圓封裝常以化學鍍的方式製作金屬層，其中化學鍍鎳溶液經過重複使用會在鍍液中不斷累積亞磷酸根離子，致使鍍液發生老化、造成鍍速降低，甚至讓鍍層的品質產生變異，因此必須經常汰換。隨著台灣封裝產值增加，大量的鍍鎳廢液已成為封裝廠沉重的包袱。事實上，這些被淘汰鍍鎳液中仍保留大量的鎳離子未被使用，本研究採用化學沉澱法進行含鎳廢液資源化處理，實驗探討不同反應參數對去除鍍液中鎳離子的影響，並且分析所合成的沉澱物特性，進一步將合成的沉澱物製備為儲能材料。實驗結果顯示在適當參數控制下，鍍液中鎳離子的移除率可達99%以上；以XRD、SEM-EDS、FTIR、Raman spectra和TGA等儀器分析反應產物可知，沉澱物主要為非晶質氫氧化鎳且含有層間水分子與陰離子，使回收的氫氧化鎳粉具有良好的電化學性能；最後，將回收的氫氧化鎳粉製成電極進行電化學特性量測，並與市售氫氧化鎳進行比較發現，直接沉澱所得的氫氧化鎳粉具有較高的比電容量，並且經過100次循環掃描後，電容量保有比率亦較市售品高，顯示自鍍鎳廢液中可合成出具儲能潛力的材料。

Chemical plating is often adopted in a wafer packaging process for metallization. In a used electroless nickel plating bath, phosphite ions accumulate continually and make the bath aged and the deposited nickel quality decreased. Thus a great amount of plating wastewater is produced and becomes one of the most serious environmental problems today. Actually the conversion of nickel ions is not over 15 wt.% in the used electroless nickel plating wastewater. In this study, nickel-containing wastewater was treated by chemical precipitation under different reaction parameters. After chemical precipitation, the precipitate was analyzed using XRD, FTIR, Raman spectra, SEM-EDS and TGA. Furthermore, the as-synthesized precipitate was utilized as energy storage materials. Our experimental results showed that the removal fraction of nickel was more than 99% by use of chemical precipitation. The recovered precipitate from nickel-containing wastewater is mainly amorphous nickel hydroxide containing interlayer water molecules and anions. This is helpful on the electrochemical performance of nickel hydroxide. Compared with the electrode made via the commercial Ni(OH)2, the electrode made via the recovery Ni(OH)2 was found to exhibit higher specific capacitance, better electrochemical reversibility, better stability and lower impedance. The results demonstrate that Ni(OH)2 recovered from nickel-containing wastewater shows high potential as energy storage materials.

摘 要 i
ABSTRACT ii
誌謝 iv
目錄 v
表目錄 vii
圖目錄 viii
第一章 前言 1
1.1 晶圓封裝與鍍鎳製程 1
1.2 鍍鎳廢液的回收技術 4
1.3 含鎳能源材料 8
1.4 研究動機 9
第二章 文獻回顧 10
2.1 重金屬廢液的處理技術 10
2.2 化學沉澱法 16
2.3 氫氧化鎳的儲能特性 23
第三章 基本原理 31
3.1 化學沉澱原理 31
3.2 感應耦合電漿原子放射光譜儀 36
3.3 紫外/可見光分光光譜儀 38
3.4 循環伏安法 40
3.5 電化學阻抗譜 43
第四章 實驗設備與方法 48
4.1 實驗藥品與材料 48
4.2 實驗儀器與設備 49
4.3 實驗步驟 50
4.3.1化學沉澱反應 52
4.3.2反應後處理與溶液分析 54
4.3.3沉澱物檢測 56
4.3.4電化學特性量測 58
第五章 結果與討論 61
5.1 影響鍍鎳廢液沉澱的因素 61
5.1.1 pH值效應 62
5.1.2溫度效應 67
5.1.3時間效應 69
5.1.4攪拌效應 72
5.1.5添加劑效應 74
5.2 含鎳沉澱物的性質分析 77
5.2.1 X-射線繞射分析 77
5.2.2傅立葉轉換紅外光譜分析 79
5.2.3拉曼光譜分析 80
5.2.4 SEM-EDS分析 82
5.2.5 TGA分析 86
5.3 回收氫氧化鎳的電化學特性 87
5.3.1氫氧化鎳電極充放電分析 87
5.3.2質子擴散行為 95
5.3.3比電容量分析 98
5.3.4循環穩定性測試 99
5.3.5電化學阻抗分析 102
第六章 結論 106
參考文獻 107
符號編彙 116

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