臺灣博碩士論文加值系統

本研究提出一奈米碳纖薄膜壓阻方向感測元件，此感測元件可感測三維力量，更具備良好的可撓性。另外，此元件設計製造程序較傳統力量感測元件簡易，且適合大量生產。其感測單元的製作為使用滴定的方式塗佈在經過圖案化大氣電漿進行表面親疏水處理的聚醯亞胺(Polyimide)基板上。本研究並利用表面接觸角量測設備、X光光電子能譜儀、掃描式電子顯微鏡(SEM)和原子力顯微鏡(AFM)探討大氣電漿處理前後之表面親疏水性、官能基與元素組成以及表面輪廓形態的改變。將感測單元製作成四個相對、具辨認力量方向功能的可撓性感測元件，並經由多通道數位電錶的電阻值量測及彼此變形產生的訊號差異，來進行三維力量判讀。
本研究進一步利用所製作的三維力量感測元件開發奈米碳纖高分子複材游標指向裝置。研究中以內建OP放大器、類比數位轉換器(ADC)和多工器的PSoC晶片開發掃描電路，再經由USB介面下達游標的移動的指令。本研究成功展示以所開發的奈米碳纖高分子複材游標指向裝置及掃描電路驅動電腦螢幕的游標。

In this study we proposed an innovative piezoresistive sensing device fabricated with carbon nano-fiber thin film. The device is able to detect three-dimensional forces and with excellent flexibility. Besides, the fabrication process of this device is simpler than that of traditional force sensors, and easy to be produced by mass production. The device has four strain sensors made on a polyimide substrate by patterning surface treatment and tilted-drop process. The hydrophilic and hydrophobic surface treatments were performed by atmospheric plasma, and the treated surfaces are investigated by contact angle measurement, x-ray photo electron spectroscopy and scanning electron microscope to study their functional groups, element composition and morphological surface profile. The fabricated flexible device which has four sensors in opposite directions can recognize three-dimensional forces by means of measuring and analyzing the resistance of the four sensors. The flexible device was applied to develop a cursor pointing device. A PSoC chip with built-in OP amplifier, analog to digital converter and multiplexer was used to develop a scanning circuit for the cursor pointing device. We successfully demonstrated to move the computer screen cursor by the developed cursor pointing device.

摘要I
AbstractII
致謝III
目錄IV
圖目錄VIII
表目錄XV
符號說明XVI
第一章 緒論1
1.1 前言1
1.2 研究動機與目的3
1.3 文獻回顧4
1.3.1 可撓式觸覺感測器5
1.3.2 具辨認方向感測器9
1.3.3 壓阻高分子複材12
1.3.4 聚醯亞胺15
1.4 論文架構16
第二章 理論基礎18
2.1 壓阻式感測器原理18
2.2 導電高分子複合材料之導電機制20
2.2.1 導電高分子複合材料20
2.2.2 導電粒子20
2.2.3 高分子基材21
2.2.4 導電高分子之導電機制22
2.2.5 滲透理論22
2.3 奈米碳纖高分子複材游標指向裝置感測機制28
第三章 製造方法與步驟30
3.1 製程規劃30
3.2 製程設計31
3.2.1 基板選用及表面處理32
3.2.2 壓阻高分子複材溶液調配39
3.2.3 奈米碳纖高分子複材游標指向裝置製作43
第四章 量測系統47
4.1 控制系統47
4.2 實驗架設環境49
4.3 掃瞄電路系統52
第五章 結果與討論57
5.1 壓阻式感測器之特性量測59
5.1.1 壓阻式感測器下壓電阻值量測59
5.1.2 壓阻式感測器無下壓側移電阻值量測65
5.1.3 壓阻式感測器下壓同時側移電阻值量測67
5.1.4 壓阻式感測器放置重量電阻值量測78
5.1.5 奈米碳纖高分子複材游標指向裝置執行方法82
5.2 大氣電漿處理聚醯亞胺(PI)之表面潤濕性量測85
5.2.1 大氣電漿疏水表面潤濕性量測85
5.2.2 大氣電漿親水表面潤濕性量測87
5.3 大氣電漿處理聚醯亞胺(PI)之表面分析90
5.3.1 表面疏水性量測91
5.3.2 表面親水性量測91
5.3.3 PI經大氣電漿處理表面化學成份變化91
5.4 聚醯亞胺(PI)表面形貌的觀察97
5.5 聚醯亞胺(PI)表面粗糙度量測99
5.6 單一導電高分子複合材料應變敏感性量測100
第六章 結論與未來展望102
6.1 結論102
6.2 未來展望104
參考文獻105

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