臺灣博碩士論文加值系統

品質衝突存在競爭的市場環境，主要來自顧客多品質要求，例如，快速達交，低成本，保持品質穩定，相對技術瓶頸若無法突破，品質衝突接踵而來。
因此，解決品質衝突，符合客戶的要求，最需要的是有效的管理方法。在技術上，萃思理論提供一套有系統的創意管理。目前萃思創新設計方法非常受到設計工程師關注，設計者可以依循萃思理論正確的找出工程技術問題的矛盾參數，套用矛盾矩陣表，使用物質-場方法來找出技術上的瓶頸，加上實驗設計理論分析，提供解決品質衝突的方向。
本文的創新管理即將萃思方法無法量化的缺點加以改良，結合田口實驗設計的敏感度分析之優點，其中，增加有用的資源及消除有害的資源之兩者共通性，突破技術上的瓶頸，解決品質衝突問題。本文中，以半導體晶圓研磨製程品質衝突實際範例結果來證明萃思創新結果之可行性。相信在使用萃思方法時，若能搭配本文提出的建議與方法，一定能讓創意使用者在使用萃思方法時更有效率。

Quality conflicts exist in a competitive market, and come from customer’s large quality require mainly, for example, quickly delivery, lower cost and keep quality steady. Sometimes corrosponsive technology bottleneck get difficult to break through, unfortanlty, the quality conflicts come one after another.
Therefor, to solve quality conflicts effieiency and to accord with customer’s demand, the effective and powerful management method is necessary. Nowadays, TRIZ theory has been the innovative and systematic way to manage technology. In other words, it is the most popular innovative design in solving engineering problems. The TRIZ theory not only helps all engineers find out the technique contradiction parameter exactly but also use conflicts matrix and applies substance field to discover technical bottleneck, in addition, combining experiment design analyses properly, offer and solve direction of quality conflicts.
In the paper, innovative management not only improves the shortcoming of unable quantification and also combines sensitive analysis of Taguchi Method. It includes the commonness of advantages of increasing useful resources and eliminating harmful resources, breaking through technical bottleneck and solving quality conflicts. In practical case, in this paper, semiconductor process in CMP quality conflict of example proves the TRIZ innovation results. I believe that it would be more effective if creative users match suggestions and ideas when using the TRIZ theory. The old model evaluates enterprise’s wealth only with productivity, profit and property assets and it only focuses on management performances on short-term interests or competitiveness.

摘 要 i
Abstract ii
誌 謝 iii
目錄 iv
表目錄 vi
圖目錄 vii
圖目錄 vii
一、緒 論 1
1.1 研究背景 1
1.2 研究動機 2
1.3 研究目的 3
1.4 研究範圍與限制 3
1.5 研究方法與流程 3
二、文獻探討與研究假設論 4
2.1 解決空矩陣元素方面 4
2.2 解決正確找出矛盾參數方面 4
2.3 解決物質-場方法適用時機方面 5
2.4 解決矛盾矩陣表是否適合新科技方面 5
2.5 萃思與品質分析方法與應用 5
三、萃思創新理論與管理 7
3.1 萃思(TRIZ)發展背景 7
3.2萃思(TRIZ)理論運算機制 7
3.3 技術問題分析方法及步驟 7
3.4 矛盾矩陣表方法 8
3.4.1矛盾矩陣表 9
3.4.2三十九參數 10
3.3.3四十法則及發明 13
3.3.4 TRIZ 優缺點 14
3.5 訊號雜音比理論與實驗分析 15
3.6 萃思(TRIZ)之創新應用 16
四、個案研究 18
4.1 半導體晶圓大小發展趨勢與研磨製程限制 18
4.2 晶圓平坦化 化學機械研磨（CMP）製程簡介 19
4.2.1 CMP 基本架構 19
4.2.2 CMP 主要參數 20
4.2.3 CMP 晶圓研磨要求與目的 22
4.3. 萃思(TRIZ)創新理論解決晶圓平坦化品質衝突度 23
4.3.1 確認並說明問題--CMP兩大品質要求目標 24
4.3.2 擬定問題 27
4.3.3 建立物質-場(S-Field)模型-導入矛盾衝突表 27
4.3.4 解決品質衝突 （轉盤轉速影響） 28
4.3.5 決定最後理想化的結果分析 29
4.3.6 品質分析 -訊號雜音比 30
4.3.7 列出可利用的資源-尋找資料庫中的案例附予系統演進 31
4.3.8 增加動態與可控性 33
4.3.9 增加系統的、彈性、使用性、效率及控制性 34
4.4 TRIZ改善後，平坦度與良率關係 35
五、結論與建議 36
5.1 結論 36
5.1.1在創新管理方面 36
5.1.2 在TRIZ應用CMP方面 36
5.2 未來研究方向及建議 37
參考文獻 38
一、中文部分 38
二、英文部分 38

一、中文部分

1 林伯勳，含時間估測器之類神經網路式Run-to-Run 製程控制器設計及其在銅製程CMP之應用，碩士論文，國立中興大學機械工程研究所，2003。
2 梁馨科、陳義揚，新竹科學園區廠商研究發展管理問題之初探，中國工業工程學會年會論文集，頁129 ~ 135，1990。
3 梁馨科、王淑芬、張志傑，以訊號雜音比率為衡量指標對銀行業號碼機服務品質之研究，財務工程與金融創新研討會論文集，頁15-24，2002。
4 黎正中，穩健設計之品質工程，台北圖書，1993。
5 蕭詠今，TechOptimizer訓練教材 Version 1.5，May 1999。

二、英文部分

1. Apte, P. R. and D. L. Mann, Taguchi and TRIZ: Comparisons and Opportunities, The TRIZ Journal, http://www.triz-journal.com/, November 2001
2. Chan, Hsiao-Ling and Shing-Ko Liang, Yield Improvement for Blood Glucose Strip by Taguchi Dynamic Approach , International Journal of the Information Systems for Logistics and Management ,Vol.1, No.1, pp.9-16, 2005.
3. Clarke, D. W. TRIZ , Through the Eyes of an American TRIZ Specialist,A Study of Ideality, Contradictions, Resources, Ideation International, Inc., 1997.
6 Domb, Terninko, E. and J. Miller, The 76 Standard Solutions, with modern Examples–Class Four, The TRIZ Journal, http://www.triz-journal.com/, July, 2000.
4. Grace, F., M. Slocum, and T. Clapp, A New TRIZ Practitioner's Experience for Solving an Industrial Problem using ARIZ 85C: Increasing a Textile Kiss-Coat Operation Speed, The TRIZ Journal, http://www.triz-journal.com/, January 2001.
7 Ideation International , Inc., Ideation International FAQs, http://www.ideationtriz.com/
8 Invention Machine Corporation, TechOptimizer Professional Edition Version 3.01, (Computer Software), 1999.
9 Kosse, Some Limitations of TRIZ Tools and Possible Ways of Improvement, Conceptual and Innovative Design for Manufacturing, ASME, DE-Vol. 103, pp. 111-115, 1999. http://www.triz-journal.com/, June 2000.
10 Leslie, D.r Monplaisir, Rajesh Jugulum and Mahfoozulhag Mian, 1999.
11 Liang. S. K., Y. H. Hung, and K. S. Chen, Using the Signal -to-Noise Ratio to Evaluate the Tellers' Performance in Banking System , Advances and Application in Statistics, Vol.1, No.2 , pp.133-148, 2001.
12 Liu, C. C. and J. L. Chen, A TRIZ Inventive Design Method without Contradiction Information, The TRIZ Journal, http://www.triz-journal.com/, September 2001.
13 Mann, D., Assessing the Accuracy Of The Contradiction Matrix For Recent Mechanical Inventions, The TRIZ Journal, http://www.triz-journal.com/, February 2002.
14 Monplaisir, Dr. Leslie Rajesh Jugulum and Mahfoozulhaq Mian, Application of TRIZ and Taguchi Methods:Two case Example,1998.
15 Rovira, N. León and H. Aguayo, A new Model of the Conceptual Design Process using QFD/FA/TRIZ, The TRIZ Journal, http://www.triz-journal.com/, July 1998.
16 Terninko, J. E. Domb and J. Miller, The 76 Standard Solutions, with modern Examples–Class Five, The TRIZ Journal, http://www.triz-journal.com/, July, 2000.
17 Terninko, J., E. Domb and J. Miller, The 76 Standard Solutions, with modern Examples–Section One, The TRIZ Journal, http://www.triz-journal.com/, February 2000.
18 Terninko, J., E. Domb and J. Miller, The 76 Standard Solutions, with modern Examples–Class Three, The TRIZ Journal, http://www.triz-journal.com/, May 2000.
19 Terninko, J., Su–Field Analysis, The TRIZ Journal, http://www.triz-journal.com/, February 2000.
20 Terninko, J., The QFD, TRIZ and Taguchi Connection : Customer– Driven Robust Innovation, The Ninth Symposium on Quality Funcion Deployment, 1997.
21 Terninko, John, Ph.D., The QFD, TRIZ and Taguchi Connection: Customer-Driven Robust Innovation, 1997
22 Wu, Tzann-Dw., the study of problem solving by TRIZ and Taguchi methodology in automobile muffler designation, 2004