臺灣博碩士論文加值系統

在金屬工業和大規模生產部門的時代，對高效機械傳動部件的需求和需求不斷增加，這需要在兩個或多個部件之間的特定接觸表面上具有高負載維持和承載能力。 高速鋼是高合金工具鋼，即使在高溫下也能保持硬度。 高速工具鋼這個詞的名字主要是因為它們能夠以高切削速度加工材料。
在壓鑄模具中廣泛使用AISI H13工具鋼，因為它是熱作模具鋼組之一，具有良好的耐腐蝕性和高淬透性。 為了改善工具和模具的性能。 和表面處理。 薄膜沉積是目前最常用的表面處理方法之一。
物理氣相沉積（PVD）是用於將材料作為薄膜沉積到基板上的最廣泛使用的技術。 從金屬，半導體材料到最複雜的光學薄膜疊層，PVD是最常見的沉積方法，以獲得優異的機械性能，高硬度，耐高溫性，耐腐蝕性和抗氧化性。雙相處理，即離子體氮化，然後進行陰極電弧蒸發，用於加強AlCrSiN薄膜與H13工具鋼的附著。 首先通過離子滲氮在H13鋼樣品上形成氮化物層，然後使用陰極電弧蒸發在氮化後H13鋼的表面上沉積CrN過渡層，以延長大規模生產中的模塑模具的壽命並防止薄膜失效。
在本研究中，通過陰極電弧蒸發合成梯度和AlCrSiN薄膜。 在沉積之前，首先通過離子體氮化在H13鋼樣品上形成氮化物層。 在AlCrSiN的沉積過程中，CrN作為中間層沉積，以增強薄膜和氮化基材之間的附著強度。 通過控制溫度和大氣中N2 / H2的混合物。 離子氮化處理後的AlCrSiN薄膜工具鋼具有不同的微觀結構和機械性能。 採用特徵X光能量分散光譜儀（EDS）測量元素成分分析和場發射掃描電子顯微鏡（FE-SEM）觀察沉積薄膜的微觀結構，採用X光繞射分析儀(XRD)觀察薄膜結構。 使用納米壓痕和微克氏硬度測量薄膜的硬度。
為了評估薄膜的抗衝擊斷裂性，使用循環加載裝置進行沖擊試驗（200K，300K和400K次），其中碳化鎢壓頭作為衝擊探針在室溫和高溫（~500℃）下進行。 結果表明，由於梯度硬度支持，雙相處理薄膜的附著強度和耐磨性顯著增加。 離子滲氮和硬質薄膜的組合是為了在大規模生產中延長成型模具和金屬鍛模的壽命.

In the era of metal industries and mass production sectors there are continuously increasing the demand and huge need for a highly efficient mechanical transmission components that requires high load sustaining and bearing capacity on the particular contact surfaces between two or more parts. High speed steel is highly alloyed tool steel capable of maintaining hardness even at elevated temperature. The word high speed tool steels are so named primarily because of their ability to machine materials at high cutting speeds. Widely used AISI H13 tool steel in the die casting molds as it’s among one of the hot-working die steel group and it has good corrosion resisting with high hardenability properties. In order to improve the properties of tools and molds. And the surface treatment. Thin film deposition is one of the most common surface treatment methods available today.
Physical vapor deposition (PVD) is the most widely used technology for depositing materials as a thin film onto a substrate. From metals, to semiconductor materials, to the most complicated optical film stacks, PVD is the most common deposition method to obtain excellent mechanical properties, high hardness, high temperature resistance, corrosion resistance and oxidation resistance.
A duplex treatment, i.e. plasma nitriding followed by cathodic arc evaporation, is used to strengthen the bonding of AlCrSiN coatings to H13 Tool steels. A nitride layer is first formed on H13 steel samples by plasma nitriding and then the CrN transition layer is prepared on the surface of the nitrided H13 steels using cathodic arc evaporation to extend the life time of molding dies in mass production and to protect from delamination of coatings.
In this study, gradient and AlCrSiN Coatings were synthesized by cathodic-arc evaporation. Before deposition a nitride layer is first formed on H13 steel samples by plasma nitriding. The plasma nitriding process is carried out in industrial furnace with the proper parameters like process temperature, nitrogen/hydrogen ratio and voltage with duty cycle. During the coating process of AlCrSiN, AlCrN was deposited as an interlayer to enhance adhesion strength between the coatings and nitrided substrates. By controlling the temperature and mixture of N2/H2 at atmosphere. The plasma nitrided duplex treated AlCrSiN coated tool steels possessed different microstructures and mechanical properties. The microstructure of the deposited coatings were investigated by field emission scanning electron microscope (FE-SEM) equipped with an energy-dispersive X-ray analysis spectrometer (EDS), Glancing angle X-ray diffraction was used to characterize the microstructure and phase identification of the films. The hardness of coatings was evaluated using nanoindention and Vickers hardness measurement.
To evaluate the impact fracture resistance of the coatings, an impact test (200K, 300K and 400K times) was performed using a cyclic loading device with a tungsten carbide indenter as an impact probe at room temperature and high temperature (500°C).the impact fatigue results shows for AlCrSiN coated sample at room temperature after 400K of impacts that the surface has no any iron signal however cohesive failure can be found on the surface of AlCrSiN sample. The PN+AlCrSiN coated samples shows better wear performance even after 400K of impacts and there is no any kind of surface failure can be seen. The high temperature impact test for AlCrSiN coated sample resist the impacts of 200K, after that the surface showed iron signals, but in case of PN+AlCrSiN there is no any iron signal even after 200K of impacts at high temperature. That means PN+AlCrSiN sample shows the significant change because of pre-treated nitrided process which supports the substrate surface from any external applied loads. The results show that the adhesion strength and wear resistance for duplex-treated coatings increase significantly due to a gradient-hardness support. The combination of plasma nitriding and hard coatings may increase the life of molding dies and metal forging dies in mass production.

Chinese Abstract....................................................................i
English Abstract...................................................................ii
Acknowledgement...................................................................iv
Content.............................................................................v
Table Caption......................................................................ix
Figure Caption......................................................................x
Chapter-1 Introduction..............................................................1
1.1 Preface.........................................................................1
1.2 Motivation......................................................................2
1.3 Reseach Purpose.................................................................2
Chapter-2 Litreature Review.........................................................3
2.1 Stages of Heat Treatment........................................................3
2.2 Phase Diagram.............................................................. ....4
2.3 Alloying Element................................................................6
2.4.Types of Heat Treatment.........................................................8
2.5 Case Hardening..................................................................9

2.5.1 Carburizing.............................................................11
2.5.2 Cyaniding....................................................................13
2.5.3 Nitriding..........................................................15
2.5.3.1 Microstructure of nitrided layer at different process time.............16
2.5.3.2 Microhardness of Nitrided samples......................................18
2.5.3.3 Compound and Diffusion Layer.................................19
2.5.3.4 Influence of N2/H2 ratio...............................................21
2.5.3.5 Active Screen Vs. Conventional DC Plasma Nitriding.....................22
2.5.3.6 Advantages of Plasma Nitriding.........................................24
2.6 Thin Film Coating Technology...................................................25
2.6.1 Deposition of Thin Films..................................................25
2.7 Principle of Cathodic Arc Evaporation Process..................................27
2.8 Advantages and Dis-advantages of Cathodic Arc Evaporation......................29
2.9 Troubleshooting on shortcoming of CAE......................................30
2.9.1 Macropartcle Filtering................................................31
2.10 Mechanism of Film Growth..................................................32
2.11Structure Zone Diagram of thin film deposition.................................34
2.12 Mechanism of Thin Films.......................................................36
2.13 AlCrN and AlTiN...........................................................39
2.14 Effect of Silicon (Si) on AlCrN coated tool...............................44
2.14.1 Residual Stress and Hardness Comparision.............................54
2.15 Influence of Interlayer on thin films....................................56
2.16 Damage in Dies...........................................................59
2.17 Development of thin films by Duplex Treatment............................60
Chapter 3 Experimental Methods & Procedures........................................73
3.1 Experimental Flow-Chart........................................................75
3.2 Plasma Nitriding Experimental Method...........................................76
3.2.1 Working Principle............................................................76
3.2.2 Experimental Procedure.......................................................76
3.3 Thin Film Design & Experimental Method.........................................79
3.3.1 Preparation and Coating Steps............................................79
3.4 Thin Film Microstructure analysis..............................................83
3.4.1 Field Emission Scanning Electron microscope (FE-SEM).....................83
3.4.2 Energy Dispersive Spectrometer (EDS).........................................85
3.5.Analysis of thin film Mechanical Properties....................................88
3.5.1 Rockwell Indentation.....................................................88
3.5.2 Vickers Indentation Testing Equipment....................................90
3.5.3 Nanoindentation Machine......................................................91
3.5.4 Impact Fatigue test..........................................................93

Chapter 4 Results & Discussion.....................................................94
4.1 Thin film analyses.............................................................94
4.1.1 Composition analyses of the AlCrSiN coatings.............................94
4.1.2 Glancing angle XRD analyses..................................................97
4.2 Mechanical Properties analyses................................................102
4.2.1 Rockwell Indentation analyses..........................................102
4.2.2 Film Hardness measurement..................................................104
4.2.3 Nanoindentation analyses...................................................105
4.2.4 Analyses of Impact Fatigue test............................................109
Chapter 5 Conclusion..............................................................115
References........................................................................117
Extended Abstract.................................................................130

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