臺灣博碩士論文加值系統

本論文主要是探討自製的鋅擴散鈮酸鋰波導電光調制器，在可見光波段光學外差干涉術之應用，並利用鎖相放大器為主的相位訊號接收與處理介面，發展以此波導相位調制器為主的光學相位量測系統。
爲了驗證此自行開發的鋅擴散波導電光調制器(ZIEOM)之應用可行性，在實驗中與以一商用的電光調制器(EOM)，作為基本特性的比較。首先比較操作在三種不同可見光波長(532 nm、632.8nm、670nm)下切換電壓與相位穩定度之比較。從實驗結果得知，在同樣輸入電壓訊號100 kHz及在632.8nm波長下，ZIEOM與EOM所需之輸入鋸齒波切換電壓分別為18V及140V，而在量測相位穩定性的比較上，ZIEOM也比EOM來得更加良好。而當入射光為532nm時，在EOM中，可以觀察到因光折效應所造成的訊號不穩定現象，因此，也發現無法用鎖相放大器鎖住量測相位。然而在ZIEOM中，依然可以在控制適當的入射功率下，進行532nm波長的相位量測應用。此外，在670nm波長的驗證上，也證實在較長波長下，可以得到相對穩定的相位操作。而此結果將有助於開發，以半導體雷射二極體與波導電光調制器整合的相位調制模組，在未來商用產品上之應用。
同時在光學參數量測的比較上，也以一鈮酸鋰材料熱光相位變動率之量測，作為在光學溫度感測器之應用，實驗中也發現，兩種電光調制器在熱光相位變動率參數的量測上是相差無幾的，但是ZIEOM具有較穩定之相位，且可以進一步操作在532nm波長。同時利用此電光調制器輸出具有聚焦光束提升強度下，也證實可以應用在材料光折特性的量測。

In this thesis, the applications of the homemade Zn-Indiffused electro-optic modulator (ZIEOM) have been evaluated and applied for optical heterodyne interferometry at visible wavelengths (532nm, 632.8nm, and 670nm). The switching voltages and phase stabilities of the proposed waveguide modulator are further compared with the commercial buck-type modulator (EOM). The results show that the ZIEOM has a lower switching voltage and better phase stability than that of the EOM. Moreover, the ZIEOM can be used to modulate the stable heterodyne light sources for various polarization interferometers at the visible wavelengths. A number of metrology applications including optical temperature sensors and photorefractive measurements have been successfully developed by using the ZIEOM.

摘要
Abstract
誌謝
目次
表目錄
圖目錄
第一章 緒論
1.1 研究動機
1.2 研究方法
1.2.1 量測旋光介質中的微小光學旋轉角
1.2.2 量測液晶盒預傾角及間隙
1.2.3 旋轉角度量測
第二章 基本原理
2.1 鈮酸鋰晶體基本特性
2.2 電光效應
2.3 外差干涉術基本原理
2.4 外差干涉儀基本架構
2.5 電光調制器調制原理
第三章 波導電光調制器製程
3.1 晶片切割
3.2 波導層圖形製作
3.3 電極層製作
第四章 波導電光調至器在外差干涉量測之應用
4.1 EOM與ZIEOM Vπ量測
4.1.1 商用電光調制器(EOM)
4.1.2 波導電光調制器(ZIEOM)
4.1.3 Vπ量測結果
4.2電光調制器相位穩定度之量測
4.2.1 利用示波器觀察訊號相位變化
4.2.2 光點大小對於輸出波形電壓訊號之影響
4.2.3 利用鎖相放大器觀察訊號相位變化
4.3 光點聚焦位置對於輸出波形電壓訊號大小之影響
4.4 波導電光調制器應用於光學穿透式溫度量測
4.5 波導電光調制器應用於光學反射式溫度量測
4.5.1 670nm波長雷射光束入射Au表面量測結果
4.5.2 632.8nm波長雷射光束入射Au表面量測結果
4.5.3 670nm波長雷射光束入射Ag表面量測結果
4.5.4 632.8nm波長雷射光束入射Ag表面量測結果
4.6 波導電光調制器應用於晶體光折相位量測
第五章 結論
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