臺灣博碩士論文加值系統

本論文採用原子層沉積法成長氧化鋅奈米柱於氧化鋁基板上作為核心結構的材料，再以硫化鋅包覆其上形成殼層結構，共同形成沿半徑方向第二型核心/殼層異質結構。實驗以二乙基鋅(DEZn)與氧化亞氮(N2O)做為前驅氣體成長氧化鋅核心，再以二乙基鋅(DEZn)與二丁基硫(DTBS)做為前驅氣體成長硫化鋅殼層，並使用高度純化之氮氣作為輸送氣體以完成氧化鋅/硫化鋅沿半徑方向第二型核心/殼層異質結構之製備。製備過程中藉由高溫退火使氧化鋅核心結構的品質提昇再包覆上硫化鋅殼層結構以優化整體奈米結構品質。氧化鋅樣品之表面形態，內部結構與各項物理特性分別使用穿透式電子顯微術、掃描式電子顯微術、X-光繞射、光激發光頻譜量測來分析與鑑定。研究結果除了可以利用穿透式電子顯微鏡判定本實驗所製備的硫化鋅殼層屬於六角結構之外亦可觀察到雙重繞射與莫里條紋。進一步可利用光激發光頻譜看出由於氧化鋅與硫化鋅的晶格錯配所致的拉伸現象使能帶結構有所改變而造成的紅移現象。

In this thesis, ZnO nanowires and radial ZnO/ZnS core-shell nanostructure arrays were deposited at atmospheric pressure in a temperature range of 300 ~ 600 oC with diethylzinc (DEZn), nitrous oxide (N2O) and ditert-butylsulfide (DTBS) precursors serving as sources of Zn, O and S elements in the ZnO nanowires and radial ZnO/ZnS core-shell nanostructures. The physical properties of radial ZnO/ZnS core-shell nanostructures were characterized using θ-2θX-ray diffraction (XRD), high resolution transmission electron microscopy (HRTEM), scanning electron microscopy (SEM), and photoluminescence spectroscopy (PL). It was found that both ZnO and ZnS were wurtzite structure in nature based upon HRTEM investigations. Moire fringes were identified in the radial ZnO/ZnS core-shell nanostructure with a good agreement in the lattice mismatch between ZnO and ZnS in the pseudomorphic ZnO/ZnS core-shell nanostructure. Finally, a slight red-shift in the near band edge (NBE) emissions of the RT PL of the ZnO/ZnS core-shell nanostructures was observed.

Acknowledgement…………………………………………………………i
Abstract (in Chinese)………………………………….…………………...ii
Abstract………………………………………………..………………......iii
Table of contents………………………………………………………......iv
List of figures………..…………………………………………………….vi
Chapter 1. Introduction…………………………………………………….1
Chapter 2. Background review…………………………………………….3
§2-1 Properties of type-II structure…………………..……….............3
§ 2-2 The choice of substrate of this study………………………........8
§ 2-3 Principle study of Moire’ patterns……………………………..12
§ 2-4 Motivation of this study………………..……………………...14
Chapter 3. Experimental procedures and Analytical tools...……………...15
§ 3-1 Substrate cleaning……………………......................................15
§ 3-2 Growth of ZnO/ZnS core-shell nanostructures by ALD and growth process………………………………………..............16
§ 3-3 Scanning electron microscopy…………………………………20
§ 3-4 X-ray diffractometry……………………………………...……20
§ 3-5 Transmission electron microscopy……………………………..21
§ 3-6 TEM sample preparation procedures ………………………….21

Chapter 4 Results and discussion………………………………………....24
§4-1 Characterization of ZnO nanorods and ZnO/ZnS core-shell structures ………………………………………………...…...24
§4-2 High-resolution TEM and PL study of ZnO/ZnS core-shell structure…………………………………………………….…...34
Chapter 5 Conclusions and future works………………….……………...50
Reference………………………………………………………………….51

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