臺灣博碩士論文加值系統

渦輪分子真空幫浦在自由分子流中具有良好的抽氣效果，可以形成超高真空的環境。葉片的幾何形狀與排列方式對抽氣比率與壓縮比有很大的影響。本研究是應用直接模擬蒙地卡羅法探討渦輪分子真空幫浦葉片的幾何形狀，對葉片抽氣比率與壓縮比的影響。並對其轉子葉片、靜子葉片的角度、葉片間距與葉片弦長比(s/b比)、葉片轉速等對抽氣比率與壓縮比的影響。配合田口法對葉片幾何形狀做最佳的設計。以田口法歸類出靜子葉片的角度、靜子葉片的s/b比、葉尖輪轂直徑與轉子葉片轉數對抽氣比率有很大的影響。經田口最佳化分析後，信雜比S/N值比實驗直交表中最佳的參數增加了0.8db，抽氣比率由34.23%增加到36.67%。

Turbo molecular pump can provide good air-removal effect in free molecular flow to the ultra high vacuum status. The blade geometries and arrangement have a great influence on pump speed and compression ratio. In this research, direct simulation of Monte Carlo method is adopted to check to specific parameters influence on the pump speed and compression ratio. Parameters need include: blade geometries, rotor blade angle and stator blade angle , blade spacing ratio and blade chord (s/b ratio), and rotational speed. Also the blade geometry is optimized by the Taguchi method. Following the result of Taguchi method, rotor blade angle, blade s/b ratio, and rotational speed are the main (key) issues which affect the pump speed. With the Taguchi optimization, the signal-to-interference ratio is 0.8db higher than the best result from the experiment orthogonal table, and the pump speed also increased from 34.23% to 36.67%.

目錄
摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 VII
表目錄 IX
第1章 緒 論 1
1.1 研究背景與動機 1
1.2 文獻回顧 3
1.3 全文概述 5
第2章 渦輪分子真空幫浦之抽氣原理 6
2.1 真空幫浦的分類與介紹 6
2.1.1 真空幫浦簡介 6
2.1.2 渦輪分子真空幫浦的主要結構 7
2.1.3 渦輪分子真空幫浦二維模型幾何分析定義 9
2.2 氣體分子之特性 10
2.2.1 氣體巨觀與微觀特質 10
2.2.2 氣流種類與連續體之區分方式 12
2.2.3 自由分子流的特性 14
2.3 渦輪分子真空幫浦之抽氣原理 15
2.3.1 氣體分子碰撞模型 15
2.3.2 葉片抽氣之原理 16
2.3.3 分子速度分佈函數 18
第3章 蒙地卡羅法模擬 21
3.1 蒙地卡羅法 21
3.2 二維流場模擬 22
3.2.1 起始流場的設定 23
3.2.2 自由流分子進入流道的情形 27
3.2.3 氣體分子與葉片碰撞後的情形 30
3.2.4 氣體分子撞擊葉片後的反射情形 48
3.3 單級渦輪分子幫浦壓縮比與抽氣比率 55
3.4 多級渦輪分子真空幫浦壓縮比與抽氣比率 57
第4章 最佳化設計分析 58
4.1 田口法原理 58
4.1.1 實驗步驟 59
4.1.2 實驗方法 60
4.1.3 田口法直交表 61
4.1.4 品質特性值的種類 62
4.2 最佳化程序 65
4.2.1 定義目標函數 65
4.2.2 選擇控制因子及水準 66
4.2.3 平均數分析與確認實驗 68
第5章 結果與討論 69
5.1 轉子葉片角度對抽氣比率與壓縮比的影響 70
5.2 轉子葉片s/b對抽氣比率與壓縮比的影響 72
5.3 靜子葉片角度對抽氣比率與壓縮比的影響 74
5.4 靜子葉片s/b對抽氣比率與壓縮比的影響 76
5.5 轉子葉片轉速對抽氣比率與壓縮比的影響 78
5.6 田口法最佳化分析結果 80
第6章 結論與建議 85
參考文獻 87
符號索引 91
作者簡介 94

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