|
[1] L.B.Freund,S.Suresh,”Thin Film Material: "Stress,Defect Formation and SurfaceEvolution”, Cambridge University Press,Cambridge pp.76-86,UK,2003
[2] G.G.Stoney,“The tension of metallic films deposited by electrolysis”, Proc.Roy. Soc., A82, pp.172-175, (1909)
[3] Milton Ohring,“The materials science of thin film ” Academic Press, San Diego, CA, pp.420-425, 1992
[4] L.B.Freund,J.A.Floro,E.Chason,“Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations” Journal of applied physics, Vol.88/12 (1999)
[5] Z.Suo,E.Y.Ma,H.Gieskove,S.Wagner,“Mechanics of rollable and foldable film-on foilelectronics”,Jounal of applied physics,Vol.74/8 (1999)
[6] Y.Y.Hu,W.M.Hunag“Elastic and elastic-plastic analysis of multilayer thin films:Closed-form solution”, Journal of applied physics Vol.96 (2004)
[7] M.Zhu,P.B.Kirby,“Governing equation for the measurement of nonuniform stress distributions in thin films using a substrate deformation technique ”,Journal of applied physics Vol.88/171903 (2006).
[8] X.Zhang,K.S.Chen,S.M.Spearing,“Thermo-mechnical behavior of thick PECVD oxide films for power MEMS applications”,Sensors and Actuators A : Physical, Vol. 103/1-2, Jan. pp.263-270 (2003).
[9] A.Hi,D.Sherman ,R.Ballarini,H.Kahn,B.Mi,S.M.Phillips, A.H.Heuer, “Optimal design of multilayered polysilicon films for prescribed curvature”,Journal of materials science Vol.38 pp.4169-4173 (2003)
[10] 鄒淵翔,莊佳橙,鄭宇舜,“平面顯示器之軟板應用及取放技術 分析”,機械工業期刊 270期 (2005)
[11] 陳麒麟,張榮芳,張加強,“軟性顯示器發展及關鍵技術現 況”,機械工業期刊 258期 (2005)
[12] F.J.von Preissing,“Applicability of the classical curvature-stress relation for thin films on plate substrates”, Journal of applied physics Vol.66/9 pp. 4262-4268 (1989)
[13] E.Schwartz,“Roll to Roll Processing for Flexible Electronics”,MSE 542:Flexible Electronics May 11, (2006)
[14] I-C.Cheng,A.Kattamis,K.Long,J.C.Sturm,S.Wagner, “Stress control for overlay registration in a-Si:H TFTs on flexible organic-polymer-foil substrates”,Journal of the society for information display Vol.13/563 (2005)
[15] A.C.Ugural,“Stress in Plate and Shells”,second Edition, McGraw-Hill,New York,1981
[16] lA.Blech,l.Blech,M.Fiont“Determination of thin-film stresses on round substrates”,Journal of applied physics, Vol.97/113525 (2005)
[17] 周政翰,薄膜應力之有限元素分析與評估,國立成功大學土木工 程研究所碩士論文, (2006).
|