臺灣博碩士論文加值系統

電子式靈敏皮膚是一種有大面積可撓且具感測及訊號處理能力的人造皮膚，它可以覆蓋在機器的表面或人工義肢（甚至是人類皮膚）。過去由於材料、元件製程、訊號及資料處理…等技術瓶頸有待克服，使得靈敏電子皮膚之技術發展一直停滯不前。而近幾年元件製作技術、材料科學及數位訊號處理技術蓬勃發展，特別是微機電製程和在軟基版上製作元件的技術已漸趨成熟，使得靈敏電子皮膚之研究已成為熱門主題。靈敏皮膚可廣泛應用於智慧型自動化領域、非特定環境之機器自動化、保健工業、環境友善介面…等方面。
本論文在靈敏皮膚的整合上提供一個新的構想，利用可撓式太陽能電池當作靈敏皮膚的基板，在其背面嵌入壓力/溫度矩陣型薄膜微感測器。太陽能電力系統透過一個脈波調制轉換器能夠提供一個穩定且持續不斷的電壓輸出，即使在沒有太陽光的環境下仍然可以由可充電電池提供電力。溫度/壓力矩陣型薄膜微感測器是利用微機電技術製造，利用微加工技術可以製作出比頭髮更細微之微結構，由於此技術係結合半導體技術與精密加工技術，可以達成積體化、低成本、高效率化、智慧型及可量產化之目標。本論文更進一步利用量測工具來驗證靈敏電子皮膚薄膜感測元件之應用功能。
靈敏電子皮膚薄膜感測元件是微機電元件製程技術成熟下的產物，再進一步整合標準IC製程技術後，其應用範圍之廣及對感測技術的深遠影響是可預期的。

Electric sensitive skin is a kind of artificial skin which has a large-area, flexible array of sensors with data processing capabilities, which can be used to cover the entire surface of a machine or .an artificial limb (even a part of human body). Because of the problems of materials, fabrication processes, signal and data processing, etc., the technology of sensitive skin is at a standstill. In recent year, the technology of element manufacturing, material science, and the technology of DSP are developed vigorously. The research of sensitive skin causes a popular topic. The sensitive skin can be applied widely in robots, intelligent automation, unstructured machine automation, healthy industry, environment-friendly technology, etc.
A new idea of the sensitive skin is presented in this thesis. The idea is to use the flexible solar cells as the substrates for sensitive skin and embed pressure/temperature thin film microsensor array in the back of the solar cells. The photovoltaic system can provide a steady voltage via a PWM dc-to-dc converter, even in the dark surrounding. The sensors are fabricated by MEMS technology. Microfabrication can make a microstructure as smaller and tiny than hair construction. MEMS can reach to the targets of integrated circuit, low-cost, high- efficiency, intelligence and mass production. We measure the capabilities of the sensors by some measurement instrument, too.
MEMS-IC integrated skin will be a developed production. And the influence of the sensitive skin will be expectable in our society.

誌謝 i
中文摘要 ii
Abstract iii
Table of Content iv
List of Figures vi
List of Tables ix
Chapter 1. Introduction 1
1.1 Preface 1
1.2 Introduction of Flexible Solar Cell 3
1.3 Introduction of Microsensors 4
1.4 Motivation 7
1.5 Objectives 8
1.6 Thesis Organization 9
Chapter 2. Literature Review 10
2.1 Review of Sensitive Skin 11
2.2 Review of Flexible Solar Cell 14
2.3 Review of Thin Film Microsensor Array 18
Chapter 3. Theory and Principle 20
3.1 Photovoltaic System 21
3.1.1 Introduction of Soar Cells 21
3.1.2 P-n Junction 22
3.1.3 Electrical Characteristics 25
3.1.4 Power Charge System 29
3.2 Thin Film Pressure Sensor and Strain Gauge Measurement 32
3.2.1 Introduction of Thin Film Pressure Sensors 32
3.2.2 Piezoelectric Effect and Piezoresistivity 34
3.2.3 Strain and Strain Gauge Measurement 37
3.2.4 Large Deflections of Plates 41
3.3 Thin Film Temperature Sensor 46
3.3.1 Thermocouple 46
3.3.2 Resistance temperature detector (RTD) 48
Chapter 4. Fabrication Processes 50
4.1 Photovoltaic System 51
4.1.1 Flexible Solar Cell 51
4.1.2 Pulse Width Modulation Dc-to-Dc Converter 54
4.2 Piezoelectric Pressure Sensor and Pt-Resistance Temperature Detector 58
4.2.1 PZT Piezoelectric Pressure Sensor 58
4.2.2 Pt-Resistance Temperature Detector 66
4.3 K-type Thermocouple and Strain Gauge 73
Chapter 5. Experiment Results and Discussion 84
5.1 Photovoltaic System 84
5.2 Thin Film Microsensor Array 86
5.2.1 Dynamic loading tests of the piezoelectric pressure sensors 86
5.2.2 Temperature Experiment 89
5.3 Strain Gauge Resistivity 92
Chapter 6. Conclusion and Future Envision 93
Reference 95

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