臺灣博碩士論文加值系統

本論文主要研究增強拉曼散射效果的元件。嘗試以軟微影（Soft Lithography）搭配紫外光奈米壓印（UV-based Nanoimprint Lithography，UV-NIL）技術翻印光柵，並利用擠壓模仁的方式間接改變光柵週期，將光柵結構翻印在玻璃基板上，最後在光柵結構上方以熱蒸鍍法蒸鍍一層金（Au）薄膜，即完成表面增強拉曼光譜元件，為了解元件結構的形狀、週期及調製深度，我們使用原子力顯微鏡（AFM）觀察元件的表面形貌；在量測拉曼訊號上，使用Ocean Opticse公司出產的拉曼專用光譜儀Maya 2000pro搭配波長785 nm激發光源做量測，更以市售的模擬軟體EM Explorer對不同週期、不同金屬厚度、不同調制深度及不同形狀的電場做探討，找出最佳參數以達到最佳的增強效果。實驗的部分以弦波形狀555 nm及832 nm的光柵結構製作增強拉曼光譜元件，加上以擠壓方式製作出5 ％、10 ％、15 ％、20 ％（673 nm、703 nm、751 nm、791 nm）四種不同週期的光柵結構，以這六種增強拉曼光譜元件量測0.1 M的苯甲酸溶液比較其拉曼光譜強度，將六種增強元件量測的光譜強度與電場趨勢做對照，結果顯示增強元件的電場有助於增強拉曼訊號。最後將量測結果與市售增強拉曼光譜元件做比較，比較結果比市售增強元件的增強效果好了5倍以上。

This paper mainly explores the components for enhancing the Raman scattering effect. It attempts to reprint grating through Soft Lithography matching with the UV-based Nanoimprint Lithography (UV-NIL) technology, indirectly changing the grating period via the extruding die core to reprint the grating structure on a glass substrate, and finally make a layer of Au plated on the grating structure by thermal evaporation to finish the surface-enhancing Raman spectrum component. In order to learn the component shape, period and modulation depth, we use an Atomic Force Microscope (AFM) to observe the surface topography of the component; in measuring Raman signals, the Raman dedicated spectrometer Maya 2000pro produced in Ocean Opticse matching with an excitation light source with wavelength of 785 nm is adopted. Besides, it assists on the discussion on the electric field based on different periods, metal thicknesses, modulation depths and shapes through the commercially available simulation software EM Explorer, so as to find the best parameter to achieve optimal enhancement effect. In the experiment process, it makes the enhancing Raman spectrum component respectively with the grating shapes of 555nm and 832 nm, and produces grating structures with four different periods of 5 ％、10 ％、15 ％、20 ％（673 nm,703 nm,751 nm and 791 nm） by extruding style. The six enhancing Raman spectrum components are used to measure 0.1 M of benzoic acid solution to compare the Raman spectral intensity, which is then compared with the trends in the electric field. The results show that the electric fields of the enhancing component are conducive to enhancing Raman signals. Finally, the measurement results are compared with those of the commercially available enhancing Raman spectrum components, concluding that the former is better than the latter for more than 5 times.

目錄
摘要 .............................................................................................................. i
Abstract ...................................................................................................... ii
誌謝 ........................................................................................................... iii
目錄 ............................................................................................................ vi
表目錄 ..................................................................................................... viii
圖目錄 ...................................................................................................... vii
第一章 導論 ......................................................................................... 1
1.1 研究動機與目的 ........................................................................... 1
1.2 文獻回顧 ....................................................................................... 2
1.2.1 奈米週期性結構對SERS之影響 .............................................. 2
1.2.2 表面粗糙度對SERS之影響 ...................................................... 5
1.2.3 表面高低起伏及熱區(hot-spot)對SERS 之影響 .................... 7
1.3 研究方法 ..................................................................................... 10
1.4 論文架構 ..................................................................................... 11
第二章 光電模擬軟體介紹 ................................................................ 12
2.1 時域有限差分法基本原理 ..................................................... 12
2.2 Yee的時域有限差分演算法 ..................................................... 13
2.3 穩定準則 ..................................................................................... 16
2.4 吸收邊界條件 ............................................................................. 16
v
2.5 幾何圖形撰寫 ............................................................................. 17
第三章 拉曼光譜原理 ........................................................................ 22
3.1 拉曼散射光譜 ............................................................................. 22
3.1.1古典拉曼散射理論................................................................... 22
3.1.2拉曼散射量子理論................................................................... 24
3.2 表面增強拉曼光譜理論 ........................................................... 26
3.2.1 SERS披覆理論 ........................................................................ 27
第四章 光柵結構對電場的影響 ........................................................ 29
4.1 光柵週期對電場的影響 ............................................................ 31
4.2 金屬厚度對電場的影響 ............................................................ 34
4.3 調製深度對電場的影響 ............................................................ 37
4.4 光柵形狀對電場的影響 ............................................................ 40
4.4 光柵結構最佳參數模擬 ............................................................ 43
第五章 實驗材料與方法 .................................................................... 47
5.1 光柵奈米製程技術..................................................................... 47
5.1.1 模仁軟微影技術製程 ............................................................. 47
5.1.2 聚二甲基矽氧烷（PDMS）介紹 .......................................... 47
5.1.3 聚二甲基矽氧烷（PDMS）模仁製作 .................................. 48
5.2 奈米壓印 ..................................................................................... 51
5.2.1 紫外光奈米壓印製程 ............................................................. 51
vi
5.2.2 改變週期之紫外光奈米壓印製程 ......................................... 53
5.3 自製簡易壓印機介紹................................................................. 56
5.4 樣品配置 ..................................................................................... 59
第六章 拉曼光譜量測結果 ................................................................ 60
6.1 拉曼光譜介紹 ............................................................................. 60
6.2 拉曼光譜量測結果..................................................................... 61
6.3 與市售基板比較結果................................................................. 66
第七章 結論與未來展望 .................................................................... 67
參考文獻 ................................................................................................... 68
Extended Abstract ..................................................................................... 72
簡歷 ........................................................................................................... 77

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