臺灣博碩士論文加值系統

近年來 TeO2 材料被發現適用於介電共振器之材料且擁有低熔點的特性，因此許多學者極力於研究可在低溫下燒結之氧化碲化合物的介電陶瓷材料，且此類化合物擁有不錯的介電常數及品質因子，但由於材料 τf 較高而難以被實際應用。因此本研究以 TeO2 陶瓷材料為主體，藉由添加 CaTiO3 及 SrTiO3 於 TeO2，以混相共存的方式調整共振頻率溫度係數，並同時探討添加不同配比的 CaTiO3 及 SrTiO3 對微結構與介電性質的影響。
實驗結果顯示，純相 TeO2 在 640℃ 持溫 4 小時燒結條件下，可獲得相對密度大於 95% 之燒結體，其介電常數約為 28.41，品質因子約為 34700 GHz (f0 = 12.94 GHz) 和共振頻率溫度係數約為 -101.81 ppm / ℃。
在 TeO2+x wt% CaTiO3 系統，經由 XRD 相鑑定分析、Raman 並且由 SEM 和 TEM 之能量分散式光譜儀 (EDS) 成分分析結果得知，在高溫過程中會反應生成 TiTe3O8 及 CaTe2O5 結晶相，且隨添加量增加，其 TiTe3O8 結晶相越明顯，因此使得介電常數及品質因子性質提升。且當 x = 10 wt% 在 645℃ / 8 h燒結條件下，其介電常數約為 28.65、品質因子約為 15600 GHz (f0 = 10.44 GHz) 和共振頻率溫度係數約為 -3.24 ppm / ℃。
在 TeO2+x wt% SrTiO3 系統，經由 XRD 相鑑定分析、Raman 並且由 SEM 和 TEM 之能量分散式光譜儀 (EDS) 成分分析結果得知，在高溫過程中會反應生成 TiTe3O8 及 SrTe2O5 結晶相。在燒結過程中，由於 SrTe2O5 產生局部液相，因而導致添加量增加，其品質因子性質沒有明顯變化趨勢。當 x = 15 wt% 在 610℃ / 8 h 燒結條件下，其介電常數約為 26.58、品質因子約為 12400 GHz (f0 = 11.08 GHz) 和共振頻率溫度係數約為 -3.81 ppm / ℃。

Recently, tellurium dioxide has been explored as a low-melting end member of dielectric ceramic compounds. Therefore, a number of tellurium-based low-temperature dielectric resonator materials with excellent dielectric constant and quality factor have been reported. However, most of these materials have a high τf and are not able to apply. This study is focus to compensate the negative temperature coefficient of TeO2 by adding of CaTiO3, SrTiO3 and investigate the effects on microstructure and dielectric properties.
This study shows pure TeO2 ceramics with >95% theoretical density can be produced by sintering at 640℃ for 4 hours. The TeO2 ceramic has a dielectric constant (εr) of 28.41, quality factor (Q × f) of 34700 GHz (at 12.94 GHz) and temperature coefficient of resonant frequency (τf) of -101.81 ppm / ℃.
In TeO2+x wt% CaTiO3 system by using X-ray powder diffractiometer, Raman spectroscopy, Scanning electron microscopy (SEM) and Transmission electron microscopy (TEM) of Energy Dispersive Spectrometer (EDS) analysis results show that adding CaTiO3 to TeO2 generates the formation of TiTe3O8 and CaTe2O5. As the increasing of CaTiO3 content, the study shows the dielectric constant and quality factor increase. Addition 10 wt% CaTiO3 improves the τf to -3.24 ppm / ℃ with εr of 28.65 and Q × f value of 15600 GHz (at 10.98GHz) when sintered at 640℃ for 8 hours.
In TeO2+x wt% SrTiO3 system by using X-ray powder diffractiometer, Raman spectroscopy, and Scanning electron microscopy (SEM) of Energy Dispersive Spectrometer (EDS) analysis results show that adding SrTiO3 to TeO2 generates the formation of TiTe3O8 and SrTe2O5. As the increasing of SrTiO3 content, the study shows the dielectric constant and quality factor have similar values. Because of the dielectric constant and quality factor are influenced by producing a liquid phase in the densification process. Addition 15 wt% SrTiO3 improves the τf to -3.81 ppm / ℃ with εr of 26.58 and
Q × f value of 12400 GHz (at 11.08GHz) when sintered at 610℃ for 8 hours.

摘要..............................................I
Abstract.........................................II
致謝.............................................IV
目錄.............................................VI
圖目錄.........................................VIII
表目錄..........................................XII
第一章 緒論.......................................1
1-1 前言..........................................1
1-2 研究方向與目的................................2
第二章 基礎理論與相關文獻.........................3
2-1 微波介電性質..................................3
2-1-1 介電常數....................................3
2-1-2 品質因子....................................7
2-1-2-1 內在損失..................................8
2-1-2-2 外在損失..................................8
2-1-3 共振頻率溫度係數............................9
2-2 介電共振器原理...............................12
2-3 燒結理論.....................................14
2-3-1 液相燒結...................................17
2-4 文獻回顧.....................................18
2-4-1 TeO2化合物之介電性質.......................18
2-4-2 混相對共振頻率溫度係數之影響...............20
2-4-3 背向散射電子影像成份分析...................22
第三章 實驗方法及步驟............................26
3-1 起始原料.....................................26
3-2 粉末混合.....................................26
3-3 燒結體製備...................................26
3-4 材料特性分析.................................29
3-4-1 粉末之熱重 / 熱差分析......................29
3-4-2 XRD相鑑定分析..............................29
3-4-3 拉曼光譜分析...............................29
3-4-4 燒結體密度量測.............................32
3-4-5 掃描式電子顯微鏡...........................32
3-4-6 穿透式電子顯微鏡...........................34
3-5 微波介電性質量測.............................34
3-5-1 燒結體微波介電性質量測之樣品準備...........34
3-5-2 微波介電性質量測...........................35
第四章 結果與討論................................38
4-1純相 TeO2.....................................38
4-1-1 粉末鑑定分析...............................38
4-1-2 XRD 相鑑定分析.............................38
4-1-3 燒結密度...................................38
4-1-4 顯微結構觀察與分析.........................38
4-1-5 微波介電性質...............................43
4-2 TeO2+x wt% CaTiO3 系統.......................43
4-2-1 粉末鑑定分析...............................43
4-2-2 XRD 相鑑定分析.............................43
4-2-3 拉曼光譜分析...............................49
4-2-4 燒結密度...................................49
4-2-5 顯微結構觀察與分析.........................54
4-2-6 微波介電性質...............................60
4-3 TeO2+x wt% SrTiO3 系統.......................64
4-3-1 粉末鑑定分析...............................64
4-3-2 XRD 相鑑定分析.............................64
4-3-3 拉曼光譜分析...............................69
4-3-4 燒結密度...................................69
4-3-5 顯微結構觀察與分析.........................69
4-3-6 微波介電性質...............................78
4-4 綜合討論.....................................83
第五章 結論......................................90
參考文獻.........................................91
附錄A............................................96
自述............................................101

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