臺灣博碩士論文加值系統

本論文提出利用串聯不同種類光纖光柵所完成之光纖感測器，應用於同時感測應力、溫度及折射率之物理量。在文中主要提出兩種布拉格光纖光柵串接長週期光纖光柵感測器架構，分別為以保偏布拉格光纖光柵串接光敏性光纖之長週期光纖光柵以及單模光纖之斜角布拉格光纖光柵經氫氟酸蝕刻後再串接單模光纖之長週期光纖光柵兩種架構。其感測機制為利用布拉格光柵之峰值製作於長週期光柵之損失峰的斜坡區上，當布拉格光柵波長飄移時，造成布拉格光柵之峰值因落於長週期光纖光柵損失峰之位置不同而產生布拉格光柵的能量變化。
完成此兩種串接式光纖光柵之實驗後，觀察其實驗結果靈敏度與待測物理參數之轉換矩陣式中發現，單模斜角布拉格光柵串接長週期光纖光柵之感測器因矩陣式內參數值較為相近，造成其方程式線性相依故並不完全能同時量測三種物理量，而以保偏布拉格光纖光柵串接光敏光纖之長週期光纖光柵之感測器能確實同時量測三種物理量，未來期釵b製程方面更加提升其靈敏度。

The fiber sensors based on the cascaded different types of fiber gratings is proposed in this thesis for applying in the simultaneous measurement of stress, temperature, and index. The fiber sensors are composed of the fiber Bragg grating (FBG) in polarization maintaining fiber (PMF) in series with the long period fiber grating (LPG) in photosensitive fibers and the etched tilted-fiber Bragg grating (TFBG) in series with the long period fiber grating in single mode fibers, respectively. The sensing mechanism is based on variation both of Bragg wavelength power and the Bragg wavelength corresponding to the Bragg peaks to be located on the positive or negative slope of the loss-dip of the long period fiber grating.
According to the experimental results of these two different types of the cascaded fiber sensors, the matrix determinant of the etched TFBG in series with the LPG in the single mode fiber is approximately linear independent. Therefore, this kind of structure is not suitable to be used for simultaneously measuring the three parameters of stress, temperature, and index. In the future, we expected that the fabrication process can be optimized for improving the sensitivity and repeatability.

摘 要.................................i
Abstract..............................ii
誌 謝...............................iii
目 錄................................vi
圖目錄................................ix
表目錄................................xv
第一章 緒 論.........................1
1.1 研究動機及目的.....................1
1.2 研究方法及本文架構.................2
第二章 光纖光柵之種類與特性...........3
2.1 保偏光纖之簡介[14].................3
2.2 光敏性光纖之簡介[15]...............6
2.3長週期光纖光柵與布拉格光纖光柵......7
2.3.1光纖光柵..........................7
2.3.2長週期光纖光柵....................8
2.3.3 長週期光纖光柵基本理論分析......10
2.3.4 保偏長週期光纖光柵..............12
2.3.5 布拉格光纖光柵..................12
2.3.6 布拉格光纖光柵之理論分析........14
2.3.7保偏布拉格光纖光柵...............16
2.3.8斜角型布拉格光纖光柵.............16
2.4 各項長週期光纖光柵製作方式........17
2.4.1 前言............................17
2.4.2 以KrF 248nm雷射寫製之長週期光纖光柵...17
2.4.3 以CO2 雷射寫製之長週期光纖光柵[21]....20
2.4.4 Sandwich長週期光纖光柵[22]............21
2.4.5 鋸齒狀長週期光纖光柵[23]..............22
第三章 空氣間隙型與雙面蝕刻型長週期光纖光柵之製作....24
3.1 前言.............................................24
3.2光纖單側面拋光[25]................................24
3.3光纖微影..........................................26
3.3.1光阻劑旋轉塗佈(Spin Coating)....................28
3.3.2 軟烤(Soft bake)................................29
3.3.3 曝光(Exposure).................................29
3.3.4 顯影(Development)..............................30
3.3.5 硬烤(Hard bake)................................30
3.4 光纖蝕刻.........................................30

3.5保偏光纖之空氣間隙型長週期光纖光柵................31
3.6保偏光纖之雙面蝕刻長週期光纖光柵..................33
第四章 實驗架構與實驗結果...........................34
4.1 三種保偏長週期光纖光柵感測折射率實驗.............34
4.1.1 實驗原理.......................................34
4.1.2 實驗架構.......................................34
4.1.3 實驗結果與分析.................................35
4.2 保偏光纖寫製之斜角式布拉格光纖光柵蝕刻實驗.......42
4.2.1 前言...........................................42
4.2.2實驗架構與結果..................................42
4.3 保偏布拉格光纖光柵串接光敏性光纖之長週期光纖光柵實 驗…………………………………………………………46
4.3.1保偏布拉格光纖光柵串接光敏性光纖之長週期光纖光柵.46
4.3.2 實驗原理........................................47
4.3.3保偏布拉格光纖光柵串接光敏性光纖之長週期光纖光柵對折射率感測實驗............................................48
4.3.3.1 實驗架構.....................................48
4.3.3.2 實驗結果.....................................48

4.3.4保偏布拉格光纖光柵串接光敏性光纖之長週期光纖光柵對溫度感測實驗..............................................51
4.3.4.1 實驗架構.....................................51
4.3.4.2 實驗結果.....................................52
4.3.5保偏布拉格光纖光柵串接光敏性光纖之長週期光纖光柵對應力感測實驗..............................................55
4.3.5.1 實驗架構.....................................55
4.3.5.2 實驗結果.....................................56
4.3.6 總結............................................59
4.4 單模斜角式布拉格光纖光柵串接長週期光纖光柵實驗....62
4.4.1單模斜角布拉格光纖光柵串接長週期光纖光柵.........62
4.4.2 實驗原理........................................64
4.4.3 蝕刻之單模斜角布拉格光纖光柵串接長週期光纖光柵
對折射率感測實驗......................................65
4.4.3.1 實驗架構.....................................65
4.4.3.2 實驗結果.....................................66
4.4.4 蝕刻之單模斜角布拉格光纖光柵串接長週期光纖光柵對溫度感測實驗................................................68
4.4.4.1 實驗架構.....................................68
4.4.4.2 實驗結果.....................................69
4.4.5 蝕刻之單模斜角布拉格光纖光柵串接長週期光纖光柵對應力感測實驗................................................71
4.4.5.1 實驗架構.....................................71
4.4.5.2 實驗結果.....................................72
4.4.6 總結............................................75
第五章 結論與未來展望.................................77

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