臺灣博碩士論文加值系統

本論文主要研究金屬/介電層/金屬結構表面電漿的特性，主要分
為定波長變角度、定角度變波長量測，來探討雙層金中間夾不同厚度
SiO2 樣品的表面電漿的特性。
首先，我們藉由模擬探討雙層對稱的金膜中間夾不同厚度的SiO2
樣品的表面電漿的變化，由模擬的結果我們可以找出SiO2 在哪些厚
度範圍下可讓我們在機台上量測，並依據模擬出的結果做出樣品來量
測，從量測的結果中發現我們可以在全反射角之前就激發出表面電
漿。
在對稱的金屬/界電層/金屬構中表面電漿的色散曲線因雙層金的
表面電漿相互耦合會split 出奇函數與偶函數兩個解，並且隨著SiO2
的厚度變薄兩個解會分的越開，且從色散曲線中表面電漿耦合分裂出
奇函數的色散曲線就可以直接穿過空氣和BK-7 的light line 並且延伸
到k x=0 的地方，這時表面電漿就可以不用再透過任何的耦合方式直
接耦合到自由空間中。

In this thesis, the main research of the surface plasma coupling in metal/dielectric/metal structure, divided into Angle-dependent reflectivity, and wavelength-dependent angle, to explore the surface plasmon characteristics of double gold films clip of different thickness of the SiO2
samples.
First, we explore the simulation of surface Plasmon results by double symmetrical gold film with different thickness of SiO2 sample, we can find the SiO2 thickness range in which we can measure in the machine table and simulated results based on samples made to measure.
we explore in the symmetrical structure of the metal/dielectric/metal the surface Plasmon dispersion relationship curve will spilt off even and odd two solutions due to the coupling, we can see that solution will spilt off with the thickness of the SiO2 thin two solutions will be divided into the more open, the odd solution dispersion curves can be directly through
the air and BK-7 and extends to the light line where kx = 0, then the surface plasmon can be directly coupled to free space without any coupling.

指導教授推薦書 ............................................
口試委員會審定書 ..........................................
授權書 ................................................ iii
誌謝 .................................................. iv
中文摘要 ............................................... v
Abstract .............................................. vi
目錄 ................................................... vii
圖目錄 ................................................. ix
表目錄 ................................................. xii
第1 章 導論 ........................................... - 1 -
1.1 簡介 ............................................. - 1 -
1.2 研究動機與目的 .................................... - 2 -
第2 章 理論基礎 ....................................... - 3 -
2.1 表面電漿共振原理 ................................... - 3 -
2.2 介電材料與金屬介面的表面電漿模態 ..................... - 5 -
2.3 表面電漿激發方式 ................................... - 8 -
第3 章 量測系統與實驗架構 .............................. - 14 -
3.1 樣品之製備 ....................................... - 14 -
3.2 樣品製作流程...................................... - 14 -
3.3 全反射角量測與反射光強模擬 ......................... - 17 -
3.4 儀器介紹 ......................................... - 27 -
3.5 實驗架設 ......................................... - 29 -
第4 章 實驗結果分析與討論 .............................. - 32 -
4.1 金屬/介電層/金屬結構表面電漿耦合反射光強模擬 ......... - 32 -
4.2 金屬/介電層/金屬結構之表面電漿耦合量測 .............. - 43 -
第5 章 結論 .......................................... - 51 -
參考文獻 ............................................. - 53 -

[1] Wood, R., On a remarkable case of uneven distribution
of light in a diffraction grating spectrum. Proceedings
of the Physical Society of London, 18, 269-275 (1902).
[2] R. H. Ritchie,“ Plasma Losses by fast electrons in
thin films”,Physical Review,Vol.106,pp.847-881,1957.
[3] Fano, U., The theory of anomalous diffraction gratings
and of quasi-stationary waves on metallic surfaces
(Sommerfeld’s waves). Journal of the Optical Society
of America 31 (3), 213-222 (1941).
[4] C.J. Powell and J.B. Swan, “Origin of the
Characteristic Electron Energy Losses in Magnesium”,
Physical Review, Vol.116, pp. 81-83,1959.
[5] Otto, A., Excitation of nonradiative surface plasma
waves in silver by the method of frustrated total
reflection. Zeitschrift fur Physik A Hadrons and Nuclei
216(4),398-410 (1968).
[6] Kretschmann, E., Die bestimmung optischer konstanten
von metallen durch anregung von oberfl
chenplasmaschwingungen. Zeitschrift f r Physik A
Hadrons and Nuclei 241 (4), 313-324 (1971).
[7] 吳民耀、劉威志，表面電漿子理論與模擬，物理雙月刊(廿八卷二
期) 2006 年4月.
[8] K. Matsubara, S. Kawata, and S. Minami, “A compact
surface Plasmon resonance sensor for measurement of
water in process”,Applied Spectroscopy, Vol.42,pp.1375-
1379,1988.
[9] R. C. Jorgenson and S. S.Yee, “A fiber-optic chemical
sensor based on surface Plasmon resonance”,Sensors and
Actuators B:Chemical,Vol. 12,pp. 213-220,1993.
[10] X. Sun, S. Shiokawa, and Y. Matsui, “Interaction of
surface plasmons with surface acoustic waves and the
study of the properties of Ag films” ,Journal of
Applied Physics, Vol. 69,pp. 362-366, 1991.
[11] P.D Gershon and S. Khilko, “ Stable chelating linkage
for reversible immobilization of oligohistidine tagged
proteins in the BIAcore Surface Plasmon Resonance
detector”, Journal of Immunological Methods,
Vol.183,pp. 65-76, 1995.
[12] J. Homola, S. S. Yee, and G. gauglitz,“Surface
plasmon resonance sensors: review”,Sensors and
Actuators B: Chemical, Vol. 54, No. 1, pp. 3-15, 1999.
[13] N.C. Chen, W.C. Lien, C.R. Liu, Y.L. Huang, Y.R. Lin,
C. Chou, S.Y. Chang, and C.W. Ho JOURNAL OF APPLIED
PHYSICS 109,043104 (2011).
[14] H. Raether., Surface plasmons on smooth and rough
surfaces and on gratings. New York (1988).
[15] Hocheol Shin, Mehmet Fatih Yanik, Shanhui Fana, Rashid
Zia and Mark L. Brongersma,“Omnidirectional resonance
in a metal-dielectric metal geometry”,Appl. Phys.
Lett. 84, 4421 (2004).
[16] Y. Wang,“Wavelength selection with coupled surface
plasmon waves”, Appl. Phys. Lett. 82, 4385 (2003).