臺灣博碩士論文加值系統

本論文利用溶膠凝膠法在Pt(111)/TiO2/SiO2/Si(100)基板上製作無鉛非當量的(Na0.5K0.5)NbO3 (NKN)薄膜，藉由XRD、SEM、AFM、J-V、XPS、P-E、d33等儀器去探討其微結構與電特性的影響。在本研究中發現，NKN薄膜在高溫退火的過程中會使鈉、鉀離子揮發，並導致二次相與氧空缺的產生；這些二次相與氧空缺會使得晶格結構的改變以及電特性的下降。因此，適當的補償鈉、鉀進入薄膜裡有助於改善其電性；此外，本論文還探討了電荷在薄膜裡傳導的機制，此增加了發展成元件的可能性。最後，我們找出最佳鈉、鉀補償的參數，成功的製備出NKN薄膜。
本論文另一個重點為利用過量添加鈉、鉀的最佳參數去摻雜鋰元素進去NKN形成Lix(Na0.5 K0.5)(1-x)NbO3的結構，並探討不同比例的鋰摻雜對微結構與電特性的影響，最後發現適當的鋰摻雜有助於提升殘餘極化量與壓電係數。

In this study, lead-free non-stoichiometric piezoelectric (Na0.5K0.5)NbO3 (NKN) films were fabricated by sol-gel processing on Pt (111)/Ti/SiO2/Si(100) substrates. To investigate the microstructure and electrical properties of films, a serious of measurements such as XRD, SEM, AFM, J-V, XPS, P-E, d33, etc were carried out. It was found that the secondary phases and oxygen vacancies formed when sodium and potassium volatilized via annealing process. Then these secondary phases resulted in poor electrical properties. Therefore, the compensation of sodium and potassium appropriately is necessary. Besides, we tried to clarify the mechanism of current conduction more clearly. At last, the optimum excess mount of sodium and potassium on NKN film were found from this study. In addition to non-stoichiometric NKN film, lithium dopants are doped in our system to form Lix(Na0.5 K0.5)(1-x) NbO3 structure. The effects of lithium doping on the microstructures and electrical properties of the samples were investigated. Finally, we found the remnant polarization and piezoelectric coefficient were Improved effectively through doping lithium appropriately.

摘要 I
Extended Abstract II
誌謝 XII
目錄 XIII
表目錄 XVII
圖目錄 XVIII
第一章 緒論 1
1.1 研究背景 1
1.2 研究動機 2
1.3 論文架構 3
第二章 基礎理論與文獻回顧 4
2.1 壓電材料 4
2.1.1 正壓電效應 4
2.1.2 逆壓電效應 5
2.1.3 壓電單晶體 6
2.1.4 壓電多晶體 7
2.1.5 壓電複合材料 8
2.2 壓電晶域結構 8
2.2.1 晶體壓電之根源 8
2.2.2 容忍因子 10
2.2.3 晶格與晶系 11
2.3 壓電係數 12
2.4 介電理論 13
2.4.1 介電原理 13
2.4.2 介電損耗 14
2.5 鐵電效應 15
2.6 介電層導電機制 16
2.6.1 蕭基發射（Schottky emission）17
2.6.2 普爾－法蘭克發射（Poole-Frenkel emission）18
2.6.3 歐姆效應（Ohmic） 20
2.7 溶膠凝膠法 21
2.7.1 溶膠凝膠法原理 21
2.7.2 溶膠凝膠法鍍膜方式 23
第三章 實驗方法與量測 24
3.1 實驗流程 24
3.2 實驗步驟 25
3.2.1 基板清洗 25
3.2.2 下電極鍍製 26
3.2.3 溶液配製 27
3.2.4 塗佈與退火 28
3.3 分析儀器 30
3.3.1 alpha step 30
3.3.2 熱重/熱差分析(TG/DTA) 30
3.3.3 XRD 30
3.3.4 SEM 30
3.3.5 AFM 31
3.3.6 XPS 31
3.3.7 介電量測 32
3.3.8 鐵電量測 32
3.3.9 漏電量測 32
3.3.10 壓電係數量測 32
第四章 結果與討論 33
4.1 不同旋轉塗佈條件上對於NKN溶膠之影響 33
4.1.1 溶膠濃度的影響 33
4.1.2 旋塗速度與時間的影響 34
4.1.3 基板的影響 36
4.2 改變Na,K比例對NKN薄膜微結構與電性之影響 38
4.2.1 (N0.5K0.5)NbO3前驅液熱分析 38
4.2.2非當量NKN薄膜的XRD分析 39
4.2.3 非當量NKN薄膜的EDS分析 46
4.2.4非當量NKN薄膜的SEM分析 48
4.2.5非當量NKN薄膜的AFM分析 54
4.2.6非當量NKN薄膜的介電分析 58
4.2.7非當量NKN薄膜的鐵電分析 61
4.2.8非當量NKN薄膜的J-E分析 63
4.2.9非當量NKN薄膜的XPS分析 67
4.2.10非當量NKN薄膜的壓電係數d33分析 69
4.2.11總結 71
4.3 Li摻雜NKN薄膜對微結構與電性之影響 72
4.3.1 LNKN薄膜的XRD分析 72
4.3.2 LNKN薄膜的SEM分析 74
4.3.3 LNKN薄膜的AFM分析 76
4.3.4 LNKN薄膜的介電分析 78
4.3.5 LNKN薄膜的鐵電分析 80
4.3.6 LNKN薄膜的J-E分析 81
4.3.7 LNKN薄膜的XPS分析 85
4.3.8 LNKN薄膜的壓電係數d33分析 88
4.3.9總結 90
第五章 結論與未來展望 91
5.1 結論 91
5.1.1 塗佈條件之探討 91
5.1.2 非當量NKN薄膜之探討 91
5.1.3 不同比例的鋰摻雜之影響 91
5.2 未來展望 92
參考文獻 93

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