臺灣博碩士論文加值系統

本研究開發了新穎材料的酒精氣體感測器，其藉由二氧化錫作為感測層以製作出電阻式的氣體感測器，並使用了微影製程技術將二氧化錫轉印至光罩中的指叉式電極上，藉由量測電流訊號來作為感測器對氣體反應的指標，成功的製作出可用於一般環境下檢測酒精氣體的氣體感測器，在藉由雙電子槍蒸鍍系統以實現物理氣相沈積法(PVD, Psysical Vapor Deposition)成長二氧化錫的過程與藉由原子層化學氣相沉積系統(ALD,Atomic Layer Chemical Vapor Deposition System)以進行氧電漿處理的過程中，由於薄膜沉積的技術或是後端電漿處理的技術等等，造成材料表面的粗糙度與對氣體分子的親水性有所不同，經由改變氧電漿處理的時間，並從文獻推論出氧電漿處理在二氧化錫的氣體感測機制中扮演了不可或缺的地位，並藉由材料分析和電性量測之間的關係來加以佐證。本研究藉由氧電漿技術，找出了最佳處理的時間，處理過後的二氧化錫氣體感測器具有良好的感測效能，在生活中具有相當廣泛的應用。

In this study, a novel material ethanol gas sensor was developed, which uses tin dioxide as a sensing layer to make a resistive gas sensor, and uses lithography process technology to transfer to the interdigitated electrode in the mask, by measuring the current signal as an indicator of the gas response of the sensor, a gas sensor capable of detecting ethanol gas in a general environment is successfully produced with Dual E-Gun Evaporation System and used to realize the process of growing tin dioxide by physical vapor deposition (PVD) and the process of oxygen plasma treatment by atomic layer chemical vapor deposition system, due to the technology of thin film deposition or the technology of the end plasma treatment, etc., causes the surface roughness of the material and to be different from the hydrophilicity of the gas molecules. By changing the time of the oxygen plasma treatment, it is inferred from the literature that the oxygen plasma is treated with the gas of tin dioxide. Sensing mechanisms play an important role and are supported by the relationship between material analysis and electrical measurements. In this study, the optimal processing time was found by oxygen plasma treatment. The tin dioxide gas sensor by oxygen plasma treatment has good sensing performance and has a wide range of applications in life.

Contents
Abstract(Chinese)……………….. i
Abstract(English)……………. ii
Acknowledgement………….. iv
Contents…………………….. vi
Table Captions……………… viii
Figure Captions…………….. ix


Chapter 1 Introduction………………. .1
Chapter 2 Literature Reviews 7
2-1 Gas sensors 7
2-1-1 Metal oxide semiconductor gas sensors …9
2-1-2 Catalyst combustion gas sensors 10
2-1-3 Electrochemical gas sensors 11
2-1-4 Optical gas sensors 12
2-1-5 Thermally conductive gas sensors 13
2-2 Metal oxide semiconductor gas sensor 14
2-2-1 Schottky contact 15
2-2-2 Oxygen adsorption and the action of reducing gases 19
2-2-3 Electron depletion layer 23
2-2-4 Oxygen vacancy 25
2-3 The properties of tin dioxide 27
2-4 Improve the effect of semiconductor materials on gas sensing 28
2-4-1 Increase the body to surface area ratio of the sensing material..29
2-4-2 Improve material properties by plasma treatment 30
2-4-3 Improve material properties by oxygen plasma treatment 32
2-5 Reaction of ethanol gas with metal oxide semiconductor……………..33
2-6 Comparison of reference for experimental data 34
Chapter 3 Experiment Details 37
3-1 Experiment process 37
3-2 The pre-treatment of experiment process 41
3-3 The technology of oxygen plasma treatment 41
3-4 Ethanol gas sensing experiment 42
3-5 Gas electrical measurement method 45
Chapter 4 Results and discussion 47
4-1 The electrical characteristics of SnO2 ethanol gas sensors 47
4-1-1 The electrical characteristics of SnO2 ethanol gas sensors without oxygen plasma treatment 47
4-1-2 The electrical characteristics of SnO2 ethanol gas sensors by oxygen plasma treatment 5 min.................................................52
4-1-3 The electrical characteristics of SnO2 ethanol gas sensors by oxygen plasma treatment 10 min 56
4-1-4 The electrical characteristics of SnO2 ethanol gas sensors by oxygen plasma treatment 15 min 60
4-1-5 The electrical characteristics of SnO2 ethanol gas sensors by oxygen plasma treatment 20 min……………………………...66
4-1-6 The electrical characteristics of SnO2 ethanol gas sensors by oxygen plasma treatment 30 min……………………………...69
4-2 The scanning electron microscope (SEM) analysis of SnO2 ethanol gas sensors……………………………..............................................................71
4-3 The atomic force microscope (AFM) analysis of SnO2 ethanol gas sensors……………………………..............................................................76
Chapter 5 Conclusion and Future Work 81
5-1 Conclusion 81
5-2 Future work 84
References................................................................................................87
Vita……………………………………………………………………………….....92

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