臺灣博碩士論文加值系統

半導體業近幾年來應映景氣復興所帶來的產能需求提升，持續擴廠增加設備，相對工程師的人機比也跟的提高，以U公司單一薄膜部門機台為例，未經過濾單週機台異常訊息 (alarm code) 達2000筆以上，其中可過濾約佔 50%，本研究利用建置資料庫將設備端異常訊息分析過濾，並繪製成圖表，以便工程師能更快速處理達到預防管理的功能，節省60%以上的工作時間。
半導體廠主要以生產積體電路(Integrated Circuit)產品為主，而隨著製程技術不斷的精進，晶圓尺寸越做越大，IC 越做越小，投資成本亦跟著增加，唯有達到高產能、高良率的目標才可提昇獲利，因此維持生產設備正常運作，縮短修復時間相對地重要，透過資料庫分析後的資料可令工程師提前制定修復計畫，並可對機台零組件備品做有效的管理，節省成本，提高產能。

Because the economy is revived by environment demand, the semiconductor industry will be important. That factory will continue to increase new generational laboratory and manufacture equipment in recent years. Because the manpower to equipment ratio is not suitable, their loading will be increased.
For example unfiltered machine alarm code about 2000 counts every week, which can be filtered about 50% of thin film equipment in U company. This study is built the server collects and analyses abnormal message (alarm code), the engineers can solve the difficult problems more quickly and easily by prevention management system.
The semiconductor foundry manufactures mainly the product of integrated circuits by the advanced semiconductor technology. The foundry manufactures the larger and larger wafer size, but requests the smaller and smaller integrated circuits. That request will increase the cost of manufacture and research, so how to improve the yield and increase the capacity utilization rate will be an important issue for every semiconductor foundry.
Our top request will keep the equipment high run ratio and decreased the recovery time, that effect corporation’s profit violently. By the data analysis system will help the engineers be able to draw up repair plans in advance and manage the spare parts effectively, reach cost-down and increase capacity.

中文摘要 II
Abstract III
誌謝 V
目錄 VI
圖目錄 VIII
第一章、緒論 1
1.1 研究動機 1
1.2 研究背景及範圍 1
1.3 研究方法與論文架構 2
第二章、研究理論基礎與文獻探討 4
2.1 薄膜沈積原理 4
2.2 半導體薄膜沈積設備 4
2.2.1 VECTOR 機型簡介 5
2.2.2 VECTOR設備構造 6
2.2.3 SPEED 機型簡介 9
2.2.4 VECTOR 和 SPEED 運用差異 10
2.3 Frederick Winslow Taylor 科學管理理論 11
2.3.1 基本原理 11
2.3.2 四項原則 11
第三章、研究系統規劃 12
3.1 資料查詢系統 12
3.1.1機群週Alarm狀況功能 12
3.1.2機台狀況功能 14
3.1.3週Alarm排名功能 15
3.1.4週資料查詢功能 16
3.2報表功能 17
3.2.1報表產生 17
3.3系統管理功能 18
3.3.1機台分組設定 18
3.3.1各組Alarm顯示設定 18
3.3.3 RawData上傳功能 19
3.4系統資料庫架構 20
第四章、研究成果 24
4.1異常訊息過濾 24
4.2改善計畫案例 25
第五章、結論 28
5.1 總結 28
5.2 未來展望 28
參考文獻 29
附件 31
資料上傳程式碼 31
機群週Alarm狀況程式碼 43
報表產生程式碼 51
各組Alarm顯示設定程式碼 60
機台分組設定程式碼 68
週資料查詢 86

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