臺灣博碩士論文加值系統

本研究利用標準0.18 μm 1P6M CMOS製程技術設計和製作微型熱發電器，微型熱發電器由370組熱電偶串聯而構成，利用標準製程中的多晶矽層，透過摻雜形成 p-type 和 n-type 所組成的熱電偶。微型熱電發電器的效能取決於熱電偶冷端和熱端的溫度差，為了提高微型熱電發電器的發電性能，因此在熱電偶熱端上方堆疊高熱傳導係數的金屬鋁，且披覆上奈米碳管，用於接收外部熱源溫度，並搭配反應性離子蝕刻(RIE)，將底部的矽基材掏空，使結構懸浮，利用低熱傳導率的空氣來防止熱量從熱電偶透過矽基材散失；冷端熱電偶則包覆於二氧化矽層中，利用二氧化矽低熱傳導率的特性隔絕熱源，使熱電偶兩端形成溫差。利用 ANSYS Workbench 有限元素軟體模擬微型熱電發電器，在接受到熱能時，內部所產生的溫度分佈與溫度梯度變化。實驗量測結果顯示，於400 K的熱源溫度下，未披覆奈米碳管的微型熱電發電器，產生的輸出電壓與輸出功率分別為為0.899 mV與1.72 pW；而披覆黑體薄膜後的微型熱電發電器，其輸出電與輸出功率分別提升至為1.56 mV和5.16 pW。微型熱電發電器在披覆奈米碳管後，電壓因子和功率因子分別為0.225 mV/K/mm2和0.745 pW/K/mm2。並整合蓄電電路，儲存串聯7組的微型熱電發電器所產生之電能，儲存的電能已可供給較低驅動電壓之電子元件。

This study presents a micro thermoelectric power generator fabricated by the standard 0.18 μm 1P6M (one polysilicon and six metals) CMOS (complementary metal oxide semiconductor) process. The micro thermoelectric power generator is composed of 370 thermocouples in series, and the thermocouples are formed by p-type and n-type polysilicon. The efficiency of the micro generator depends on the temperature difference between hot and cold parts of thermocouples. In order to achieve the best generation efficiency, the reactive ion etching (RIE) is used to release the hot part of thermocouples. Then, the hot part of the thermocouples is coated by MCNTs (Multi-walled carbon nanotubes). The cold part of the thermocouples is covered by silicon oxide that provides low thermal conductivity and thermal isolation. ANSYS Workbench is used to simulate the temperature distribution and the temperature gradient of the micro generator. The experimental results showed that the output voltage of thermoelectric generator without MCNTs film was 0.899 mV and the output power was 1.72 pW when temperature was 400 K. The output voltage and output power of the generator with MCNTs film were 1.56 mV and 5.16 pW, respectively, at the temperature of 400 K. The micro generator with the MCNTs film had a voltage factor of 0.225 mV/K/mm2 and a power factor of 0.745 pW/K2/mm2. Finally, the charging circuit is designed to carry out the storage of output power, and the power can be apply in the low power electronic component.

第一章 緒論...………………………………………………….……………………... 1
1.1 前言…………………………………………………………………………… 1
1.2 文獻回顧……………………………………………………………………… 2
1.3 研究動機……………………………………………………………………… 4
第二章 微型熱電元件的設計……………………………..….………………….…... 5
2.1 熱電效應……………………………………………………………………… 5
2.2 熱電元件的結構設計…………………………………………………...…... . 6
2.3 熱電元件的性能分析……………………………………………………...... ..7
2.4 熱電元件的熱傳導模擬分析………………………………………...………. 9
2.5 蓄電電路…………………………………………………………….............. 15
第三章 吸熱薄膜的製備……………………………..….………………………….. 18
3.1 奈米碳管的簡介……………………………………………………...……... 18
3.2 奈米碳管的製備…………………………………………………...………... 20
3.3 奈米碳管的吸熱性能分析……………………………………...…………... 24
第四章 整合型熱電元件的製作…………………………..….…………………….. 28
4.1 熱電元件的佈局……………………………………...…………………...… 28
4.2 整合型熱電元件的製作和後處理………………...………………………... 29
4.3 結果與討論………………………………………………...………………... 32
第五章 量測結果與討論…………………………..….…………………………….. 35
5.1 量測架構與流程………...………………………………………………...… 37
5.2 微型熱電元件的性能測試………………………………………...………... 37
5.3 蓄電電路的測試………………………………………………………...…... 45
第六章 結論與未來展望…………………………..….…………………………….. 46
6.1 結論……………………………………………………………………...…... 46
6.2 未來展望…………………………………………………………………...... 46
附錄A 接觸式微型熱電發電器………………………………………………….…. 48
A.1 研究動機………………………………………………….………………… 48
A.2 微型熱電發電器的設計 .………………………………………………….. 48
A.3 微型熱電發電器的模擬結果.……………………………………………… 49
A.4 接觸式微型熱電發電器的製作.……………………………………….…... 52
A.5 接觸式微型熱電發電器的量測.…………………………………….……... 56
參考文獻…………………………………..….……………………………………….. 59

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