臺灣博碩士論文加值系統

本研究利用標準0.18μm 1P6M CMOS製程製作微型熱電發電器，微型熱電發電器由129組熱電偶串聯構成，其中熱電偶為利用半導體製程中的多晶矽，分別摻雜硼離子與磷離子，形成p-type與n-type的多晶矽所組成。微型熱電發電器由塞貝克效應(Seebeck effect)原理可以得知，其輸出電壓取決於熱電偶數目、塞貝克係數差與溫度差。塞貝克係數差於標準製程中因摻雜濃度已固定，為了達到更高的效能，設計方向將為提高結構上的溫度差，因此於熱電偶熱端上方堆疊高熱傳導係數的金屬鋁板，增加上方熱源傳遞到熱電偶的速率，並披覆上奈米碳球，吸收外界的輻射熱源，並利用RIE (Reactive-Ion Etching)將熱電偶熱端下方的矽基材掏空，以低熱傳導率的空氣將熱能保留於空腔，防止熱能迅速從下方的矽基材散失；熱電偶冷端上方則包覆低熱傳導係數的二氧化矽層，降低上方熱能傳遞到熱電偶的速率，使熱電偶冷熱端形成溫度差。利用ANSYS Workbench有限元素軟體，模擬各種熱電偶尺寸所構成的多個微型熱電發電器，其在接受固定熱源時，熱電偶的尺寸對於冷熱端溫度差的影響，同時計算熱電偶的內電阻，得到單位面積下最佳輸出功率的尺寸，並探討微型熱電發電器在接受不同的環境熱能時，其結構內部的溫度分佈與溫度梯度變化。實驗量測結果顯示，於620 K的熱源溫度下，未披覆奈米碳球的微型熱電發電器，產生的輸出電壓與輸出功率分別為4.426 mV與224.6 pW；而披覆奈米碳球薄膜後的微型熱電發電器，其輸出電壓與輸出功率分別提升至5.845 mV和391.7 pW。微型熱電發電器的電壓因子和功率因子分別為0.882 mV/K/mm2和13.686 pW/K2/mm2。

In this study, we present a thermoelectric microgenerator fabricated using the standard 0.18 μm CMOS (complementary metal oxide semiconductor) process are investigated. The thermoelectric microgenerator consists of 129 thermocouples in series, and the thermocouples are composed of p-type and n-type polysilicons. The output power of microgenerator relies on the temperature difference between the hot and cold parts of thermocouples. To increase the temperature difference of thermocouples, the hot part of thermocouples is designed as the suspended structure. Then, the hot part of the thermocouples is coated by CNCs (Carbon nanocapsules) that increasing absorb radiant heat source. The cold part of thermocouples is formed on the silicon substrate, and covered by silicon oxide that provides low thermal conductivity and thermal isolation. The FEM (finite element method) software of ANSYS Workbench is employed to simulate the temperature distribution and temperature difference of the thermoelectric microgenerator, and analyzed the optimal geometry of the thermocouples. The experimental results showed that the output voltage and output power of the microgenerator without CNCs film were 4.426 mV, and 224.65 pW, respectively, at the temperature difference of 3.6 K. The output voltage and output power of the microgenerator with CNCs film were 5.845 mV and 391.789 pW, respectively, at the temperature difference of 4.3 K. The microgenerator had the voltage factor of 0.882 mV/k/mm2 and the power factor of 13.686 pW/K2/mm2.

第一章 緒論﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍ 1
1.1 前言﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍ 1
1.2 文獻回顧﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍ 2
1.3 研究動機﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍ 5
第二章 微型熱電發電器的設計﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍ 6
2.1 熱電效應﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍ 6
2.2 微型熱電發電器的原理﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍ 7
2.3 微型熱電發電器的的結構設計﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍ 9
2.4 微型熱電發電器的性能分析﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍11
2.5 微型熱電發電器的熱傳模擬分析﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍13
2.6 溫度計的性能分析﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍19
第三章 吸熱薄膜的製作﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍20
3.1 奈米碳球的簡介﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍20
3.2 奈米碳球薄膜的製作﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍23
3.3 奈米碳球的檢測﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍25
3.4 奈米碳球的吸熱性能分析﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍27
第四章 整合型微型熱電發電器的製作﹍﹍﹍﹍﹍﹍﹍﹍﹍32
4.1 微型熱電發電器的佈局﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍32
4.2 整合型熱電發電器的製作和後處理﹍﹍﹍﹍﹍﹍﹍﹍﹍33
4.3 結果與討論﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍35
第五章 量測結果與討論﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍40
5.1 量測架構與流程﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍40
5.2 微型熱電發電器的性能測試﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍42
5.3 微型熱電發電器性能比較﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍50
第六章 結論與未來展望﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍51
6.1 結論﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍51
6.2 未來展望﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍52
附錄A 接觸式微型熱電發電器﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍53
A.1 研究動機﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍53
A.2 接觸式微型熱電發電器的設計﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍53
A.3 接觸式微型熱電發電器的性能分析﹍﹍﹍﹍﹍﹍﹍﹍﹍54
A.4 接觸式微型熱電發電器的熱傳模擬﹍﹍﹍﹍﹍﹍﹍﹍﹍56
A.5 接觸式微型熱電發電器的製作﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍58
A.6 接觸式微型熱電發電器的量測﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍﹍62
附錄B 模擬與計算微型熱電發電器之熱電偶尺寸﹍﹍﹍﹍﹍67
附錄C 模擬與計算接觸式微型熱電發電器之熱電偶尺寸﹍﹍70
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