臺灣博碩士論文加值系統

本論文利用奈米球微影術結合反應離子蝕刻，接著以熱蒸鍍分別製作出銀奈米陣列結構與修飾奈米顆粒銀奈米陣列結構。
實驗中以AFM與SEM影像觀察基板表面形貌，並以拉曼量測與吸收量測分析基板特性。再鍍上20nm SiO2 作為隔絕層，最後分別鍍上三種不同染料DCJTB、ADN、Alq3，分別放出紅、藍、綠三種光，研究修飾奈米顆粒銀奈米陣列結構與銀奈米陣列結構其光激發螢光與時間解析光激發螢光影響。
我們觀察到DCJTB、Alq3的PL強度與染料鍍於玻璃基板上分別增強為32.68倍和5.719倍而ADN 減弱為0.788倍，發光生命期也分別減少0.235ns、0.194 ns和2.491 ns，而修飾奈米顆粒與未修飾奈米顆粒基板相比有修飾奈米顆粒螢光強度分別增強分別為1.25倍、1倍和1.31倍，發光生命期分別減少0.049ns、0.041ns和0.87ns。
我們證明了修飾奈米顆粒之銀奈米尖錐陣列其局部表面電漿共振提高與螢光分子的震盪強度,故使其PL強度提高。

In this study, we fabricated periodic silver nanostructures by using nanosphere lithography (NSL) combined with reactive ion etching (RIE) and then using thermal evaporation decorate with nanoparticles on periodic silver nanostructures substrate.
In experimental,we use AFM and SEM to observed substrate topography,examine the characteristics of substrate by UV-vis and Raman measurements.A 20nm thick Sio2 is also deposited on the substrate as a buffer layer. Finally, we deposit a 75 nm fluorescent dye on the substrate for measure photoluminescence and time-resolve photoluminescence.Three different fluorescent materials are used separately: DCJTB、ADN、Alq3, which emits red, blue and green light respectively after excitation.
We observed the PL intensity of DCJTB、Alq3 was increased about 32.68 and 5.719 times but ADN was decreased 0.788 , and the lifetime could be shortened about 0.235、0.194 and 2.491 ns. Silver nanoparticle array decorated with nanoparticle substrate compared with silver nanoparticle array, the PL intensity of DCJTB、ADN、Alq3 was increased about 1.25、1、1.31 times, and the lifetime could be shortened about 0.049、0.041 and 0.87 ns.
We demonstrated that silver nanoparticle array decorated with nanoparticle
its local surface plasmon resonance vibration strength increases with fluorescent molecules, so its PL intensity increased.

摘要 I
Abstract II
目錄 III
圖目錄 VII
表目錄 XIII
第一章 序論 1
1-1 前言 1
1-2 金屬增強螢光簡介 1
1-3 表面電漿子簡介 1
1-4 研究動機與目的 2
第二章 理論 3
2-1 金屬與介電質介面的表面電漿模態 3
2-2 表面電漿子的色散關係式 4
2-3 局部表面電漿共振 9
2-4 螢光物質與金屬表面關係 11
2-5 提昇量子效率與電漿耦合激發 13
2-6 金屬表面電漿之激發 15
2-7 奈米球微影術結合反應離子蝕刻技術 17
2-8 拉曼散射理論 18
第三章 樣品製備與實驗方法 19
3-1 樣品製備 19
3-1-1 基板清洗 19
3-1-2 藥品配置 19
3-1-3 奈米球塗佈 20
3-1-4 蝕刻 22
3-1-5 蒸鍍 24
3-1-6 舉離 26
3-1-7 製作隔絕層 26
3-1-8 蒸鍍有機染料 26
3-2 實驗方法 27
3-2-1 螢光簡介 27
3-2-2 光激發螢光光譜 28
3-2-3 光激發螢光之實驗架構 28
3-2-4 時間解析光激發螢光光譜 29
3-2-5 時間解析光激發螢光之實驗架構 30
3-2-6 掃描式電子顯微鏡 31
3-2-7 共焦拉曼顯微儀 32
第四章 實驗結果與討論 33
4-1 奈米銀尖錐陣列與銀奈米顆粒修飾銀奈米尖錐陣列製作 33
4-1-1 反應離子蝕刻結果 34
4-1-2 奈米銀尖錐陣列與銀奈米顆粒修飾銀奈米尖錐陣列製作結果 35
4-2 奈米銀尖錐陣列與銀奈米顆粒修飾銀奈米尖錐陣列之反射率穿透率及吸收率43
4-3 奈米銀尖錐陣列與銀奈米顆粒修飾銀奈米尖錐陣列之拉曼光譜 45
4-4 奈米銀尖錐陣列與銀奈米顆粒修飾銀奈米尖錐陣列之光激發螢光光譜 48
4-4-1 DCJTB 之光激發螢光量測 49
4-4-2 ADN 之光激發螢光量測 52
4-4-3 Alq3之光激發螢光量測 55
4-5 奈米銀尖錐陣列與銀奈米顆粒修飾銀奈米尖錐陣列時間解析光激發螢光光譜 58
4-5-1 DCJTB之時間解析光激發螢光量測 59
4-5-2 ADN之時間解析光激發螢光量測 63
4-5-3 Alq3之時間解析光激發螢光量測 67
第五章 結論 71
參考文獻 72

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