臺灣博碩士論文加值系統

從許多文獻中得知超導量子干涉元件對磁場具有極高的靈敏度，可當作磁場對電壓輸出的轉換元件，本篇論文是以高溫超導釔鋇銅氧、磁控濺鍍系統、黃光微影製程、乾式濕式蝕刻以及10 mm×10 mm雙晶基板SrTiO3，在晶界上產生類似絕緣層的S-I-S穿隧機制，製作出具有高靈敏度的超導量子干涉元件，元件有效面積約為0.14 mm2，在77 K的時候觀察到此時超導量子干涉元件具有約10μΦ0/Hz1/2和14μΦ0/Hz1/2左右的磁通雜訊在1 KHz，換算後得到SB1/2約為147 fT/Hz1/2和207 fT/Hz1/2

From past literature we know superconductor quantum interference device (SQUID) is the most sensitive to detect magnetic field in the world. It can be use as a voltage-flux transfer device. Here we grow high temperature superconductor YBa2Cu3O7-x thin film on bicrystal substrate by magnetron sputter system, and use photolithography, ion milling, and wet etching to fabricate our SQUID.After that we measure R-T, I-V and V-T data at 77 K. Finally, a flux noise of approximately 10μΦ0/Hz1/2 and 14μΦ0/Hz1/2at 77 K at 1kHz has been archived, from which calculate the magnetic field sensitivity of 147 fT/Hz1/2 and 207 fT/Hz1/2 is available.

第一章 序論...............................................1
第二章 理論背景............................................
2-1 Josephson junction簡介..........................4
2-2 SQUID介紹....................................7
2-3超導量子干涉元件工作原理........................9
2-4 超導量子干涉元件的雜訊........................12
第三章 元件製作方式........................................
3-1準備基板.......................................15
3-2 濺鍍釔鋇銅氧薄膜..............................16
3-3鍍金電極.......................................18
3-4微影製程.......................................20
3-5光阻塗佈.......................................20
3-6 軟烤..........................................22
3-7黃光微影製程...................................23
3-8 LED背光源....................................25
3-9蝕刻製程.......................................28
3-10 去光阻.......................................31
3-11實驗總流程圖..................................32
第四章 實驗................................................
4-1四點量測.......................................36
4-2 量測棒........................................37
4-3 變溫量測......................................39
4-4 PCI-1000......................................41
第五章 結果與討論..........................................
5-1電阻隨溫度關係 (R-T)..........................43
5-2 電壓隨電流關係曲線 (I-V)......................45
5-3 臨界電流隨溫度的變化..........................46
5-4 電壓隨磁通變化................................50
5-5 雜訊頻譜分析..................................53
第六章 結論..............................................56
參考文獻..........................................57

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