臺灣博碩士論文加值系統

本研究主要是設計並利用微機電製程技術製作微流體晶片。本文分為兩部分：第一部份稱為微粒子流動操控晶片，第二部分稱為微流體聚焦晶片。微粒子流動操控晶片之工作原理為在一直微管道中鍍一對微電極，施以電場以產生一與壓力驅動流反向之電滲效應，由於此效應在微電極間壁面所產生之流體流動方向與壓力驅動流反向，為了滿足質量守恆，電極間管道壁面將產生迴流區，此迴流區域之大小將隨著電滲效應之增強而變大，而迴流區之增大將使得壓力驅動流體流經此電極間時受到擠壓而造成流體加速之效果，而通過此區域之微粒子之速度也將加速，本研究即利用各粒子加速先後之時間差在此區域進行微粒子之流動操控。實驗結果顯示，微粒子在單純的壓力驅動流中，兩顆微粒子彼此之間的距離很短的情形下，通過一具有迴流現象之區域時，因流體加速之關係，造成彼此間之距離將被增加，此局部區域微粒子分離效果對於光學偵測將有所助益。
第二部分微流體聚焦晶片之原理乃是以壓力作為驅動力，利用分層管道之結構達到微流體在微管道中的三維聚焦。利用微機電製程技術所製作之微流體晶片大多屬於平片結構，因此其對微管道中之流體及微粒可以有良好的二維（x-y平面）聚焦效應。但微粒於第三維方向（z方向）上，仍是自由分佈，因此造成流式細胞儀之偵測有些許誤差。本研究提出一種創新晶片，先利用上下兩層之側管道控制流體在z方向之聚焦，再由兩側邊鞘流做一平面之聚焦，以達成三維聚焦。實驗結果顯示，在低雷諾數下，微流體能藉由控制各邊鞘流之流速，使樣品流聚焦在管道中間位置。

In this study, we design and fabricate a novel microfluidic device for particle separation by MEMS technology. The mechanism is to utilized combined pressure-driven and electroosmotic force. In the straight channel, we used high-vacuum e-beam evaporator to deposit Pt/Cr electrode and apply an electric field opposite to the direction of the pressure-driven flow. Because of conservation of mass, the flow will form a recirculation zone between the two electrode. The size of this zone will be direct proportion to the strength of the electric field. Utilizing the recirculation zone to compress cross-section area and to accelerate particles passing through the recirculation zone. Because particles are accelerated at different time, particles will separate from each other. Experimental results show when the two particles pass through the recirculation zone, because they are accelerated at different time, their separation distance will increase.
The second part of this study, we use two layers channels by hydrodynamics forces to achieve 3-dimensional focusing chip. In microfluidic chip, it’s easy to achieve 2-dimensional focusing but appreciable errors could occur if the flow is randomly distributed in the z direction. In this study, a 3-D focusing microchip is demonstrated using the combination of two layers channel and hydrodynamics forces. Upper and lower sheath flows focus the sample flow in z direction and the others two sheath flows in the side channels focus the pre-focused sample flow in the x-y plane. Experimental results show sample flow will focus in center of the channel by controlling flow rate ratio of sheath flow under suitable Reynolds number.

中 文 摘 要 I
英 文 摘 要 III
誌 謝 V
目 錄 VI
表 目 錄 X
圖 目 錄 XI
符號說明 XIV
第一章、緒論 1
1-1 前言 1
1-2 微機電系統 1
1-3 生醫晶片 3
1-4 微陣列型晶片 3
1-5 微流體晶片 4
1-6 研究動機 6
1-7 本文架構 6
第二章、基礎理論 8
2-1 電雙層 8
2-2 電滲流 10
2-3 壓力驅動流結合電滲效應 11
2-4 電解 12
2-5 法拉第電解定律 13
2-6 水的電解 15
第三章、晶片製作 16
3-1 光罩製作 16
3-2 晶片製作 16
3-2-1 玻璃微流道製程 17
3-2-1-1 晶片清洗 18
3-2-1-2 光阻塗佈 18
3-2-1-3 曝光 19
3-2-1-4 顯影 19
3-2-1-5 蝕刻 19
3-2-1-6 光阻去除 20
3-2-2 PDMS微管道製程 21
3-2-2-1 母模製程 21
3-2-2-2 翻模製程 22
3-2-2-3接合及對位 23
3-2-3 微電極製程 23
3-2-3-1 晶片清洗 23
3-2-3-2 微影製程 24
3-2-3-3 金屬蒸鍍 24
3-2-3-4 掀去法（Lift-off） 25
3-2-4 鑽孔 26
3-2-5 對位接合 26
第四章、微流體晶片內微粒子之流動操控 27
4-1 文獻回顧 27
4-2 實驗設備裝置 30
4-2-1 顯微鏡 30
4-2-2 影像擷取單元（CCD） 30
4-2-3電源供應器 31
4-2-4 針筒式微量注射幫浦（Syringe Pump） 31
4-3 電解現象之實驗 32
4-3-1 晶片設計與尺寸 32
4-3-2 實驗方法 32
4-3-3 電解實驗之結果與討論 33
4-4 迴流區視覺化之實驗 35
4-4-1 晶片設計與尺寸 35
4-4-2 實驗方法 36
4-4-3 迴流區實驗之結果與討論： 37
4-5 微粒子流動操控 39
4-5-1 晶片設計與尺寸 39
4-5-2 實驗方法 39
4-5-3 微粒子流動操控實驗之結果與討論 41
第五章、壓力驅動式之微流體三維聚焦 48
5-1 文獻回顧： 48
5-2 晶片測試結果與討論： 51
5-2-1 晶片設計與尺寸： 51
5-2-2 結果與討論： 52
第六章、結論與及未來展望 54
6-1 結論 54
6-2 未來展望 55
參考文獻 57
自 述 93

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