臺灣博碩士論文加值系統

大面積的軟性壓力感測器陣列元件可用於機器人、人體或是非平坦的表面，也應用在汽車電子與醫療領域。這種巨形電子元件是由許多東西組合而成的：包含可撓性基板、感測器的陣列以及驅動用的電晶體陣列。
本論文旨在發展一種可撓性壓力感測陣列元件，藉由有機垂直二極體整合壓力感測器，完成可撓性壓力感測陣列元件，其中，溶液製程的有機二極體元件，透過材料的選擇與製程優化，其開關比高達73256，可作14MHz高頻操作，並且具備air-stable特性，解決有機半導體在大氣環境受水氧劣化元件的缺點。壓力感測器使用軟性基板、網印銀膠與高分子導電複合材作為元件組成，透過製程的使得電導與壓力成正比，改善減低感測器飄移(drift)與遲滯現象(hysteresis)，感測器的反應時間(response time)僅150us。
最後將二極體與壓力感測器整合成可撓性的陣列元件，當壓力越大感測器電阻越小，量測系統得到的電壓越大，將二極體逆向偏壓，量測系統的電壓不隨感測器變化，二極體具限流作用，使得此陣列元件比一般被動式陣列省電且精準。

Large area of flexible pressure sensor array can be used in robot, human body or non-flat surface, also used in automotive electronics and medical fields. These macro-electronics is composed of many layers including flexible substrates, sensor array and the driving transistor array.
This dissertation aims to develop a flexible pressure sensor array by integrating an organic vertical diode named polymer space-charge-limited diode with a pressure sensitive sensor. Solution process of the organic vertical diode, through material selection and process optimization, the on/off ratio is increased as high as 73 256. It can be used for 14MHz high-frequency operation, and have air-stable features. Pressure sensor is composed of many layers including flexible substrates, silver conductive adhesive paste and polymer composites. Through the manufacturing process optimization makes the conductance is proportional to pressure and reduces the sensor drift and hysteresis. The response time of sensor device is only 150us.
Finally, combine pressure sensor and diode into a flexible array, the smaller resistance when the pressure is greater. When the diode in reverse bias, the voltage of measurement system is independent of the resistance of sensor. Diodes with current-limiting effect, making this array is more accurate and more energy-saving than usual passive sensor array.

目錄
中文摘要
英文摘要
致謝
目錄
第一章 序論
1-1 前言
1-2 壓阻式壓力感測器文獻回顧
1-3 研究動機
1-4 論文架構
第二章 相關理論介紹
2-1 可撓性壓阻式感測陣列
2-1-1 壓阻層導電機制
2-1-2 壓阻式感測器結構與導電原理
2-2 有機垂直式二極體
2-2-1 操作方式
2-2-2 金屬半導體接面
2-2-3 有機高分子材料簡介
2-2-4 有機共軛高分子載子傳輸理論
第三章 實驗設計與元件製程
3-1 實驗設計與構想
3-2 壓力感測器製作流程
3-2-1 電極製作
3-2-2 壓阻層製作
3-2-3 元件製程
3-3 有機垂直式二極體製
3-3-1 Au電極濺鍍於PEN基板
3-3-2 PEDOT:PSS成膜
3-3-3主動區成膜
3-3-4蕭基接觸電極蒸鍍
3-4 壓力感測器與二極體整合陣列製程
3-4-1二極體陣列製程
3-4-2絕緣層PVP成膜
3-4-3 Contact via hole製程
3-4-4感測器下電極蒸鍍
3-4-5上半部壓阻元件製作
3-4-6上下元件對貼
3-5 量測
3-5-1 壓力感測器電性量測
3-5-2 二極體電性量測
3-5-3 整合元件之量測
第四章 實驗結果與分析
4-1 有機垂直式二極體
4-1-1 有機垂直式二極體基本電性
4-1-2 二極體高頻操作特性
4-1-3 無封裝大氣下的Lifetime
4-2 壓力感測器
4-2-1 壓力感測器基本電性
4-2-2 壓力感測器之反應時間
4-3 有機垂直式二極體與壓力感測器整合元件
4-4 二極體與感測器整合陣列(3×3
4-5 ICP-RIE via hole製程對二極體陣列之影響
第五章 總結與未來展望
參考文獻

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