臺灣博碩士論文加值系統

本研究提供一個可以在塗布沸石薄膜的同時，控制其自組裝以及晶面方向的通用方法。這個方法藉由界面活性劑的誘導沸石奈米顆粒的自組裝行為，在薄膜塗布過程中創造出大範圍規律的圓柱形圖案，並且能準確控制此圓形圖案之大小與深度。同時，利用此方法製備而成的沸石薄膜，其顆粒中之｛100｝晶面平行於基材。為了深入了解利用界面活性劑控制沸石奈米顆粒的自組裝機制，我們使用了光學顯微鏡，在加熱平台上即時觀察在不同沸石塗布溶液對於溫度之變化。從此實驗中我們觀察到界面活性劑在溫度上升時形成微胞（micelle）、在溫度下降時則和沸石水溶液形成一均一相。界面活性劑的微胞在高溫燒結後，便可能形成在沸石薄膜中所觀察到的圓形圖案。最後，我們量測各個薄膜樣品的光學霧度和介電常數。我們發現沸石薄膜中的圓形圖案大小，能夠有效調控薄膜介電常數與光學霧度。

This paper reports on a generalized method by which to simultaneously manipulate the self-assembly and orientation of zeolite LTA nanocrystals. This process, referred to as surfactant-mediated self-assembly (SMSA), creates zeolite LTA thin films with long-range ordered cylindrical patterns, wherein the {100} faces of zeolite LTA crystals are preferably oriented parallel to the support surface. This approach makes it possible to control the diameter as well as the depth of the cylindrical patterns in zeolite thin films fabricated via scalable wet deposition. To elucidate the mechanism underlying the SMSA process, we applied in situ imaging to cast solutions subjected to a temperature swing. Our results indicate that the cylindrical patterns may develop from micelles of the surfactant, which make up a thermodynamic phase in the cast solution. We also demonstrate that the apparent dielectric constant and optical haze of the zeolite LTA thin films can be engineered by altering the dimensions of the cylindrical patterns.

誌謝 i
摘要 ii
Abstract iii
Contents iv
List of Figures vi
Chapter 1 Introduction 1
1.1 Background 1
1.2 Patterned Thin Film 5
Chapter 2 Method 8
2.1 Materials 8
2.2 Synthesis of zeolite LTA cast solution 8
2.3 Deposition of zeolite LTA thin films 12
2.4 Surface modification of zeolite LTA thin films 17
2.5 Material Characterization 17
Chapter 3 Results and Discussion 20
3.1 Morphology of Zeolite Thin Films 20
3.2 Crystallinity of Zeolitem LTA Thin Films 24
3.3 Effects of Surfactant concentration 29
3.4 Effects of Spin coating speed 35
3.5 Effects of Substrate hydrophilicity 38
3.6 Formation of Patterns in LTA thin film 45
3.7 Electrical properties of LTA thin film 49
3.8 Optical properties of LTA thin film 52
Chapter 4
Conclusions 54
Appendix 55
References 59

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