臺灣博碩士論文加值系統

離子性高分子金屬複合材料(IPMC)可以在低電壓下驅動且獲得大幅的形變量，反射式方法有折疊光路的優點因此被用在輕薄的變焦系統中， 應用在光學變焦系統中的IPMC可形變面鏡可以透過電壓改變其屈光度。聚二甲基矽氧烷（PDMS）用來作為緩衝層以改善表面粗糙度，而PDMS的表面粗糙度約為17奈米，在3福特的電壓下，IPMC可形變面鏡的屈光度可達73.8 m-1 ，我們製造了一個全反射式的相機模組，並利用兩個IPMC可形變面射鏡來達到縮放功能。縮放比約為1.6倍。

Ionic polymer metal composite (IPMC) can be operated at low voltage and get large deformation. The reflective method is utilized in thin zoom system for the advantage of folded optical path. IPMC deformable mirror which used in reflective zoom system can change its optical power by bias voltage. Polydimethylsiloxane (PDMS) is used as the buffer layer to improve surface roughness. The surface roughness of PDMS layer is about 17 nm. Optical power of IPMC deformable mirror can reach to 73.8 m-1 diopter by 3 V. We fabricate the total reflective camera module and use two IPMC deformable mirrors to achieve zoom function. The zoom ratio is about 1.6 times.

CONTENTS
CONTENTS i
LIST OF FIGURES ii
LIST OF TABLES v
中文摘要 vi
ABSTRACT vii
Chapter 1 Introduction 1
1.1 Introduction 1
1.2 Ionic polymer metallic composite 3
1.3 Deformable mirror 8
1.4 Liquid deformable mirror 10
1.5 MEMS deformable mirror 13
1.6 Design the IPMC deformable mirror 15
1.7 Design concept 17
Chapter 2 Fabrication 19
2.1 Fabrication 19
2.2 Conventional IPMC fabrication process 20
2.3 Surface improved patterned IPMC deformable mirror 27
Chapter 3 Simulation Results 31
3.1 Optical zoom system design by deformable mirror 31
3.2 Reflective optical zoom system layout 32
3.3 Simulation result 34
3.4 Aberration 39
Chapter 4 Experiment Result 41
4.1 Surface resistance 41
4.2 Surface roughness 43
4.3 The measurement of reflectivity 47
4.4 Center displacement results 52
4.5 Response time 58
4.6 Optical zoom module 60
4.7 Zooming experiment 62
Chapter 5 Conclusion 64
Reference. 66

Reference
1.B. Berge, "Liquid lens technology: principle of electrowetting based lenses and applications to imaging," in Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on(2005), pp. 227-230.
2.N. N. Sia and C. W. Thomas, "Ionomeric Polymer-Metal Composites," University of California, San Diego.
3.M. Shahinpoor, Y. Bar-Cohen, J. O. Simpson, and J. Smith, "Ionic polymer-metal composites (IPMCs) as biomimetic sensors, actuators and artificial muscles - a review," Smart Materials & Structures 7, R15-R30 (1998).
4.C. C. Yeh, and W. P. Shih, "Effects of water content on the actuation performance of ionic polymer-metal composites," Smart Materials & Structures 19 (2010).
5.M. Shahinpoor, and K. J. Kim, "The effect of surface-electrode resistance on the performance of ionic polymer-metal composite (IPMIC) artificial muscles," Smart Materials & Structures 9, 543-551 (2000).
6.B. Bhandari, G. Y. Lee, and S. H. Ahn, "A Review on IPMC Material as Actuators and Sensors: Fabrications, Characteristics and Applications," Int J Precis Eng Man 13, 141-163 (2012).
7.S. Tadokoro. R. Kanno, T. Takamori, and K. Oguro, "3-dimensional dynamic model of ionic conducting polymer gel film (ICPF) actuator," in Systems, Man, and Cybernetics, 1996., IEEE International Conference on(1996), pp. 2179-2184 vol.2173.
8.J. L. Wang, T. Y. Chen, Y. H. Chien, and G. D. J. Su, "Miniature optical autofocus camera by micromachined fluoropolymer deformable mirror," Opt Express 17, 6268-6274 (2009).
9.B. C. Phil McKinley, Charles Ofria, ,Robert Pennock, " Testbed for Evolving Adaptive and Cooperative Behavior Among Autonomous Systems" ,NSF-CNS.
10.K. Abdelnour, "Smart Materials and Structures, Underwater Robotics," (2009).
11.Y.-H. Huang, "Thin zoom camera module by a large-stroke micromachined Polydimethylsiloxane deformable mirror," National Taiwan University (2012).
12.K. J. Kim, and M. Shahinpoor, "Ionic polymer-metal composites: II. Manufacturing techniques," Smart Materials & Structures 12, 65-79 (2003).
13.L. S. a. T. Mukaia, "Anisotropic surface roughness enhances bending response of ionic polymer- metal composite (IPMC) artificial muscles," Proc. SPIE 6413, 641302 (2006).
14.S.-A. Tsai, "Research of Improved the surface Roughness of IPMC by Using PDMS and Its Application in Deformable Mirror," National Taiwan University (2012).
15.S.-H. Lee, "Performance Enhancement of IPMC by anisotropic Plasma etching process," Electroactive Polymer Actuators and Devices (EAPAD) (2009).
16.M. S. a. K. J. Kim, "Effects of counter-ions on the performance of IPMCs," Proc. SPIE 3987, Smart Structures and Materials 2000: Electroactive Polymer Actuators and Devices (EAPAD), 110 (June 7, 2000).
17.W. H. Choy, "STUDY ON FABRICATION AND PERFORMANCE OF IPMCS (IONIC POLYMER-METAL COMPOSITES)," THE HONG KONG POLYTECHNIC UNIVERSITY ( 2010).
18.Z. Chen, and X. B. Tan, "Monolithic fabrication of ionic polymer-metal composite actuators capable of complex deformation," Sensor Actuat a-Phys 157, 246-257 (2010).
19.H.Gross, "Correction of aberration," Handbook of Optical system, Vol.3, p.217, WILEY-VHC Verlag GmbH& Co.KGaA, Germany ( 2007).
20.H. W. Ren, D. W. Fox, B. Wu, and S. T. Wu, "Liquid crystal lens with large focal length tunability and low operating voltage," Opt Express 15, 11328-11335 (2007).
21.M. Bathaee, C. Andrian-Albescu, D. Nicolae, Z. Moustoufi, and H. Ghezel, "A full CMOS adaptive 3.3V/5V supply VCM/spindle controller with 9mA total current consumption in lock mode for high TPI and RPM of 8200 for 1" micro-drive, 1.8" drive, and 2.5" drive," in Electronics, Circuits and Systems, 2002. 9th International Conference on(2002), pp. 437-440 vol.432.