臺灣博碩士論文加值系統

本論文之目的為：在微機電製程技術中製作微小結構時，可以預先模擬分析以提供了解結構之動態行為，經證實數值可行後再應用於微機電結構以增進其開發效能、提高元件的工作準確度。可應用於加速規，雷子顯微鏡等產品內部。文中對多層結構受到強迫諧和振動的行為進行討論，分析考慮多層結構，其構成結構的幾何尺寸和材料係數都相同，而且構成的動態矩陣和形狀函數都可以用其他夾層的勁度矩陣和形狀函數來疊加。先行簡化物件結構模型，而且由於模型已經簡化則可以使用較多的元素數目來計算，並且積分點也可以較多，計算過程中可以充分準確的逼近結果，也可以縮短計算時間。所得分析結果可用來設計各種尺寸和不同強度的微機電結構。

目 錄
第一章緒論…………………………………………………….1
1.1前言………………………………………………………………..1
1.2研究動機…………………………………………………………..3
1.3實例介紹…………………………………………………………..9
1.4文獻回顧…………………………………………………………..15
第二章模態分析……………………………………………….18
2.1模態測試理論……………………………………………...……...18
2.2結構動態行為方程………………………………………………..22
2.3多層結構理論分析………………………………………………..25
2.4模型說明………………………………………………………..…33
第三章計算結果……………………………………………….35
3.1系統振動分析……………………………………………………..35
3.2矽的機械性質……………………………………………………..39
3.3多層結構動態分析………………………………………………..43
第四章微加速規實例………………………………………….52
4.1簡介……………………………………………………………….52
4.2說明……………………………………………………………….53
4.3分析結果………………………………………………………….55
第五章結語…………………………………………………….62
參考文獻………………………………………………………………64

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