臺灣博碩士論文加值系統

磁浮軸承是一種利用電磁力懸浮主軸的非接觸式軸承，其沒有磨擦問題，不會造成磨損與髒汙，且不需要潤滑與煩瑣的定期更換保養。除了延長使用壽命與提升效率外，更提高了運轉速度的極限與系統的潔淨度。磁浮軸承是透過位移感測器偵測主軸位置，進而控制磁浮力使主軸穩定懸浮。本論文針對磁浮軸承中較常使用的渦電流位置感測器進行研究，建立可信度較高的數學模型並實證之。
本論文將著重於渦電流位置感測器探頭的相關研究。透過文獻搜尋及有限元素模擬建立感測器探頭之數學模型，再以此數學模型為基礎透過粒子群優化法進行探頭的最佳化設計，最後實現之並與市售的渦電流位置感測器探頭做靜態性能比較，以建立完整的自主技術為目標宗旨。
本論文之渦電流位置感測器探頭是以電感的變化來表現位置的變化。針對量測出的探頭電感對位置變化之特性曲線圖，作詳細討論並求得位於0.5 mm處的探頭電感靈敏度為40 µH/mm，非線性度百分比為6.74%。且探頭之數學模型與實驗數據的平均誤差小於5%。

Magnetic bearing is a non-contact bearing which can levitate a rotating shaft by electromagnetic force. There are no frictions between bearing and shaft, so it will not has wear or dirt inside. Thus, there are no requirements for lubricating and maintaining. In addition to extending the using life and improving efficacy, also enhance the rotating speed and cleanliness of the AMB. The position of the shaft is detected by the position sensor, to help the controller levitate the rotating shaft in a stable condition. The major target of this research is to develop an eddy current position sensor probe, in addition to its mathematical model derived accordingly.
To build the mathematical model, firstly study the previous literature of eddy current position sensor probe and the effect of eddy current on the magnet field. Secondly, make a finite element simulation as the various positions to the various impedances of sensor probe. Lastly, an experimental setup is established to verify the efficacy of the eddy current position sensor probe, to verify how much credibility of the mathematical model.
An eddy current position sensor probe based on the PSO algorithm design is realized to verify the efficacy, its sensitivity at 0.5 mm is 40 µH/mm, and the nonlinearity is 6.74%. The average error of probe inductance between the mathematical model and the experiment is below 5%.

致謝 I
中文摘要 II
英文摘要 III
目錄 IV
圖目錄 VI
表目錄 IX
符號 X

第一章 緒論 1
1-1 前言 1
1-2 研究動機 5
1-3 文獻回顧 6
1-4 論文架構 7

第二章 研究目的及方法 8
2-1 渦電流位置感測器 9
2-2 粒子群優化法 11
第三章 渦電流位置感測器探頭之建模與分析 13
3-1 基礎磁路原理 13
3-2 靜態數學模型 15
3-3 有限元素模擬 24

第四章 渦電流位置感測器探頭之最佳化設計 32
4-1 渦電流位置感測器探頭之最佳化設計參數定義 32
4-2渦電流位置感測器探頭之最佳化結果 38

第五章 最佳化渦電流位置感測器探頭之實證 47
5-1 感測器之靈敏度及線性度定義 47
5-2 渦電流位置感測器探頭之特性曲線量測平台架構 50
5-3 渦電流位置感測器探頭之特性曲線量測結果與討論 56

第六章 結論與未來展望 77
6-1 結論 77
6-2 未來展望與建議 78
參考文獻 80

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