臺灣博碩士論文加值系統

Block copolymer (BCP) 由於有自組裝微相分離的特性，在近幾年受到廣泛的研究，它的製程方式大部分是利用旋轉塗佈的方式來製作，但是此方式並沒有辨法有效的去使它圖案化。本論文提出利用dip-pen nanofabrication (DPN) 的方式將BCP直接畫在基板上達到圖案化BCP的目的，同時探討所寫上之BCP奈米薄膜之微相分離。
本論文分成三部分做探討：(1)討論在DPN的製程中BCP如何傳遞到基板表面；(2)使薄膜均勻附著在基板上；(3)觀察薄膜的微相分離。對於第一部分，我們能從文獻得知一般DPN的水橋模型，而從本論文的實驗結果得知BCP是並不是經由水橋傳遞，因此我們提出了一個不同的假設，BCP是經由摩擦後產生熱能後，達到Tg點使BCP形成融膠狀態，因此能附著到基板上。
使薄膜均勻附著在基板上的部分，從畫在矽基板上以及預沾溼基板上的實驗結果得知，我們推測當BCP的內聚力大於BCP與基板之間交互作用時，就容易有成核的現象。因此我們將BCP畫在PMMA的基板表面，讓BCP跟PMMA基板有較強的交互作用，使BCP均勻的附著在基板表面，薄膜厚度大約在5 nm以下。
在觀察薄膜的微相分離的部分。而且我們在一次的實驗結果中發現有微相分離的產生，而文獻中提到當薄膜厚度在15 nm以下時不會有微相分離的產生，所以這樣的結果令我們驚奇。可惜實驗不是很穩定，這個結果沒有重覆性。

Block copolymer(BCP) can self assemble into micro phase separation, so BCP is researched popularly. The general fabrication is spin coating, but this method can’t make BCP patterning. We use Dip-pen Nanofabrication to make BCP patterning on the substrate. In the same time, we confer phase separation about the thin film of BCP.
The thesis separate into two parts. First we discuss how to transport BCP on the substrate. From experiment result in this thesis, we understand that BCP isn’t transported by water meniscus. We suppose the BCP obtain energy by frication and make the temperature to reach Tg, so BCP become melts.
In the second part, we write BCP on the substrate and make BCP film uniform. We write BCP on wafer or prewetted substrate in this experiment. We can find that BCP is easy to nucleate. We guess the reason is the effect of BCP cohesion is larger than the interaction between BCP and substrate. We write BCP on PMMA to make stronger interaction between BCP and PMMA. BCP film can be written uniformly on PMMA and the thikness is smaller then 5 nm.
In the final part we observe the micro phase separation. We find micro phase separation in one experiment. From literature review, there is no phase separation when thikness is smaller than 15 nm. This result is so surprised. It is too pity that experiment is unstable, the result has no repetition

摘要
Abstract
目錄
表目錄
圖目錄
第一章 緒論
1-1 研究動機與目的
1-2 研究方法
1-3 論文貢獻
1-4 論文架構
1-5 團聯共聚高分子的介紹
第二章 文獻回顧
2-1 DPN的簡介
2-2 DPN的機制
第三章 實驗結果與討論
3-1 實驗前的準備
3-1-1 實驗材料與調製溶液
3-1-2 AFM實驗參數的說明
3-1-3 實驗步驟
3-2 DPN傳輸BCP的機制
3-2-1 經由水橋傳遞實驗I
3-2-2 經由溶劑傳遞實驗
3-2-3 經由水橋傳遞實驗II
3-2-4 結果與討論
3-3 在矽基板的實驗結果
3-3-1 Scan rate的影響
3-3-2 畫線力量的影響
3-3-3 畫線密度的影響
3-3-4 預沾溼基板的影響
3-3-5 結果與討論
3-4 在PMMA基板的實驗結果
3-4-1 實驗設計
3-4-2 實驗結果
3-4-3 結果與討論
3-5 使BCP的薄膜微相分離的實驗
3-5-1 實驗設計
3-5-2 實驗結果
3-5-3 結果與討論
第四章 結論及未來工作
4-1 結論
4-2 未來工作
參考文獻
附錄

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