臺灣博碩士論文加值系統

本研究主要探討鑭鍶鈷系鈣鈦礦結構薄膜對CO的感測特性，分別以浸鍍法及RF濺鍍法兩種製程製備薄膜，而RF濺鍍薄膜隨後並施以不同的熱處理溫度做比較。並以Ni取代B位置的Co，形成置換型鈣鈦礦結構固溶體，以探討添加Ni原子對CO感測特性的變化。
根據實驗結果，兩種製程的La0.8Sr0.2Co1-xNixO3薄膜在0≦x≦0.6皆呈單一的鈣鈦礦結構，而且皆有相當程度的氧空缺。以RF濺鍍的初鍍膜會有(012)面方向性的成長。而La0.8Sr0.2Co1-xNixO3薄膜靈敏值的變化來自於表面CO與吸附氧的反應，添加Ni可以使表面的CO氧化反應的活化能障變小，以致反應速率與回復速率增加而提高感測CO的速率，同時亦可使靈敏值增加。浸鍍薄膜在x = 0.5時可得最快的感測速率與最大的靈敏值(約14.5 %)，而RF濺鍍薄膜則在x = 0.4，700℃熱處理5小時可得最大之靈敏值(約11.8 %)。此外水蒸氣與CH4的存在皆會影響薄膜對CO的感測。水蒸氣的存在有助於CO的感測，也可提高靈敏值；而CH4則會干擾CO的感測，其中以RF濺鍍薄膜的干擾較大。
另外，浸鍍薄膜因結構鬆散，表面有較大的反應面積，因此靈敏值會比RF濺鍍薄膜高，且浸鍍的製程對CO的操作溫度為180 ~ 200℃也比RF濺鍍薄膜的250℃低。

This study presents the sensing properties to CO of the La-Sr-Co based perovskite structure films. The films prepared by dipping and RF sputtering method. The as-deposited films by RF were subsequently heat-treated at different temperatures for comparison. In addition, Co ions were replaced by Ni ions at B-site to form the substitutional solution without demolished the perovskite structure. The influence of the Ni doped films to the sensing properties were studied.
From the results of experimental, the La0.8Sr0.2Co1-xNixO3 film, prepared by these two deposition methods both revealed single perovskite phase in the range of 0≦x≦0.6 and showed a large extent oxygen deficiency. In the RF sputtering method, the as-deposited films showed prefer orientation in (012) face. The changing of sensitivity rely on the oxidation of CO and adsorbed oxygen of the film surface. Doping Ni can lower the activation energy of the CO oxidation. This can elevate the reaction and the recovery rates, and enhance the sensing parameter to CO, the sensitivity was also increased. For the La0.8Sr0.2Co1-xNixO3 film prepared by dipping method, the best reaction rate and maximum sensitivity (14.5 %) were obtained at x = 0.5. However, in RF sputtering method, the maximum sensitivity (11.8 %) was obtained for the film treated at 700℃ for 5 hours at x = 0.4. The sensing properties to CO were influenced by the humid and CH4. The existence of humid can enhance the sensitivity to CO, but the appearance of CH4 will decrease the sensitivity to CO, especially for the RF sputtering method.
In addition, the dipped film possess the porous structure, resulting a larger surface area, so sensitivity was higher than that of the RF sputtering film. The film prepared by dipping method also has a lower operating temperature of 180 ~ 200℃ than that of the RF sputtering film (250℃).

封面
中文摘要
英文摘要
目錄
圖目錄
表目錄
符號說明
第一章 前言
1-1 簡介
1-2 研究動機
第二章 文獻回顧
2-1 二氧化錫(SnO )
2-1-1 SnO 的性質及其感測原理
2-1-2 SnO 的薄膜製程
2-2 影響感測性質的因素
2-2-1 添加金屬元素對SnO 性質的影響
2-2-2 降低晶粒尺寸
2-3 氧化鋅(ZnO)
2-3-1 ZnO 之感測原理
2-3-2 添加元素對ZnO感測性質的影響
2-4 其他氣體感測材料
2-5 鈣鈦礦結構材料
第三章 相關理論
3-1 吸附理論
3-1-1 物理化吸附
3-1-2 化學性吸附
3-2 催化(Catalysis)
3-3 表面電荷層(surface space charge layers)
3-4 電導型氣體感測器的感測原理
3-4-1 晶界能障模式
3-4-2 表面電導模式
3-4-3 氧離子陷阱模式
3-5 鈣鈦礦之結晶結構
3-5-1 鈣鈦礦之結構
3-5-2 鈣鈦礦之形成
第四章 實驗方法
4-1 浸鍍實驗流程
4-2 浸鍍溶液的配製
4-3 基板的準備
4-3-1 矽基板的裁製
4-3-2 基板清洗
4-4 薄膜的浸鍍
4-5 薄膜的濺鍍
4-5-1 靶材製作
4-5-2 粉末調配
4-5-3 靶的製作
4-5-4 濺鍍步驟
4-6 熱處理
4-7 基本性質測試
4-7-1 薄膜厚度測定
4-7-2 成份分析
4-8 晶體結構分析
4-8-1 XRD結構分析
4-8-2 掃描式電子顯微鏡觀察(SEM)
4-8-3 穿透式電子顯微鏡觀察(TEM)
4-9 電極之製作
4-10 電性之量測
4-10-1 電阻之量測
4-10-2 露敏值之量測
第五章 結果與討論
5-1 浸鍍薄膜
5-1-1 薄膜厚度
5-1-2 成份分析
5-1-3 X光繞射分析
5-1-4 浸鍍薄膜的電性測試
5-1-5 浸鍍薄膜對CO的感測特性
5-1-6 添加Ni對CO感測特性的影響
5-1-7 溫度對CO感測特性的影響
5-1-8 浸鍍薄膜與CO濃度的關係
5-1-9 燒結時間對La Sr Co Ni O 浸鍍薄膜的影響
5-1-10 La Sr Co Ni O 浸鍍薄膜的使用壽命
5-1-11 水蒸氣對La Sr Co Ni O 浸鍍薄膜CO感測的影響
5-1-12 CH 對 La Sr Co Ni O 浸鍍薄膜CO感測的影響
5-2 RF濺鍍
5-2-1 薄膜厚度
5-2-2 RF濺鍍薄膜之成份分析
5-2-3 RF濺鍍薄膜的結構
5-2-4 熱處理對La Sr Co Ni O 薄膜CO感測的影響
5-2-5 添加Ni對CO感測特性的影響
5-2-6 CO濃度對薄膜感測的影響
5-2-7 水蒸氣對RF濺鍍薄膜靈敏值的影響
5-2-8 CH 對RF濺鍍薄膜CO靈敏值的影響
第六章 綜合討論
6-1 不同製程對CO感測性值之討論
6-2 對CO反應曲線及回復曲線之影響
6-3 對靈敏值及導電性的影響
6-4 水蒸氣對不同製程的影響
6-5 CH 對不同製程的影響
6-6 La Sr Co Ni O 薄膜與SnO 薄膜對CO感測特性之比較
第七章 結論
其他

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