臺灣博碩士論文加值系統

現今的工程製造量測技術，對於量測微小尺寸工件往往受限於量測探頭的性能而無法達到應有的精度水準。各國研究機構為了解決此問題，多使用價格昂貴的感測設備與製造技術。
本研究發展出一套用於微奈米級三次元座標量測儀上之低成本、高精度的接觸式掃描探頭，以懸浮片結構結合探針為基礎，再以市售的光碟讀取頭（DVD Optical Pickup Head）為感測器，測量探針接觸到工件時探球的三維位置變化。
探頭在性能上可達到高精度和各方向性能均勻的要求，具有20微米的量測範圍並且加上了影像裝置可以在量測的過程中判定探針是否將要與工件接觸，可提升量測的準確度並節省量測時間。
在接觸式探針上利用自行燒製的光纖球頭作為探針的尖端球頭，並利用實驗設計的概念找出最佳的製作參數。

In the modern metrological technology, traditional coordinate measuring machines (CMM) was not able to satisfy certain precision and accuracy in micro/nano scale due to the performance of the probing systems. The probing system is the limiting factor in the downscaled CMM. Many research institutes develop the probe system with expensive instruments as sensors and complex manufacturing processes.
In this research, a low cost, high precision contact scanning probe for Micro/Nano CMM is developed. Based on suspension structure with stylus, the sensor of the probe is commercial DVD optical pick head which is able to measure the 3-D displacement of the stylus tip.
The performance of probe can achieve high-precision and uniform characteristic. the measurement range is 20 micron meter. The probe is equipped with CCD image device in order to promote precision and save the measuring time.
The tip-ball of stylus is made from optical fibers. In this research, a method of experiment design is employed to find the best parameter of fabrication

致謝 i 
中文摘要 ii
Abstract iii
目錄 iv 
圖目錄 vii 
表目錄 xi 
第一章 緒論 1 
1.1  研究動機 1 
1.1.1  探頭系統與三次元座標量測儀 2 
1.1.2  研究目標 5 
1.2  文獻回顧 6 
第二章 DVD 光學讀取頭之感測原理與應用 23 
2.1  DVD 讀取頭相關文獻回顧 23 
2.2  DVD 讀取頭內部元件介紹 26 
2.2.1  光學組件 28 
2.2.2  雷射二極體發光功率之控制 34 
2.3  DVD 讀取頭應用於直線及角度量測 37 
2.3.1  直線量測原理 37 
2.3.2  直線量測校正實驗 39 
2.3.3  角度量測原理 43 
2.3.4  角度量測校正實驗 45 
第三章 接觸式光纖探球製作 48 
3.1  文獻回顧 49 
3.2  光纖探頭製作 54 
3.2.1  製作原理 54 
3.2.2  製作設備 55 
3.2.3  參數控制與最佳化 57 
3.2.4  利用田口法取得最佳參數 58 
3.3  熱融拉法製作光纖球頭 63 
第四章 探頭結構設計與分析 66 
4.1  力學分析 66 
4.2  探頭內部之結構設計 79 
4.2.1  懸浮片設計 79 
4.2.2  結構設計 81 
4.2.3  影像裝置 84 
第五章 探頭校正與訊號處理 86 
5.1  探頭校正 86 
第六章 探頭性能實驗 95 
6.1  預行程實驗 95 
6.1.1  實驗原理 95 
6.1.2  實驗結果 98 
6.2  量測剛性實驗 101 
6.2.1  實驗原理 101 
6.2.2  實驗結果 105 
第七章 結論與未來展望 107 
7.1  結論 107 
7.2  未來展望 107 
參考文獻 109 

1. Bos, E.J.C., F.L.M. Delbressine, and H. Haitjema, High-accuracy CMM metrology for micro systems. VDI Berichte, 2004(1860): p. 511-522.
2. Kiyoshi Takamasu , S.O., Takayuki Asano, and R.F.a.S.O. Akihiro Suzuki Basic Concepts of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution) The Japan - China Bilateral Symp. on Advanced Manufacturing Eng., 1996: p.155-158.
3. Ruijl, T.A.M., Ultra Precision Coordinate Measuring Machine; Design, Calibration and Error Compensation, PhD Thesis. 2001, TUD. p. 212.
4. Vermeulen, M.M.P.A., P.C.J.N. Rosielle, and P.H.J. Schellekens, Design of a High-Precision 3D-Coordinate Measuring Machine. CIRP Annals - Manufacturing Technology, 1998. 47(1): p. 447-450.
5. van Seggelen, J.K., Rosielle, P.C.J.N., Schellekens, P.H.J, Design of a 3-D
CMM with elastically guided
z-axis and x,y axis with less than 2 mm ABBE offset. Proc. of EUSPEN, Eindhoven,
The Netherlands, 2002: p. 29-32.
6. Peggs G N, L.A. and S. Oldfield, Design for a compact high-accuracy CMM. 1999. 48(1): p. 417.
7. 范光照、張郭益, 精密量測. 5 ed. 2007: 高立圖書.
8. Weckenmann A, E.T.P.G. and D. McMurtry, Probing systems in dimensional metrology. Ann. CIRP, 2004. 53(2): p. 657.
9. Schwenke H, H.a.F., Wendit K and W‥ aldele F Future challenges in co-ordinate metrology: addressing metrological problems for very small and very large parts. IDW Conf. (Knoxville, TN), 2001: p. 1-12.
10. Gaoliang, D. and et al., A high precision micro/nano CMM using piezoresistive tactile probes. Measurement Science and Technology, 2009. 20(8): p. 084001.
11. Haitjema, H., W.O. Pril, and P.H.J. Schellekens, Development of a Silicon-based Nanoprobe System for 3-D Measurements. CIRP Annals - Manufacturing Technology, 2001. 50(1): p. 365-368.
12. Peiner, E. and et al., Tactile probes for dimensional metrology with microcomponents at nanometre resolution. Measurement Science and Technology, 2008. 19(6): p. 064001.
13. Ruther, P. and et al., Novel 3D piezoresistive silicon force sensor for dimensional metrology of micro components. Proc. IEEE Sensors, 2005: p. 1006.
14. Peggs, G.N., A.J. Lewis, and S. Oldfield, Design for a Compact High-Accuracy CMM. CIRP Annals - Manufacturing Technology, 1999. 48(1): p. 417-420.
15. Kung A, M.F. and R. Thalmann, Ultraprecision micro-CMM using a low force 3D touch probe. Meas. Sci. Technol., 2007. 18(2): p. 319.
16. F. Meli, M.F., S. Bottinelli, M. Bieri, R. Thalmann, J-M. Breguet, R. Clavel, High precision, low force 3D touch probe for measurements on small objects.
European Int. Topical Conf., Aachen, Germany, 2003. Extended abstract.
17. Muralikrishnan, B., J.A. Stone, and J.R. Stoup, Fiber deflection probe for small hole metrology. Precision Engineering, 2006. 30(2): p. 154-164.
18. T. Oiwa, H.N., Three-dimensional touch probe using three fiber optical displacement sensors. Meas. Sci. Technology, 2004. 15: p. 84-90.
19. K. Enami, C.C.K., T. Nogami, M. Hiraki, K. Takamasu, S. Ozono, Development of nano-Probe System Using Optical Sensing. IMEKO-XV World Congress, 1999: p. 189-192.
20. Y. Takaya, H.S., S. Takahashi, T. Miyoshi, Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer. Measurement, 1999. 25: p. 9-18.
21. Y. Takaya, S.T., T. Miyoshi, K. Saito, Development of The Nano-CMM Probe based on Laser Trapping Technology. Annals of the CIRP, 1999. 48(1): p.421-424.
22. Dai G, W.H. and H.U. Danzebrink, Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures. Appl. Phys. Lett., 2007. 91(12): p. 121912.
23. Lin, Y.C. and C.L. Chu, Development of a Low Cost Nanoscale Stylus Probe Based on a DVD Pick-Up Head. Journal of the Chinese Society of Mechanical
Engineers, 2009. 30(1): p. 25-31.
24. Kuang-Chao, F. and et al., A scanning contact probe for a micro-coordinate measuring machine (CMM). Measurement Science and Technology, 2010.
21(5): p. 054002.
25. Hidaka, K., et al., A high-resolution, self-sensing and self-actuated probe for
micro- and nano-coordinate metrology and scanning force microscopy. CIRP Annals - Manufacturing Technology, 2010. In Press, Corrected Proof.
26. Ji, H., et al., A high-sensitivity optical touch trigger probe for down scaled 3D CMMs.
27. Ji, H., et al, Concept design of a novel tactile probe tip for down scaled 3D
CMMs. Brisbane, Australia: International Society for Optical Engineering, Bellingham WA, WA, 2006: p. 98227-0010.
28. Fan, K.-C., et al., Development of a high-precision straightness measuring system with DVD pick-up head. Measurement Science and Technology, 2003.
14(1): p. 47-54.
29. Scuor, N., et al., Dynamic characterization of MEMS cantilevers in liquid environment using a low-cost optical system. Measurement Science and Technology, 2006. 17(1): p. 173-180.
30. Hwu, E.-T., et al., Measurement of cantilever displacement using a compact disk/digital versatile disk pickup head. Japanese Journal of Applied Physics,
Part 1: Regular Papers and Short Notes and Review Papers, 2006. 45(3 B): p.2368-2371.
31. Chu, C.-L., C.-H. Lin, and K.-C. Fan. Development of a two-dimensional optical accelerometer using a DVD pick-up head. 2006. Xinjiang, China:
International Society for Optical Engineering, Bellingham WA, WA 98227-0010, United States.
32. Chu, C.-L. and C.-Y. Chiu, Development of a low-cost nanoscale touch trigger probe based on two commercial DVD pick-up heads. Measurement Science and Technology, 2007. 18(7): p. 1831-1842.
33. Hwu, E.-T., et al., Real-time detection of linear and angular displacements with a modified DVD optical head. Nanotechnology, 2008. 19(11): p. 115501.
34. SONY, KHM-310 技術資料.
35. 鄭克勇, 半導體雷射及應用. 光電科技資料叢書之二十四. 1993.
36. 林家佑, 具影像觀察功能之微奈米級三次元接觸式量測探頭分析與研製
. 2008,國立台灣大學機械工程研究所.
37. Liu, C.-H. and Z.-H. Li, Application of the astigmatic method to the thickness measurement of glass substrates. Appl. Opt., 2008. 47(21): p. 3968-3972.
38. Schwenke, H., et al., Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines. CIRP Annals - Manufacturing Technology, 2001. 50(1): p. 361-364.
39. Dong-Yea, S., Micro-spherical probes machining by EDM. Journal of Micromechanics and Microengineering, 2005. 15(1): p. 185.
40. Sheu, D.-Y., Multi-spherical probe machining by EDM: Combining WEDG technology with one-pulse electro-discharge. Journal of Materials Processing Technology, 2004. 149(1-3): p. 597-603.
41. Paek, U.C. and A.L. Weaver, Formation of a Spherical Lens at Optical Fiber
Ends with a CO2 Laser. Appl. Opt., 1975. 14(2): p. 294-298.
42. Vaidya, A. and J.A. Harrington, Sculpted optical silica fiber tips for use in Nd:YAG contact tip laser surgery: part 1--fabrication techniques. Optical
Engineering, 1992. 31(7): p. 1404-1409.
43. Kuang-Chao, F. and et al., Fabrication optimization of a micro-spherical fiber probe with the Taguchi method. Journal of Micromechanics and Microengineering, 2008. 18(1): p. 015011.
44. Taguchi, G., Quality engineering (Taguchi methods) for the development of electronic circuit technology. Reliability, IEEE Transactions on, 1995. 44(2): p.
225-229.
45. Phadke, M.S., Quality Engineering Using Robust Design. 1989: Prentice Hall.
46. Williamson, R.L. and M.J. Miles, Melt-drawn scanning near-field optical microscopy probe profiles Journal of Applied Physics, 1996. 80(9): p. 4804-4812.