臺灣博碩士論文加值系統

本文在實驗上觀察不同長寬比的長方形孔洞在二維金屬薄膜孔洞陣列結構的異常性穿透特性。實驗發現當孔洞的長寬比達到7，主導穿透的電磁場會由原本的表面電漿模態轉變成侷域型的震盪模態。其中我們也研究在不同形狀的孔洞陣列，Wood異常特性對穿透頻譜造成的影響。我們使用簡單的傳輸線模型來說明侷域型穿透頻譜的尖峰波長位置變化。我們也探討了銀/二氧化矽/銀三層結構的表面電漿熱輻射元件，我們比較二氧化矽層厚度在不同厚薄的情形，發現當二氧化矽厚度較薄時，對整體的熱輻射能量是有提升的作用。主要是因為表面電漿傳遞上的損失並且儲存於兩層金屬間的二氧化矽層，並且增強了光學吸收的特性。不同的窄頻紅外線光源也被探討，我們利用厚度較厚的二氧化矽層作為銀/二氧化矽/金三層結構的熱輻射元件之光波導層，加熱時產生的波導震盪模態能達到窄頻的紅外線光源之用途。研究二氧化矽厚度對於表面電漿及波導模態間的色散關係，並且由理論得到與實驗一致的結果。藉由縮小孔洞的週期，我們可以達到單一模態的光源且達到更窄頻的效果，其品質因子可達到33。實驗證實利用聚二甲基矽氧烷的基板可以容易的製作出週期性的金屬波浪結構，且週期可以簡易的由沉積的金屬厚度來決定。這樣可彈性伸縮的金屬光柵激發了銀/空氣的表面電漿模態，我們可以藉由外加應力的拉伸進而改變此共振波長達到3.5%，實驗證實這樣新型的可調變光學濾波元件的確有發展的可能性。

The extraordinary transmission through silver film perforated with rectangular hole array with different aspect ratio is investigated. The propagating surface plasmon polaritons (SPPs) is observed to transform to localized resonance mode when the aspect ratio exceeds 7. The role of the Wood’s anomaly on the shape of the transmission spectrum is also investigated. The transmission peak of the localized resonance is fitted quite well with the theoretical calculation using a simplified transmission-line model. Additionally, the emission spectra of Ag/SiO2/Ag tri-layer plasmonic thermal emitters are investigated. Comparison of the emission spectra of the thermal emitters with SiO2 layers having different thicknesses, it is found that the thermal emission can be enhanced when the SiO2 layers is thin. The results suggested that the surface plasmon (SP) leak and store in the intermediate SiO2 layer between two metal layers that will enhance the absorption in the tri-layer structure. The various narrow bandwidth infrared light sources are reported. The suitably designed trilayer Ag/SiO2/Au thermal emitter with thick SiO2 layer supports the waveguide mode (WM) and can be used as the narrow bandwidth infrared light source. This study investigates the influence of dielectric thickness on the energy dispersion relations of SPs and waveguide modes and derives the theoretical dispersion relation, which fit well with experimental results. By shortening the lattice constant, the pure emitted peaks with ultra-narrowband can be obtained, the optimum quality factor approaches to 33. Additionally, we demonstrate that a periodic metallic wavy-structure can be easily fabricated on elastomeric polydymethylsiloxane (PDMS) substrates. The period of the wavy-structure is controllable by varing the thickness of the deposited silver film. The elastomeric-gratings can excite surface plasmon on Ag/air interfaces, the resonant wavelength can be tuned to a range of 3.5% by applying an external mechanical strain. Our experiments demonstrate the possibility of a new type optical filter with tunable wavelengths.

Chapter 1 Introduction....................................1
Chapter 2 The Fundamentals of Surface Plasmons............9
2.1 The fundamentals of surface plasmons...............9
2.1.1 Surface plasmons on smooth surfaces..........9
2.1.2 Surface plasmons on the surface with hole arrays (delocalized surface plasmons).......15
2.1.3 Band diagram of SPs on periodic hole arrays in a square lattice.........................18
2.1.4 Surface plasmons on metallic particles (localized surface plasmons: LSP) ..........22
2.2 Process Flow......................................24
2.2.1 Fabrication processes of metal hole arrays................24
2.2.2 Fabrication processes of plasmonic thermal emitter...25
2.3 Measuring Systems.....................................................29
2.3.1 Introduction of FTIR..............................................29
2.3.2 Transmission measurement.....................................30
2.3.3 Reflection measurement..........................................33
2.3.4 Thermal emission measurement...............................33
Chapter 3 The effect of Wood’s anomalies on the profile of extraordinary transmission spectra through metal periodic arrays of rectangular subwavelength holes with different aspect ratio......................................................................37
3.1 Motivation...................................................................37
3.2 Transmission spectra through metal periodic arrays of rectangular subwavelength holes with different aspect ratio............................................................................40
3.2.1 Experiments..........................................................40
3.2.2 Results and discussion............................................45
3.3 Transmission spectra through metal periodic arrays were arranged in a rectangular lattice........................52
3.3.1 Experiments..........................................................52
3.3.2 Results and discussion............................................52
3.4 Conclusion..................................................................55
Chapter 4 Enhancement of thermal radiation in plasmonic thermal emitter by surface plasmon resonance............................................................59
4.1 Motivation...................................................................59
4.2 The observation of enhanced thermal radiation in plasmonic thermal emitter by surface plasmon resonance...................................................................61
4.2.1 Experiments..........................................................61
4.2.2 Results and discussion............................................63
4.2.2.1 The emission spectra.................................................63
4.3 The influence of hole size on the emittance of the Metal/SiO2/Metal (MDM) structure..........................73
4.3.1 Experiments..........................................................73
4.3.2 Results and discussions..........................................73
4.4 The polar diagram of Metal/SiO2/Metal (MDM) emitted structure........................................................76
4.4.1 Experiments..........................................................76
4.4.2 Results and discussions..........................................76
4.5 Conclusion..................................................................80
Chapter 5 The characteristics of waveguide mode in trilayer Ag/SiO2/Au plasmonic thermal emitter.............81
5.1 Motivation...................................................................81
5.2 The influence of SiO2 thickness on the reflection spectra of Metal/SiO2/Metal (MDM) structure..........83
5.2.1 Experiments..........................................................83
5.2.2 Results and discussions..........................................86
5.3 The influence of SiO2 thickness on the emittance spectra of Metal/SiO2/Metal (MDM) structure..........92
5.3.1 Experiments..........................................................92
5.3.2 Results and discussions..........................................92
5.4 Emittance spectra of Metal/SiO2/Metal (MDM) structure with short period.........................................96
5.4.1 Experiments..........................................................96
5.4.2 Results and discussions..........................................97
5.5 Conclusion................................................................101
Chapter 6 Self-Assembled Rippling Structure Based on Metal- Elastomer Composite for Tunable Plasmonics........................................................103
6.1 Motivation.................................................................103
6.2 The Fabrication of 1D-grating with rippling structure on PDMS substrate..................................................104
6.2.1 Experiments........................................................104
6.2.2 Results and discussions........................................105
6.3 The period of silver wavy structure as a function of its thickness on PDMS substrate…..............................109
6.3.1 Experiments........................................................109
6.3.2 Results and discussions........................................109
6.4 The reflection spectra of Ag/PDMS wavy structure at different tensile conditions......................................113
6.4.1 Experiments........................................................113
6.4.2 Results and discussions........................................115
6.5 Conclusion...................................................................117
Conclusions.............................................................................123
Appendix Parallel-plate waveguides ................................125
Bibliography...........................................................................127


Figure Captions
Fig. 2.1 (a) The SPs at the interface of metal and dielectric. (b) The SP dispersion relation (solid line). (c) Electric field in the direction perpendicular to the surface............................................................10
Fig. 2.2 (a) Missing momentum provided by the periodic hole arrays. (b) Top view of the periodic hole arrays in square lattice. (c) Definition of the direction of incident light.....................................................17
Fig. 2.3 (a)The schematic diagram of incline incident at an angle θ. (b) The graphic method followed by conservation law of SPs of incident light along direction on a reciprocal lattice of a square hole arrays..............................................................................................20
Fig. 2.4 Theoretical dispersion relation of SPs on periodic metal hole arrays in a square lattice. The red lines represent Ag/air SP modes while blue lines represent Ag/Si SP modes..............................................21
Fig. 2.5 Resonant condition ( ) as a function of aspect-ratio (L) for quasistatic spheroidal particles, the major and minor axes of the spheroid are represented by a and b, respectively..........................23
Fig. 2.6 Fabrication process of a plasmonic (waveguide) thermal emitter..27
Fig. 2.7 The schematic diagrams showing the (a) side and (b) top views of plasmonic (waveguide) thermal emitter.........................................28
Fig. 2.8 The principle of Michelson interferometer.....................................31
Fig. 2.9 (a) Schematic diagram of incline incident at an angle . (b) The experiment setup of zero-order transmission at normal, (c) incline incidence........................................................................................32
Fig. 2.10 Reflection mirrors system..............................................................34
Fig. 2.11 Thermal emitter chamber, (a) top view (b) side view....................35
Fig. 3.1 (a)-(g) Top views of the samples with periodic rectangular holes arrays from aspect ratio 2 to ∞.....................................................42
Fig. 3.2 The schematic diagrams showing the (a) top and (b) side view of the rectangular hole array in a square lattice. (c) The measurement setup and the sample lies in the xy plane with light incident in z direction..........................................................................................44
Fig. 3.3 Zero-order transmission spectra of rectangular hole array in a square lattice with aspect ratios R = 2, 4, 6, 7, 9, 11, and ∞ (1-D grating). All the lattice constants are 15 μm...................................46
Fig. 3.4 The dispersion relations and transmission intensity of rectangular hole array as a function of photon energy and . The aspect ratios of rectangular holes are (a) 4, (b) 7, (c) 9 and (d) (1-D grating). All the lattice constants are 15μm..................................................49
Fig. 3.5 Zero-order transmission spectra of rectangular hole array in a square lattice with different incident angles. The lattice constants are 15 μm, and the aspect ratios R of rectangular holes are (a) 6 and (b) 7, respectively...........................................................................51
Fig. 3.6 The transmission spectra of the rectangular hole array with aspect ratio of 9, i.e., the length is 12.7 μm and the width is 1.4 μm, in a rectangular lattice with the fixed period of 15μm along x axis and the different periods from 3 to 18 μm along y axis........................56
Fig. 3.7 The transmission spectra of the rectangular hole arrays on Si or Ge substrate with aspect ratio of 9 in a rectangular lattice. The periods are 15 μm along x axis for all four samples, the periods along y axis ay are either 4 or 6...................................................................57
Fig. 4.1 Schematic diagram of the (a) side and (b) top views of the emitters A and B, the top metal is perforated with hexagonal and square lattice of holes, respectively...........................................................62
Fig. 4.2 The graphic method showing the conservation law obeyed by SPs for incident light along (a) (b) directions on a reciprocal lattice of a square hole arrays........................................64
Fig. 4.3 Measured emission spectra of the (a) Ag/SiO2/Ag tri-layer structure (200nm/100nm/200nm), the top Ag film is planar without any holes, (b) SiO2/Ag double layer (100 nm/200nm), (c) emitter A with hexagonal lattice of holes, and (d) emitter B with square lattice of holes. All the samples were measured at the temperature of 200 0C. Theoretical curves are the weighted sum of measured spectra shown in Fig. 2(a) and (b) according to the top exposed area ratio of SiO2 to Ag, i.e., 0.23 to 0.77 for Fig. 2(c), 0.2 to 0.8 for Fig. 2(d).................................................................................................69
Fig. 4.4 Measured and theoretical emission spectra of emitter C with top metal film perforated by hexagonal lattice of holes, the central glass of emitter C is 500 μm thick..................................................71
Fig. 4.5 The reflection spectrum at the incident angle of 12 degree along direction in the structures of (1) SiO2/Ag double planar layers (100 nm/200 nm), (black line) and (2) emitter A without intermediate SiO2 layer (red line), and (3) emitter A (blue line), respectively.....................................................................................72
Fig. 4.6 Measured emission spectra of thermal emitter with different hole size. All the samples were measured at the temperature of 200 0C....................................................................................................75
Fig. 4.7 Normalized polar diagram of radiation of the (1,0)Ag/SiO2 mode from (a) emitter A and (b) emitter B, the polar diagram of radiation from SiO2 film is also shown. The measurements were along ΓK and ΓX direction in emitters A and B, respectively...................... 78
Fig. 4.8 Measured energy dispersion relation of SPs of emitter (a) A and (b) B as a function of along ΓK and ΓX direction, respectively.....................................................................................79
Fig. 5.1 Schematic diagram of the (a) side and (b) top view of the Ag/SiO2/Au plasmonic thermal emitter. The top metal is perforated with a hexagonal hole array............................................................85
Fig. 5.2 Measured energy dispersion relation as a function of along ΓK direction for devices A, B, C, D, and G with different SiO2 thicknesses t of (a) 0.7 μm, (b) 0.8 μm, (c) 0.9 μm, (d) 1.1 μm, and (e) 2.6 μm. The theoretical energy dispersion relation (red lines) are shown to fit the experimental result of (e). WM is waveguide mode, and WG is waveguide-grating coupling mode...............................88
Fig. 5.3 Measured emission spectra of devices D, E, F, and G with different SiO2 layer thicknesses (i.e., t = (a) 1.1, (b) 1.6, (c) 2.1, and (d) 2.6 μm, respectively). The spectra show fundamental waveguide mode (0,0,1) (open square), (1,0) Ag/SiO2 SPP mode (open diamond), second order waveguide mode (0,0,2) (solid square), and (1,0,1) waveguide-grating mode (open triangle). The devices with lattice constant a = 3 μm and diameter d = 1.5 μm were heated at a fixed temperature of 140 ℃....................................................................95
Fig. 5.4 Measured energy dispersion relation as a function of along ΓK direction for devices H and I with various lattice constants (hole diameters), (a) 2.3 (1.15), (b) 2.0 (1.0) μm, respectively. The calculated dispersion curves represented dotted blue lines and dotted red lines are the waveguide modes (WM) and waveguide-grating coupling modes (WG), respectively................99
Fig. 5.5 Measured emission spectra of devices H and I with varied lattice constants (hole diameters), (a) 2.3 (1.15), (b) 2.0 (1.0) μm, respectively. The straight red lines are the ideal blackbody radiation curve. All devices were heated at a fixed temperature of 300 ℃ 100
Fig. 6.1 Optical micrographs showing the wavy patterns of 100 nm thick Ag on PDMS with different sample size of (a) 15×15, (b) 15×20, (c) 15×30, (d) 15×45, (e) 15×60 (mm×mm), respectively. For the all samples, the long side is along x axis, and short side is along y axis, defined in (a).................................................................................107
Fig. 6.2 Preparation of 100 nm silver films on PDMS samples. The formation of the metallic patterns results from (1) the heating metal source expands the PDMS substrate during deposition, (2) the mismatch of thermal expansion coefficients between Ag and PDMS leads to (3) wavy structure when the sample is cooling down to room temperature..........................................................................108
Fig. 6.3 The topography profile collected by atomic force microscope (AFM) on Ag/PDMS samples surface with different silver thickness of (a) 50, (b) 100, (c) 150, (d) 200 nm, respectively...............................111
Fig. 6.4 The relations of silver thickness to the wavy amplitude and period............................................................................................112
Fig. 6.5 The stage to apply tensile stress is mounted in the optical path to measure the reflection spectrum...................................................114
Fig. 6.6 The reflection photon energy dispersion curve of Ag/PDMS sample A with 200 nm silver layer, the period is 17.5 μm........................118
Fig. 6.7 The reflection spectra measured under different polarized light, 0o and 90o represent the polarized light parallel and perpendicular the wavy grating, respectively............................................................118
Fig. 6.8 The reflection photon energy dispersion of Ag/PDMS sample B with 50 nm silver layer, the period is 14.5 μm.............................119
Fig. 6.9 The reflection spectrum of Ag/PDMS sample B with 50 nm silver layer, the period is 14.5 μm..........................................................119
Fig. 6.10 The reflection spectra of Ag/PDMS sample B with 50 nm silver layer, the period is 14.5 μm..........................................................120
Fig. 6.11 The optical micrographs at different tensile shift from 0 to 1400 μm.................................................................................................121


List of Tables
Table 2.1 Conditions and purposes of the cleaning solvent...........................25
Table 2.2 The photolithography conditions....................................................25
Table 3.1 The structural parameters of samples. The a, l, w, R are lattice constant, length, width of rectangular hole, aspect ratio ,and filling factor of hole area in a unit cell, respectively.................................43
Table 4.1 Measured emission peaks position of (1,0) Ag/air and (1,0) Ag/SiO2 in the thermal emitter for different hole size..................................................................................................75
Table 6.1 The variation of reflection minimum (SVRM) shift of (-1, 0) Ag/air SP mode with different tensile distances (△L), the length variation (△L/L) in the table is defined by the tensile distance divided by the total length (L) of sample.............................................................120

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