臺灣博碩士論文加值系統

本研究發展一個新型的8 × 8光開關系統，這種新型的光開關系統具有低成本、高良率、鏡面自我對準及容易組裝等優點，因此非常適合用來發展高埠數的光開關。本研究利用微機電技術中的「氫氧化鉀濕式非等向性蝕刻」，搭配上定義有切邊對準 方向微鏡面圖形及切邊對準 方向光路圖形的光罩，經過嚴密控制氫氧化鉀蝕刻液濃度及溫度的蝕刻過程，即可在(100)晶圓上製作8 × 8且具有「自我對準」能力的微鏡面陣列。本研究先對磁力進行推導，設計並使用傳統精密機械技術製作出雙穩態電磁致動器，與8 × 8微鏡面陣列組合成8 × 8光開關陣列。最後針對整個8 × 8光開關陣列設計驅動電路及電腦控制程式，使得使用者可以利用電腦、透過USB控制8 × 8光開關陣列。本研究成功使8 × 8光開關系統運作，並針對光開關之光學特性進行量測。
製作完成的光開關，微鏡面表面粗糙度最高為83.3nm，小於目標100nm；光開關之插入損失為-3.7dB；ON-OFF切換時間為5ms，OFF-ON切換時間為8ms；光開關之切換重複性，在100次切換中，插入損失變動量約為0.02dB，在10000次的切換當中，插入損失的變動量可低於0.2dB。以1Hz、10Hz及50Hz(duty cycle分別為25%、5%及0.5%)驅動雙穩態電磁致動器，五分鐘後溫度上升量分別為0.3、4.5及23.1℃。

In this work, a novel hybrid 8 × 8 optical switch system is presented. The hybrid switch comprises a MEMS-based micro-mirror array structure and an actuator array. The micro-mirror array structure, including micro-mirrors, cantilevers, and light-path trenches, can be realized by using KOH anisotropic etching process. Also, the actuator array includes 64 bi-stable solenoid-based actuators. Each micro-mirror on the mirror array is actuated by the bi-stable solenoid-based actuator, and the power consumption of the system can be greatly reduced. We also develop a driving circuit for solenoid-based actuator array and a Window-based program for controlling the optical switch system.
Device characterizations and optical performance are also investigated. The typical surface roughness of the mirrors is about 83.3nm. The switching time is 5ms from ON state to OFF state and 8ms from OFF state to ON state, respectively. The required time for applying voltage on the actuators is less than 5ms for switching between two stable states. The measured insertion loss is about -3.7dB. The insertion loss deviation is about 0.02dB after 100 switching cycles and 0.2dB after 10,000 switching cycles. The temperature raising are 0.3℃, 4.5℃ and 23.1℃ corresponding to the operation frequencies of 1Hz, 10Hz, and 50Hz.

誌謝 I
摘要 III
Abstract IV
目錄 V
圖目錄 VIII
表目錄 XI
第一章 緒論 1
1.1. 前言 1
1.2. 研究動機及目的 2
1.3. 文獻回顧 3
1.4. 論文架構 11
第二章 理論基礎 12
2.1. 垂直鏡面蝕刻原理 12
2.2. 螺線圈數值模型推導 13
2.3. 永久磁鐵間產生之磁力推導 16
2.4. 雙穩態磁力推導 22
第三章 製程方法及系統設計 25
3.1. 微鏡面製程 25
3.1.1. 氫氧化鉀濕式非等向性蝕刻製程 25
3.1.2. 定義晶圓精確方向 26
3.1.3. 光罩設計 27
3.2. 雙穩態電磁式致動器設計 28
3.2.1. 雙穩態電磁式致動器致動原理 28
3.2.2. 螺線圈製作 30
3.3. 致動器驅動電路系統設計 31
3.3.1. 致動器驅動電路設計 32
3.3.1.1. L293D致動器驅動晶片 34
3.3.1.2. 8051單晶片 35
3.3.2. USB轉接電路 36
3.4. 光開關切換控制程式設計 38
3.5. 光開關系統組裝及量測平台設計 39
3.5.1. 傾斜平台及微鏡面挾持機構設計 40
3.5.2. 垂直移動平台及光準直平台設計 41
3.5.3. 致動器模組設計 42
3.5.4. 美國商規Bellcore 43
第四章 實驗量測與討論 46
4.1. 微鏡面表面粗糙度之量測 46
4.1.1. 表面粗糙度之目標設定 46
4.1.2. 量測結果 48
4.2. 插入損失量測 50
4.2.1. 實驗儀器 50
4.2.1.1. FLS-300光源 50
4.2.1.2. 光功率計(Power meter) 50
4.2.2. 量測結果 51
4.3. 切換時間量測 51
4.3.1. 實驗儀器 51
4.3.1.1. 示波器 51
4.3.2. ON-OFF切換時間量測 52
4.3.3. OFF-ON切換時間量測 52
4.4. 微鏡面切換重複性之量測 53
4.4.1. 實驗儀器 53
4.4.1.1. 資料擷取(DAQ)卡及LabView圖形介面程式 53
4.4.2. 實驗架設 54
4.4.3. 實驗結果 55
4.5. 致動器驅動頻率對溫度之量測 57
4.5.1. 實驗儀器 57
4.5.1.1. 紅外線測溫槍 57
4.5.2. 致動器驅動溫度量測 58
4.6. 致動器驅動力量對微鏡面陣列形變量之預估 59
第五章 結論及未來展望 64
5.1. 結論 64
5.2. 未來展望 66
參考文獻 67

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