臺灣博碩士論文加值系統

隨著微機電系統技術之蓬勃發展，將微感測器與微致動器結合，以應用在醫學上之器官移植或作為建築物或橋樑上之嵌入式感測器，已變為可能。一般使用電池作為動能源，具環保回收問題。因此，發展利用周遭環境之振動源的自主式發電機為另一更好的選擇。
本研究成功建立振動電磁式微發電機之發電轉換模式。並利用數學軟體Mathematica模擬分析得到微發電機之發電特性。運用微機電系統技術，可製作矽基微振動片、銅製平面線圈、磁性薄膜及各元件之組裝。利用文獻上的實驗數據與理論模型互相比較來驗證此發電量轉換模式之正確性。

With the flourishing development of MEMS, it is possible to combine micro-sensors with micro-actuator and apply to the organ transplant in medical fields or as an embedded sensor on buildings or bridges. Generally batteries is are used as the kinetic energy source, but it involves the issue of recycling. Therefore, development of a self-generator utilizing vibrational source from environment is another better choice.
This study succeeds in building up the transform mode of electricity in an electro-magnetic vibration-induced micro-generator. The electricity characteristics of micro-generator are obtained by Mathematical software analysis. MEMs technology can be used to fabricate and assemble the microstructure , planar coils and magnetic films. The analytic results of maximum power and minimum volume by using a mathematics model are achieved. The validity of this model is verified by comparing the theoretical and experiment data from the literature.

謝誌……………………………………………………………………….I
中文摘要……………………………………………………………...…II
ABSTRACT…………………………………………………………….III
總目錄……………………………………………………………..……IV
圖目錄………………………………………………………………….VII
表目錄…………………………………………………………………..XI
符號說明……………………………………………………………….XII
單位一覽表…………………………………………………………....XV
尺寸符號說明……………………………………………………...…XVI
第一章 緒論……………………………………………………………..1
1-1前言……………………………………………………………..1
1-2微發電機之發展背景…………………………………………..2
1-3文獻回顧………………………………………………………..5
1-4本文之目的及架構……………………………………………11
第二章 微發電機之結構設計與分析…………………………………12
2-0前言……………………………………………………………12
2-1力學分析………………………………………………………15
2-2電磁分析……………………………………………………....24
第三章 微發電機發電特性模擬分析…………………………………33
3-1 Mathematica簡介……………………………………………..33
3-2羅倫茲力所造成發電阻尼之模擬分析……………………....34
3-2-1不考慮羅倫茲力下的發電特性………………………….34
3-2-2羅倫茲力對此系統所造成的阻尼效應………………….40
3-2-2-1利用力學分析計算k值之模擬……………………...45
3-2-2-2利用傳統懸臂樑計算k值之模擬…………………...49
3-2-3發電結果………………………………………………….52
3-2-3-1利用力學分析計算k值之發電結果………………...52
3-2-3-2利用傳統懸臂梁計算k值之發電結果……………...54
3-3微發電機振動結構之參數最佳化……………………………57
第四章 實驗結果與模擬驗證…………………………………………62
4-1微振動結構之製作………………………………………..…..62
4-1-1 雷射加工簡介……………………………………………62
4-1-2 雷射加工…………………………………………………66
4-2平面感應線圈之製作………………………………………....72
4-2-1 微線圈之製作方式………………………………………72
4-2-2 繞線技術…………………………………………………73
4-3磁性薄膜之製作………………………………………………77
4-4發電特性量測結果與討論……………………………………79
4-4-1 振動量測…………………………….……..…………….79
4-4-2 發電特性量測……………………………………………83
第五章 結論與未來展望………………………………………………86
5-1結論……………………………………………………………86
5-2未來展望………………………………………………………87
參考文獻………………………………………………………………..89

[1]P. G. Jones and N. M. whiteite, “Self-powered systems: a review of energy sours”, Journal of Sensor Review, Vol. 21,No. 2,pp. 91-97 (2001).
[2]P. B. Koeneman, I. J. Busch-Vishiac, and K. L. Wood, “Feasibility of micro power supplies for MEMS”, Journal of Microelectromechanical Systems, Vol. 6, No. 4, pp. 355- 362 (1997).
[3]D. M. Rowe, D. V. Morgan, and J. H. Kiely, “Low cost miniature thermoelectric generator”, Electronics Letter, Vol. 27, pp. 2332-2334 (1991).
[4]C. B. Williams, and R. B. Yates, “Analysis of a micro-electric generator for Microsystems”, The 8th International Conference on Solid-State Sensors and Actuators, Vol. 1, pp. 369-372 (1995).
[5]C. B. Williams, and R. C. Woods and R. B. Yates, “Feasibility study of a vibration powered micro-electric generator”, Compact Power Sources (Digest No. 96/107), IEE Colloquium, pp. 7/1-7/3 (1996).
[6]P. G. Jone, S. P. Beeby, and N. M. White, “Toward piezoelectric vibration-powered microgenerator”, IEE Proc.-Sci. Meas Technol, Vol. 148, No. 2, pp. 68-72 (2001).
[7]A. Kasyap, “A theoretical and experimental study of piezoelectric composite cantilever beams for energy reclamation”, M.S. Thesis, AeMES Department, University of Florida, Gainesville, FL (2001).
[8]R. Tashiro, N. Katayama, Y. Ishizuka, F. Tsuboi, K. Tsuchiya, “Development of an electrostatic generator that harnasses the motion of a living body”, JSME Int. J. Ser. C 43(4) , pp. 916-922 (2000).
[9]S. Meninger, J. O. Mur-Miranda, R. Amirtharajah, A. P. Chandrakasan, J. H. Lang, “Vibration-to-electric energy conversion”, IEEE Trans. Very Large Scale Integr. VLSI Syst. 9 (1) , pp. 64-76 (2001).
[10]S. Roundy, P. K. Wright, K. S. Pister, “Micro-electrostatic vibration-to-electricity converters”, in: Proccedings of the 2000 ASME International Mechanical Engineering Congress and Exposition, New Orleans, LA, USA (2002).
[11]R. Amirtharajah and A. P. Chandrakasan, “Self-powered signal processing using vibration-based power generation,” IEEE Journal of Solid-State Circuits, Vol. 33, No. 5, pp. 687-695 (1998).
[12]W. J. Li, Z. Wen, P. K. Wong, G. M. H. Chan, P. H. W. Leong, “A micromachined vibration-induced power generator for low power sensors of robotic systems”, The 8th International Symposium on Robotics with Application, pp. 1-7 (2000).
[13]W. J. Li, T. C. Ho, G. M. H. Chan, P. H. W. Leong, and H. Y. Wong, “Infrared signal transmission by a laser-micromachined vibration-induced power generator”, Proceeding of IEEE, pp.236-239 (2000).
[14]C. Shearwood and R. B. Yates, “Development of an electromagnetic microfenerator”, Electronics Letters, Vol. 33,No. 22, pp. 1883-1184 (1997).
[15]C. B. Williams, C. Shearwood, M. A. Harradine, P. H. Mellor, T. S. Birch, and R. B. Yates, “Development of an electromagnetic micro-generator”, Proceeding of IEEE, Vol. 148, No. 6, pp. 337-342 (2001).
[16]G. J. Wang, Y. H. Lin, H. H. Yang, C. T. Pan, “Design and fabrication of a high efficiency piezoelectric vibration-induced micro power generator”, Proceeding of IMECE, pp. 1-8 (2003).
[17]曾國育, “振動式微型發電器的設計與製作”, 國力清華大學電子工程研究所碩士論文 (2001).
[18]劉祥麒, “電磁式微小發電機技術介紹”, 工研院機械所 (2006).
[19]www.motorora.com
[20]R. C. Hibbeler, “Engineering Mechanics-Dynamics” Prentice-Hall, pp. 621-622 (2004).
[21]J. E. Shigley and C. R. Mischke, “Mechanical Engineering Design”, 4th ed., McGraw-Hill, Book Company (1989).
[22]C. T. Pan, Y. H. Hwang, H. L. Hu, H. C. Liu, “Fabrication and analysis of a magnetic self-power microgenerator”, Journal of Magnetism and Magnetic Materials, Vol. 304, pp. 394-396 (2006).
[23]黃永茂, 潘正堂, 胡華良, 陳思廷, “微振動片之設計分析與製作”, 22th中國機械工程學會, E1-026, pp.421-426 (2005).
[24]D. K. Cheng, “Fundamentals of Engineering Electromagnetics”, 1st ed., Addision-Wesley, Reading, Mass (1997).
[25]C. P. Pan and S. C. Shen, “Magnetically actuated bi-directional microactuators with permalloy and Fe/Pt hard magnet”, Journal of Magnetism and Magnetic Material” , A285, pp. 422-432 (2005).
[26]莊達人, “VLSI製造技術”, 高立圖書 (2002).
[27]劉博文, “ULSI製造技術”, 新文京開發 (2003).
[28]劉海北, “光學共振腔”, 科學月刊, Vol. 168 (1983).
[29]謝志瑋, “振動式微發電機之振動結構研究”, 國立中山大學機械與機電工程學系碩士論文 (2004).
[30]賴瑞麟, 林明寬, 黃富財, 林森溥, 林道祐, 王仲資, 黃勝銘, 施並裕, 張維福, “光電及雷射概論”, 亞東書局 (1987).
[31]M. Marc, “Fundamentals of Microfabrication”, Boca raton, New York, p. 256 (1997).
[32]吳宗典, “多極多層高磁能積旋轉式微發電機”, 國立中山大學機械與機電工程學系碩士論文 (2005).
[33]洪子聖, 楊立群, “低溫共燒陶瓷嵌入式電感與電容元件之設計與模型化”, 國立中山大學電機工程學系碩士論文 (2002).
[34]羅正忠,張鼎張, “半導體製程技術導論”, 歐亞書局 (2006).