臺灣博碩士論文加值系統

摘要

本研究使用商用in-line PECVD 低溫(<300℃)沉積SiN:H 抗反射層，並且以網版印刷的方式製作商業N型太陽電池以達到高效率、低成本、高產量。
主要討論在不同製程之下所得到的結果.我們分析不同的蝕刻時間對SiNx的影響,利用AFM分析其表面粗糙度；FTIR分析元素鍵結以及穿透反射儀來分析光學特性。
最後我們用太陽能模擬器來得到我們的效率,並且分析在不同的製程參數之下所得到的結果

Abstract

In this thesis, we use commercial in-line PECVD to deposit SiNx:H antireflection coating layer in low temperature (<300℃) and finish the commercial n-type solar cells by screen printing to achieve high efficiency、low cost and high throughput.
The main discussion is the results of different process. Analyzing SiNx layer after different etching time. We use AFM to measure the roughness of surface, FTIR spectrum to analyze the bonding of elements and spectrometer to analyze optical characteristics.
　　Finally we use solar simulator to obtain efficiency and analyze results of different process.

Contents

I 合格証明(中文)
II 合格証明(English)
III 中文摘要
IV English Abstraction
V Acknowledge
VI Contents
X Figure Captions
XIV Table Captions

Chapter 1 Introduction
1 1-1 Development of Solar Energy
3 1-2 N-type silicon substrate solar cells
5 1-3 Thesis Outline

Chapter 2 Theorem and Background
6 2-1 Solar Cell
6 2-1-1 Important definitions
7 2-2 Characteristics of the a Photovoltaic Cell
7 2-2-1 Photocurrent and quantum efficiency
8 2-2-2 Dark current and open circuit voltage
9 2-2-3 Efficiency and Equivalent-circuit Model
11 2-3 Surface Effects
13 2-4 Diffusion furnaces
14 2-5 Deposition and Passivation of SiNx

Chapter 3 Experiments and Measurements
16 3-1 Sample Preparation
18 3-2 Scanning Electron Microscopes (SEM)
19 3-3 Fourier Transform Infrared Spectroscopy
20 3-4 Atomic Force Microscopes (AFM)
21 3-5 Hall Measurements
22 3-6 Optical Measurements
22 3-6-1 Spectrometer
22 3-6-2 Ellipsometer
24 3-7 Fabrication and Testing of Solar Cell
24 3-7-1 Cleaning and Texturing
24 3-7-2 Front Surface Field (FSF)
26 3-7-3 Antireflection Coating Layer
26 3-7-4 Screen Printing
28 3-7-5 Performance Testing

Chapter 4 Results and Discussion
29 4-1 Metallization Observation
29 4-1-1 Screen-printed Metallization
30 4-1-2 P-N junction formation
31 4-2 Surface Process
32 4-3 Etching Aluminum
33 4-4 Firing conditions
33 4-4-1 Belt Furnace Speed
33 4-4-2 Firing Temperature
34 4-4-3 Surface Analyses
36 4-5 Composition Analyses
37 4-6 Optical Characteristics
37 4-6-1 Refractive Index
37 4-6-2 Reflectance
39 4-7 Solar Cell Performance
39 4-7-1 Open Circuit Voltage
39 4-7-2 Short Circuit Current
40 4-7-3 Series Resistance
41 4-7-4 Shunt Resistance
41 4-7-5 Fill Factor
41 4-7-6 Efficiency
42 4-7-7 Breakage

43 Chapter 5 Conclusion

46 Figure
83 Table
89 Reference

Reference

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