臺灣博碩士論文加值系統

本研究提出一套使用寬頻光源及干涉條紋分析法的真直度干涉儀。其中，當干涉儀中的伍拉斯頓(Wollaston)晶體產生一橫向位移，則被一包絡函數所調制的干涉條紋就產生漂移。因此只要建立橫向位移與干涉條紋漂移量之關係， 本干涉儀就可透過條紋漂移量的量得，反推出橫向位移量。
本研究實際組裝了該干涉儀，它的靈敏度為228.5o/μm；透過實驗，我們實際建立橫向位移與干涉條紋漂移量之關係曲線，也確認此干涉儀解析度為0.02um；又進一步的實驗不但驗證此干涉儀的正確性，也說明此干涉儀確實可應用於真直度之量測。

A straightness interferometer utilizing a broad-band light source and fringe analyzing method is proposed in this thesis. Where the interference pattern, which is modulated by an envelope function, makes a shift when the Wollaston prism of the interferometer experiences a lateral displacement. Therefore, if the relationship between the pattern shift and lateral displacement has been established, once the pattern shift is obtained, the interferometer is capable of figuring the lateral displacement out.
To implement the measurement of the proposed interferometer, a setup having a measurement sensitivity of 228.5o/μm was assembled. The experimental results of the setup provide not only the relationship between the pattern shift and lateral displacement of the Wollaston prism but also the measurement resolution, which is 0.02um, of the assembled setup, In addition, the experimental results verify the validity and demonstrate an application, i.e., straightness measurement.

目 錄

中文摘要....................................................i
英文摘要...................................................ii
目錄......................................................iii
表目錄......................................................v
圖目錄.....................................................vi
第一章 緒論.................................................1
1.1 前言...............................................1
1.2光強變化型真直度量測技術............................1
1.3相位變化型真直度量測技術............................4
1.4各種光學式真直度量測儀的比較........................7
1.5研究目的............................................7
1.6研究方法............................................8
1.7論文架構............................................8
第二章 基本原理與干涉條紋分析法.............................9
2.1寬頻光源之干涉...........................................9
2.2真直度干涉儀.............................................9
2.3干涉條紋分析法..........................................11
2.3.1干涉條紋之飄移計算.................................12
2.3.2干涉條紋之畫素修正.................................13
第三章 實驗架設............................................14
3.1基本架設................................................14
3.2準直光源模組............................................14
3.3干涉儀系統..............................................16
3.4控制系統................................................17
3.5畫素位移與長度位移之效正系統............................18
3.6解析度與靈敏度..........................................19
3.7干涉條紋之影像分析......................................20
第四章 實驗步驟與實驗結果...............................22
4.1 畫素與長度之飄移量校正.................................22
4.1.1畫素與長度之飄移量校正之實驗步驟...................23
4.1.2畫素與長度之飄移量校正之實驗結果...................23
4.2 正確性驗證.............................................24
4.2.1正確性驗證實驗步驟.................................25
4.2.2正確性驗證實驗結果.................................26
4.3 穩定性驗證.............................................27
4.3.1穩定性驗證實驗步驟.................................27
4.3.2穩定性驗證實驗結果.................................27
4.4 應用性驗證.............................................28
4.4.1應用性驗證實驗步驟.................................30
4.4.2應用性驗證實驗結果.................................30
第五章 討論.............................................33
5.1 綜合討論...............................................33
5.2 實驗誤差分析...........................................33
第六章 結論.............................................35
參考文獻................................................36
附錄
A 實驗用PZT位移平台之詳細規格.......................38
 

表目錄

表2.1 各種光學式真直度量測法之比較..........................7
表A.1 二維PZT位移平台之詳細規格............................38
表A.2 二維PZT位移平台伺服控制器之詳細規格..................39


圖目錄

圖1.1自動瞄準儀(auto-collimator)............................1
圖1.2軸錐體(axicon) 量測系統................................2
圖1.3光強條紋分布圖.........................................3
圖1.4四象限光二極體感測器之基本架構.........................3
圖1.5四象限感測器示意圖.....................................4
圖1.6邁克森干涉儀...........................................5
圖1.7使用伍拉斯頓晶體與角柱菱鏡之差頻干涉儀量測系統.........6
圖1.8伍拉斯頓晶體與直角菱鏡之差頻干涉儀量測系統 ............7
圖2.1本研究所提出之真直度干涉儀............................10
圖2.2 (a)平面波入射且伍拉斯頓稜鏡有一位移dx................10
圖2.2 (b)光線反射回伍拉斯頓稜鏡的實際可能趨勢..............10
圖2.3真直度干涉儀之干涉條紋................................11
圖2.4干涉條紋之飄移計算方法................................12
圖3.1本實驗之干涉儀系統....................................14
圖3.2凖直對光模組結構圖....................................15
圖3.3凖直對光模組架構圖....................................15
圖3.4干涉儀系統............................................16
圖3.5伍拉斯頓晶體..........................................16
圖3.6楔形稜鏡..............................................17
圖3.7影像之擷取與位移平台之控制............................17
圖3.8畫素偏移與長度偏移之校正架構..........................18
圖3.9畫素偏移與長度偏移之校正關係意識圖....................19
圖3.10干涉條紋縱向掃描.....................................20
圖3.11橫向掃描基準線上方第一道暗紋.........................21
圖3.12橫向掃描基準線下方第一道暗紋.........................21
圖4.1畫素與長度之飄移量校正架構............................23
圖4.2畫素與長度之飄移量校正................................24
圖4.3正確性驗證架構........................................25
圖4.4正確性驗證............................................26
圖4.5正確性驗證之差異量....................................27
圖4.6穩定性驗證............................................28
圖4.7應用性驗證架構........................................28
圖4.8橫向真直度之量測......................................29
圖4.9縱向真直度之量測......................................29
圖4.10檢驗一之量測結果.....................................31
圖4.11大型線性軌道的橫向位移真直度.........................31
圖4.12檢驗二之量測結果.....................................32
圖4.13大型線性軌道的縱向位移真直度.........................32

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