臺灣博碩士論文加值系統

A systematic and efficient methodology for conceptual design of mechanisms is developed based on the classification of design specifications. In this work, design specifications for a mechanism are recast into three more coherent categories: functional requirements, structural requirements and design constraints. Based on functional requirements, the functioning kinematic chain of the mechanism is constructed by the functioning links such as the ground, input and output links, etc. According to structural requirements, kinematic structures are searched from the existing atlas of kinematic structures. Then, the functioning kinematic chain is compared with segments of the kinematic structures searched to obtain a much smaller number of compatible kinematic structures, where development of conceptual design of mechanisms can be efficiently accomplished. Lastly, joints of the compatible kinematic structures are labeled subject to design constraints, such that feasible mechanisms are yielded. With this methodology, design specifications with different natures can be used to guide a designer through various stages of the conceptual design process in a systematic manner. The creation of the variable-stroke engine mechanism is used as an illustrative example. Two design examples, the creation of the latch and retainer mechanisms for wafer containers are presented to demonstrate the proposed methodology. It is believed that the proposed methodology and design examples are beneficial to the conceptual design of mechanisms.

Chapter 1 Introduction 1
1.1 Background 1
1.2 Overview of related works 3
1.2.1 Graph representations 3
1.2.2 Conceptual designs of mechanisms 5
1.3 Motivation and preview 13
Chapter 2 Design Methodology 17
2.1 Introduction 17
2.2 Classification of design specifications 18
2.2.1 Embodiment of functional requirements 19
2.2.2 Coordination of structural requirements and
design constraints 22
2.3 Construction of functioning kinematic chain(s) 26
2.4 Search of kinematic structures 29
2.5 Identification of compatible kinematic structures 31
2.6 Enumeration of feasible mechanisms 35
2.7 Summary 39
Chapter 3 Latch Mechanism Design for Wafer Containers 40
3.1 Introduction 40
3.1.1 Standard mechanical interface (SMIF) technology 40
3.1.2 Latch mechanism design for wafer containers 44
3.2 Classification of design specifications for the latch mechanism 48
3.2.1 Embodiment of functional requirements 49
3.2.2 Coordination of structural requirements and
design constraints 51
3.3 Construction of functioning kinematic chains 53
3.4 Search of kinematic structures 54
3.5 Identification of compatible kinematic structures 56
3.6 Labeling of joints in compatible kinematic structures 59
3.7 Discussion and summary 65
Chapter 4 Retainer Mechanism Design for Wafer Containers 66
4.1 Introduction 66
4.2 Classification of design specifications for the retainer mechanism 70
4.2.1 Embodiment of functional requirements 71
4.2.2 Coordination of structural requirements and
design constraints 72
4.3 Construction of functioning kinematic chain 73
4.4 Search of kinematic structures 74
4.5 Identification of compatible kinematic structures 76
4.6 Labeling of joints in compatible kinematic structures 77
4.7 Discussion and summary 81
Chapter 5 Epilogue 82
References 84
Appendix Detailed Design of Latch Mechanism KC2-1 90
A.1 Introduction 90
A.2 Mechanism description 93
A.3 First stage: optimization of link dimensions 94
A.3.1 Derivation of output slot-cam profile 94
A.3.2 Optimization of link dimensions 96
A.3.3 A numerical example 102
A.4 Second stage: derivation of input slot-cam profile 103
A.5 Computer simulations 107
A.6 Summary 110

[1]Ullman, D. G., 1992, The Mechanical Design Process, McGraw-Hill, New York.
[2]Freudenstein, F., Maki, E. R., 1979, “The Creation of Mechanisms According to Kinematic Structure and Function,” Journal of Environment and Planning, Vol. 6, pp. 375-391.
[3]Freudenstein, F., Maki, E. R., 1983, “Development of an Optimum Variable-Stroke Internal-Combustion Engine Mechanism from The Viewpoint of Kinematic Structure,” ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 105, pp. 259-267.
[4]Freudenstein, F., Maki, E. R., 1984, “Kinematic Structure of Mechanisms for Fixed and Variable-Stroke Axial-Piston Reciprocating Machines,” ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 106, pp. 355-364.
[5]Buchsbaum, F., Freudenstein, F., 1970, “Synthesis of Kinematic Structure of Geared Kinematic Chains and Other Mechanisms,” Mechanism and Machine Theory, Vol. 5, pp. 357-392.
[6]Mayourian, M., Freudenstein, F., 1984, “Development of an Atlas of The Kinematic Structures of Mechanisms,” ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 106, pp. 458-461.
[7]Crossley, F. R. E., 1965, “The Permutations of Kinematic Chains of Eight Members or Less from the Graph-Theoretic Viewpoint,” Developments in Theoretical and Applied Mechanics (W. A. Shaw, Editor), Pergamon Press, Oxford, Vol. 2, pp. 467-486.
[8]Franke, R., 1958, Vom Aufbau der Getriebe (3rd edition), Vol I. VDI Verlag, Dusseledrof.
[9]Mruthyunjaya, T. S., Raghavan, M.R., 1979, “Structural Analysis of Kinematic Chains and Mechanisms Based on Matrix Representation,” Journal of Mechanical Design, Vol. 101, pp. 488-494.
[10]Mruthyunjaya, T. S., Raghavan, M. R., 1984, “Computer-Aided Analysis of the Structure of Kinematic Chains,” Mechanism and Machine Theory, Vol. 19, pp. 357-368.
[11]Mruthyunjaya T. S., 1984, “A computerized Methodology for Structural Synthesis of kinematic Chains: Part 1 – Formulation,” Mechanism and Machine Theory, Vol. 19, pp. 487-495.
[12]Mruthyunjaya T. S., 1984, “A computerized Methodology for Structural Synthesis of kinematic Chains: Part 2 – Application to Several Fully or partially Known Cases,” Mechanism and Machine Theory, Vol. 19, pp. 497-505.
[13]Mruthyunjaya T. S., 1984, “A computerized Methodology for Structural Synthesis of kinematic Chains: Part 3 – Application to the New Case of 10-link, Three-freedom Chains,” Mechanism and Machine Theory, Vol. 19, pp. 507-530.
[14]Davies, T. H., Crossly, F. E., 1966, “Structural Analysis of Plane Linkages by Franke’s Condensed Notaion,” Mechanism and Machine Theory, Vol. 1, pp. 171-183.
[15]Datseris, P., Palm, W., 1985, “Principles on the Development of Mechanical Hands Which Can Manipulate Objects by Means of Active Control” ASME Journal of Mechanisms, Transmissions, and Automation in Design, Vol. 107, pp. 148-156.
[16]Erdman, A. G., Bowen, J., 1981, “Type and Dimensional Synthesis of Casement Window Mechanism,” Mechanical Engineering, Vol. 103, pp. 46-55.
[17]Yan, H. S., 1992, “A Methodology for Creative Mechanism Design,” Mechanism and Machine Theory, Vol. 27, pp. 235-242.
[18]Tsai, L. W., 2000, Mechanism Design: Enumeration of Kinematic Structure According to Function, CRC Press, New York.
[19]Belfoire, N. P., Tsai, L. W., 1991, “A New Methodology for Structural Synthesis of Geared Robotic Wrists,” Proc. of the Second National Conference on Applied Mechanisms and Robotics, Paper No. VIB. 5.
[20]Kirschman, C. F., Fadel, G. M., 1998, “Classifying Functions for Mechanical Design,” ASME Journal of Mechanical Design, Vol. 120, pp. 475-482.
[21]Pahl, G., Beitz, W., 1999, Engineering Design: A Systematic Approach, Springer Verlag, New York.
[22]Suh, N. P., 1990, The Principle of Design, Oxford University Press, Oxford.
[23]Reuleaux F., 1876, Kinematics of Machinery, MacMillan, London.
[24]Parikh, M., Kaempf, U., 1984, “SMIF: A Technology for Wafer Cassette Transfer in VLSI Manufacturing,” Solid State Technology, Vol. 27, pp. 111-115.
[25]Doche, C., 1990, “Wafer confinement for control of contamination in microelectronics,” Solid State Technology, Vol. 33, pp. S1-S5.
[26]Book of SEMI standards, SEMI E19-0697.
[27]Book of SEMI standards, SEMI E62-0999.
[28]Bonora, A. C., Oen, J. T., 1996, “Direct Loadlock Interface,” United States Patent, No. 5,586,585.
[29]Maney, G. A., O''Sullivan, A. W., Faraco, W. G., 1987, “Sealed Standard Interface Apparatus,” United States Patent, No. 4,674,939.
[30]Muka, R. S., Pippins, M. W., Drew, M. A., 1997, “Batchloader for Substrate Carrier on Load Lock,” United States Patent, No. 5,607,276.
[31]Muka, R. S., 1997 “Door Drive Mechanisms for Substrate Carrier and Load Lock,” United States Patent, No. 5,609,459.
[32]Muka, R. S., Pippins, M. W., Drew, M. A., 1997, “Cluster Tool Batchloader of Substrate Carrier,” United States Patent, No. 5,613,821.
[33]Nyseth, D. L., 1998, “Wafer Carrier with Door,” United States Patent, No. 5,711,427.
[34]Muka, R. S., 1998, “Vacuum Integrated SMIF System,” United States Patent, No. 5,752,796.
[35]Hosoi, M. 1998, “Shipping Container,” United States Patent, No. 5,988,392.
[36]Bonora, A. C., Rosenquist, F. T., 1991, “Sealable Transportable Container Having Improved Latch Mechanism,” United States Patent, No. 4,995,430.
[37]Bonora, A. C., Rosenquist, F. T., Jain, S., Davis, M. R., 1998, “Sealable, Transportable Container Having a Breather Assembly,” United States Patent, No. 5,740,845.
[38]Murata, M., Tanaka, T., Morita, T., 1998, “Sealable Container,” United States Patent, No. 5,743,424.
[39]Fan, H. K., Lee, J. J., Huang, G. J., 1999, “Latch Mechanism for Wafer Container,” United States Patent, No. 5,931,512.
[40]Mikkelsen, K. J., Adams, M. S., Bores, G., Wiseman, B. S., 1999, “Wafer Enclosure with Door,” United States Patent, No.5,957,292.
[41]Maney. G. A., Faraco, W. G., Parikh, M., 1989, “Box Door Actuated Retainer,” United States Patent, No. 4,815,912.
[42]Niebling, T. J., Bieger, W. I., 1987, “Bottom Loading Wafer Carrier Box,” United States Patent, No. 4,684,021.
[43]Mortensen, R., Gregerson, B., 1987, “Storage box,” United States Patent, No. 4,709,834.
[44]Parikh, M., Bonora, A. C., Faraco, W. G., Huang, B. H., 1988, “Container Having Disposable Liners,” United States Patent, No. 4,739,882.
[45]Grohrock, P., 1989, “Transport Container with An Interchangeable inside Container,” United States Patent, No. 4,804,086.
[46]Maney. G. A., Faraco, W. G., Parikh, M., 1989, “Box Door Actuated Retainer,” United States Patent, No. 4,815,912.
[47]Gallagher, G. M., Wittman, B. C., 1995, “Actuated Rotary Retainer for Silicone Wafer Box,” United States Patent, No. 5,452,795.
[48]Williams, R. S., Cheesebrow, N. T., 1996, “Mechanical Interface Wafer Container,” United States Patent, No. 5,482,161.
[49]Nyseth, D. L., 1998, “Wafer Carrier with Door,” United States Patent, No. 5,711,427.
[50]Fan, H. K., Huang, G. J., Lee, J. J., 1999, “Wafer Retaining Mechanism,” United States Patent No. 5,890,597.
[51]Nyseth, D. L., Krampotich, D. J., 1999, “Transport Module with Latching Door,” United States Patent, No. 5,915,562.
[52]Wu, T. M., Huang, G. J., 1999, “Wafer Retaining Mechanism,” United States Patent, No. 5,960,959.
[53]Ananthasuresh, G. K., 2001, “Design of Fully Rotatable, Roller-Crank-Driven, Cam Mechanisms for Arbitrary Motion Specifications,” Mechanism and Machine Theory, Vol. 36, pp. 445-467.
[54]Kota, S., Erdman, A. G., 1997, “Motion Control in Product Design,” Mechanical Engineering, Vol. 119, pp. 74-77.
[55]Liaw, D. G., 1984, “Synthesis of Cam-Link Mechanisms for Exact Position Guidance of Rigid Bodies,” Journal of the Chinese Society of Mechanical Engineers, Vol. 5, pp. 27-43.
[56]Mills, J. K., Notash, L., Fenton, R. G., 1993, “Optimal Design and Sensitivity Analysis of Flexible Cam Mechanisms,” Mechanism and Machine Theory, Vol. 28, pp. 563-581.
[57]Yu, Q., Lee, H. P., 1998, “Size Optimization of Cam Mechanisms with Translating Roller Followers,” Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, Vol. 212, pp. 381-386.
[58]Bouzakis, K. D., Mitsi, S., Tsiafis, J., 1997, “Computer-aided Optimum Design and NC Milling of Planar Cam Mechanisms,” International Journal of Machine Tools and Manufacture, Vol. 37, pp. 1131-1142.
[59]Sadler, J. P., Yang, Zhijia, 1990, “Optimal Design of Cam-Linkage Mechanisms for Dynamic-Force Characteristics,” Mechanism and Machine Theory, Vol. 25, pp. 41-57.
[60]MATLAB, The Language of Technical Computing, Version 6.0.0.88, Release 12.