臺灣博碩士論文加值系統

本研究主要目的是利用溶膠凝膠法製備含銀、鉑奈米顆粒之摻鋁氧化鋅(Al-doped zinc oxide)之膠體溶液，經旋轉塗佈及乾燥過後，在第一次空氣鍛燒與第二次氫氣處理過後，得含銀、鉑之AZO透明導電薄膜。探討不同微量金屬的混入以及不同製程變因對AZO薄膜之光學及導電性質的影響。
製備方法的檢測及評估中，主要以薄膜之導電性以及可見光透光度及均勻性為考量。評估各種金屬之活性、離子半徑、價數、熔點，發現以銀、鉑作為混合之金屬製備AZO透明導電薄膜最為適合，故以兩種金屬進一步探討銀、鉑含量對於AZO透明導電薄膜性質的影響。
實驗發現銀、鉑的混入確實可明顯的提升AZO導電薄膜之導電性；經過450℃空氣處理、450℃氫氣處理後，當Pt為Zn原子之含量的0.05at.%時，其電阻可低至6.36×10-3Ω．cm。以Uv-visible光譜儀分析薄膜透光度，在可見光區之透光度皆可達到90%以上。

In this thesis, the Ag or Pt-containing aluminum doped ZnO (AZO) thin film were prepared by sol-gel method. After spin coating, drying, calcinations in air and hydrogen heat treatment, the Ag or Pt-containing transparent conducting films were obtained. The effects of trace metal doping and process parameters were studied for the formation of AZO.
According to conductivity, the transparency in visible region, and the uniformity of the thin films, the Pt and Ag were selected the most suitable as additives in the AZO transparent conductive films with systematic experiments , it was found that the addition of Ag and Pt nanoparticles can significantly enhance conductivity of AZO films. When content of the Pt content was about 0.05at.%, the electrical resistivity of AZO film was about 6.36×10-3Ω．cm with annealing process in air at 450℃ and heat treatment by hydrogen at 450℃. The UV/VIS spectra revealed that the transparency of Ag nanoparticle-containing AZO films has no significant difference from that of the AZO films. The transmittance of Pt nanoparticle-containing was higher than 90%.

誌謝 I
中文摘要 III
Abstract IV
目錄 V
表目錄 VIII
圖目錄 IX
符號表 XVII
第一章、緒論 1
1-1 前言 1
1-2 透明導電薄膜簡介 3
1-2-1 透明導電薄膜與其應用 3
1-2-2 透明導電薄膜之金屬半導體氧化物 5
1-2-3 透明導電薄膜之製備方法 7
1-3 氧化鋅 10
1-3-1 氧化鋅晶體結構 10
1-3-2 氧化鋅光學性質 12
1-3-3 氧化鋅之導電性質 12
1-3-4 氧化鋅之應用 13
第二章、文獻回顧 15
2-1 透明導電薄膜 15
2-1-1概論 15
2-1-2 TCO薄膜之導電機制 17
2-1-3 TCO之光學性質 19
2-2 溶膠凝膠合成法 24
2-2-1 概論 24
2-2-2 水解及聚縮合反應 25
2-3 摻鋁氧化鋅(Al-doped ZnO) 28
2-3-1 以溶膠凝膠法製備摻鋁氧化鋅 28
2-3-2摻鋁氧化鋅(塗佈) 35
2-3-3 摻鋁氧化鋅之導電性質 37
2-3-4 摻鋁氧化鋅之光學性質 38
2-4 研究動機與目的 40
第三章、實驗步驟與方法 42
3-1 研究架構 42
3-2 使用設備簡介 44
3-3 實驗材料 46
3-4 實驗步驟、流程圖及實驗條件 48
3-4-1 以溶膠凝膠法製備AZO透明導電薄膜 48
3-4-2 以溶膠凝膠法製備含銀奈米粒子之AZO透明導電薄膜 51
3-4-3 以溶膠凝膠法製備含鉑奈米粒子之AZO透明導電薄膜 54
3-4-4 以溶膠凝膠法利用AZO透明導電薄膜製備異質接面太陽能電池 57
3-5 檢測儀器 61
3-5-1 X光粉末繞射儀(X-Ray Diffractometer, XRD)分析 61
3-5-2 場發射掃描式電子顯微鏡(Field Emission Scanning Electron Microscopy, FESEM) 61
3-5-3 能量分散光譜(Energy Dispersion X-ray Spectroscope) 62
3-5-5 紫外光-可見光吸收光譜儀(UV-vis) 63
3-5-6 熱重分析儀(Thermo Gravimetric Analyzer, TGA) 63
3-5-7 X-射線光電子能譜儀(X-ray Photoelectron Spectroscopy,XPS) 64
3-5-8 太陽能電池效率測試 64
3-5-9 四點探針(Four point probe) 65
3-5-10 霍爾效應測試機台 65
第四章、結果與討論 67
4-1 以溶膠凝膠法製備AZO透明導電薄膜 67
4-1-1 摻鋁氧化鋅薄膜特性之探討與分析 67
4-1-2 以溶膠凝膠法製備含少量銀奈米顆粒之AZO透明導電薄膜 104
4-1-3以溶膠凝膠法製備含少量鉑奈米顆粒之AZO透明導電薄膜 136
4-1-4 同時加入銀以及鉑奈米顆粒對於AZO透明導電薄膜之影響 158
4-2 異質接面太陽能電池之應用 164
4-2-1 AZO/Si/Al異質接面太陽能電池 164
4-2-2 AZO/Si/Al異質接面太陽能電池效率測試 164
4-2-3 AZO/Si/Al異質接面太陽能電池之實驗小結 168
第五章、總結與未來展望 169
5-1總結 169
5-2 未來展望 172
參考文獻 174

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