臺灣博碩士論文加值系統

本研究嘗試以電暈放電(Corona)的方式針對聚對苯二甲酸乙二酯(PET)基板表面進行改質處理，並藉由接觸角等量測方式瞭解PET表面經電暈放電改質後的表面能及表面形態之變化。實驗中利用射頻磁控濺鍍系統(RF magnetron sputtering system)，沉積氧化鋅摻雜鋁鎵(GAZO)薄膜，探討基板溫度(25 ~ 135 ℃)對薄膜微觀組織與光電特性之影響。實驗結果顯示:電暈功率在3 kW、傳送速度為2 m/min的條件下，電暈放電可提升PET基板表面的親水性及表面能至56達因以上，藉此可提高薄膜的附著能力。沉積薄膜時的基板溫度越高成膜速率越快、薄膜結晶性及電性越好。當基板溫度在135 ℃下所沉積之氧化鋅摻雜鋁鎵薄膜可得到最佳結晶性、最低的電阻率0.372 Ω-cm、最高的載子濃度3.03 × 1018 cm3 及最高的載子移動速率5.53 cm2/Vs。

The author reported that surface treatment for PET substrates by using corona discharge and Ga and Al co-doped ZnO (GAZO) thin films deposited on as-treatment PET substrates by RF magnetron sputtering. Characterization of PET substrates after corona discharge was carrier out by contact angle and laser scanning microscopy. Experimental results showed that surfaces of PET substrates were modified corona discharge, at a power of corona discharge of 3 kW and at a transmission speed of 2 m/min, would improve surface energy above 56 mN/m. Moreover, transparent and flexible GAZO thin films were prepared by RF magnetron sputtering. Effect of substrate temperatures on crystallinity levels, microstructures, optical and electrical properties of these GAZO thin films were investigated. Experimental results also showed that deposition rates, crystallinity levels and electrical properties of GAZO thin films improved with substrate temperatures increasing. Among the GAZO thin films in this study, the films deposited on substrate temperature at 135 ℃which exhibited the best properties, namely highest crystallinity level, a resistivity of 0.372 Ω-cm, a carrier concentration of 3.03×1018 cm3 and a carrier mobility of 5.53 cm2/ Vs.

總目錄
中文摘要-------------------------------------------------------------------------Ⅰ
英文摘要-------------------------------------------------------------------------Ⅱ
誌謝-------------------------------------------------------------------------------Ⅲ
總目錄----------------------------------------------------------------------------Ⅳ
圖目錄----------------------------------------------------------------------------Ⅷ
表目錄----------------------------------------------------------------------------XI
第一章 緒論--------------------------------------------------------------------- 1
1.1前言-----------------------------------------------------------------------1
1.2研究動機-----------------------------------------------------------------3
第二章 文獻回顧---------------------------------------------------------------4
2.1聚對苯二甲二乙酯(PET)簡介---------------------------------------4
2.2高分子表面處理之方法----------------------------------------------7
2.2.1火焰處理-------------------------------------------------------- 7
2.2.2電暈放電---------------------------------------------------------7
2.2.3化學處理---------------------------------------------------------7
2.2.4離子束改質------------------------------------------------------7
2.2.5電漿處理---------------------------------------------------------7
2.3氧化鋅(ZnO)薄膜特性------------------------------------------------9
2.4濺鍍原理---------------------------------------------------------------12
2.5氧化鋅系薄膜性質與基板溫度之相關性------------------------13
2.6薄膜之微結構---------------------------------------------------------14
2.7氧化鋅系薄膜沉積於玻璃基板與塑膠基板之性質------------15
2.8軟性 (可撓式)電子產品之應用------------------------------------16
第三章實驗方式與流程------------------------------------------------------18
3.1實驗流程---------------------------------------------------------------18
3.2基板前製處理---------------------------------------------------------19
3.2.1電暈設備介紹--------------------------------------------------20
3.2.2接觸角量測-----------------------------------------------------21
3.2.3 PET表面形態分析--------------------------------------------22
3.2.4達因筆測試-----------------------------------------------------23
3.2.5光學特性量測--------------------------------------------------24
3.3沉積GAZO薄膜於PET基板-------------------------------------25
3.3.1薄膜晶體結構分析--------------------------------------------26
3.3.2薄膜顯微組織觀察(SEM)------------------------------------26
3.3.3表面形貌分析(AFM) -----------------------------------------26
3.3.4霍爾量測--------------------------------------------------------26
3.3.5光學特性量測--------------------------------------------------27
3.3.6百格測試--------------------------------------------------------27
第四章 實驗結果與分析 ---------------------------------------------------28
4.1經不同電暈功率改質後之PET基板特性分析----------------28
4.1.1接觸角量測-----------------------------------------------------28
4.1.2表面形態分析--------------------------------------------------30
4.1.3粗糙度分析-----------------------------------------------------32
4.1.4表面能分析-----------------------------------------------------33
4.1.5光穿透率分析--------------------------------------------------35
4.1.6 PET經不同電暈功率處理後的性質變化-----------------36
4.2 GAZO薄膜特性分析----------------------------------------------37
4.2.1薄膜晶體結構分析(XRD) -----------------------------------37
4.2.2薄膜之顯微組織觀察-----------------------------------------39
4.2.2.1薄膜表面形貌觀察-------------------------------------39
4.2.2.2薄膜橫截面觀察-----------------------------------------40
4.2.3薄膜表面形貌分析(AFM )-----------------------------------41
4.2.4薄膜電性量測--------------------------------------------------43
4.2.5光穿透率分析--------------------------------------------------44
4.2.6薄膜附著力測試(百格測試) --------------------------------47
4.2.7不同基板溫度下沉積GAZO薄膜性質之變化----------48
第五章 結論-------------------------------------------------------------------49
參考資料-----------------------------------------------------------------------50

圖目錄
圖2-1 PET分子結構-----------------------------------------------------------5
圖2-2 PET之DSC分析-------------------------------------------------------6
圖2-3氧化鋅晶體結構-------------------------------------------------------10
圖2-4 Al摻雜量對AZO薄膜載子遷移率與載子濃度之影響--------11
圖2-5濺鍍過程之示意圖 ---------------------------------------------------12
圖2-6基板溫度對GZO薄膜結晶性之影響------------------------------13
圖2-7基板溫度對GZO薄膜電性之影響---------------------------------13
圖2-8氣體壓力及基板溫度對薄膜成長之影響--------------------------15
圖2-9 AZO薄膜沉積於玻璃基板與塑膠基板之結晶性比較----------16
圖2-10 AZO薄膜沉積於玻璃基板與塑膠基板之光穿透率比較-----16
圖2-11軟性電子產品之應用-------------------------------------------------17
圖3-1基板前製處理流程圖--------------------------------------------------18
圖3-2沉積GAZO薄膜之流程圖-------------------------------------------19
圖3-3電暈系統(a)電暈設備之示意圖(b)產生電暈之狀態-------------20
圖3-4材料表面與液體間作用力--------------------------------------------21
圖3-5彩色3D雷射掃瞄顯微鏡 -------------------------------------------22
圖3-6達因筆--------------------------------------------------------------------23
圖3-7判定達因筆之液體於材料表面之狀態示意圖--------------------23
圖3-8穿透率檢測系統--------------------------------------------------------24
圖3-9 Van der Pauw法量測示意圖-----------------------------------------27
圖3-10附著力判斷的標準---------------------------------------------------27
圖4-1不同電暈功率時PET基板與水滴接觸之狀態 -----------------28
圖4-2電暈功率對PET接觸角之影響 -----------------------------------29
圖4-3電暈功率對PET表面形態之影響----------------------------------30
圖4-4電暈功率對PET表面形貌之影響----------------------------------31
圖4-5電暈功率對PET表面粗糙度之影響-------------------------------32
圖4-6 PET基板於不同電暈功率時達因筆之分佈狀態----------------33
圖4-7電暈功率對PET基板表面能之影響------------------------------34
圖4-8電暈處理後的PET表面能隨時間的變化狀態------------------34
圖4-9電暈功率對PET光穿透率之影響---------------------------------35
圖4-10不同基板溫度沉積GAZO薄膜之晶體結構分析--------------37
圖4-11不同基板溫度沉積GAZO薄膜之晶粒尺寸分析--------------38
圖4-12不同基板溫度沉積GAZO薄膜之表面形貌(插圖為低倍率之SEM影像-50k )----------------------------------------------------------------39
圖4-13不同基板溫度沉積GAZO薄膜之橫截面形態----------------40
圖4-14不同基板溫度沉積薄膜表面形態(電暈功率3 kW) ----------41
圖4-15不同基板溫度沉積薄膜表面形貌(電暈功率3 kW)-----------42
圖4-16不同基板溫度沉積薄膜表面粗糙度(電暈功率3 kW) -------42
圖4-17基板溫度對薄膜電性之影響--------------------------------------43
圖4-18薄膜沉積於不同電暈功率處理的基板之光穿透率(基板溫度135 ℃)--------------------------------------------------------------------------44
圖4-19薄膜沉積於不同基板溫度之光穿透率(電暈功率3 kW)-----45
圖4-20 GAZO薄膜的光學能隙分析--------------------------------------46
圖4-21不同電暈功率之百格測試(基材溫度135 ℃)-----------------47

表目錄
表1.1玻璃基板與塑膠基板之物性比較表---------------------------------2
表1.2常用塑膠基板之物性比較表------------------------------------------2
表2-1常用塑膠基板的使用溫度比較表------------------------------------5
表2-2常用可撓基板之特性比較表------------------------------------------6
表2-3常用於高分子材料表面改質方法的比較表------------------------8
表2-4氧化鋅基本性質--------------------------------------------------------10
表2-5 GZO與AZO薄膜之物性比較--------------------------------------11
表2-6 GZO薄膜沉積於玻璃基板與塑膠基板的電性比較-------------15
表3.1電暈參數-----------------------------------------------------------------20
表3.2沉積GAZO薄膜之各項參數----------------------------------------25
表4-1經不同電暈功率處理後的PET性質-------------------------------36
表4-2不同基板溫度沉積GAZO薄膜性質----------------------------48

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