臺灣博碩士論文加值系統

為了得到快速的生醫感測，我們透過MEMS與CMOS電路製程技術整合的概念，作為設計電容式生醫感測器的架構，並且不僅將感測單元與電路整合，在感測區域的製作僅使用CMOS標準電路製程，免去獨立後製程的步驟，實現一個只要在功能化修飾步驟稍加變動，就可以對各種生物分子或病菌細胞作感測，成為一晶片多用途的電容式生醫感測器。而四種不同電容值的感測電容面積大小依序為10×10〖 μm〗^2 、20×20 〖μm〗^2 、30×30 〖μm〗^2 、40×40 〖μm〗^2，電容值分別為10.06 fF、39.83 fF、91.05 fF與159.65 fF四種，感測電容與類比電路緩衝器，配合數位電路組合成4×4的陣列，共用一個類比緩衝輸出級，分別做出四組感測陣列區塊，總共是4×16個感測電容，更可以達到單一晶片同時做不同修飾或是不同標的物的量測，徹底的達到一晶片多用途的效果。
我們選定使用DNA作為我們的測試目標，將經過修飾以後的晶片再加入互補端DNA以後，所量測濃度從1 fM (6.14 fg/ml)到1 nM (6.14ng/ml)所造成的電容變化，隨著濃度增加感測電容相對下降，而在加入非互補端DNA以後發現電容變化則是在一個小範圍內跳動，因此，我們可以說我們成功的實現了一個CMOS 4×16 電容式生醫感測陣列。

第一章 緒論……………………………………………………1
1-1 研究動機………………………………………………1
1-2 CMOS-MEMS技術簡介……………………………………2
1-3 文獻回顧………………………………………………5

第二章 感測器原理與電路設計………………………………14
2-1 電容感測原理…………………………………………14
2-2 感測電容架構…………………………………………15
2-3 感測電路架構…………………………………………17
2-4 電路架構模擬…………………………………………21
2-5 晶片佈局與後模擬……………………………………23

第三章 生物實驗設計與測試…………………………………26
3-1 生醫材料簡介…………………………………………26
3-2 表面固定化測試………………………………………28

第四章 晶片量測與感測結果…………………………………33
4-1 晶片檢視與封裝………………………………………33
4-2 晶片量測………………………………………………36
4-3 量測分析………………………………………………45
4-4 雜訊分析………………………………………………56

第五章 結論與未來工作………………………………………57

參考文獻…………………………………………………………59

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